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1. 发明申请

US20120116567A1 SUBSTRATE TREATMENT APPARATUS, METHOD OF TRANSFERRING SUBSTRATE, AND NON-TRANSITORY COMPUTER STORAGE MEDIUM 有权
标题翻译：基板处理装置，基板转印方法和非电子计算机存储介质
公开(公告)号：US20120116567A1
公开(公告)日：2012-05-10
申请号：US13281535
申请日：2011-10-26
申请人： Makoto HAYAKAWA , Hiroshi Tomita , Tatsuhei Yoshida
发明人： Makoto HAYAKAWA , Hiroshi Tomita , Tatsuhei Yoshida
IPC分类号： G06F19/00
CPC分类号： H01L21/67288 , H01L21/67178 , H01L21/67276 , H01L21/67745
摘要： A coating and developing treatment apparatus includes a substrate transfer mechanism; a defect inspection section; means for controlling transfer of a substrate; means for classifying a defect based on the state of the defect; means for storing a transfer route of the substrate by the substrate transfer mechanism when the substrate has been treated by treatment sections; and means for specifying, based on a kind of the defect classified by the defect classification means and the transfer route of the substrate stored in the storage means, a treatment section which is a cause of occurrence of the classified defect, and judging presence or absence of an abnormality of the specified treatment section, wherein the transfer control means controls the substrate transfer mechanism to transfer a substrate bypassing the treatment section which has been judged to be abnormal by the defective treatment specification means.
摘要翻译：涂布显影处理装置包括基板转印机构; 缺陷检查部; 用于控制基板转印的装置; 基于缺陷状态对缺陷进行分类的手段; 用于在基板被处理部处理时通过基板转印机构存储基板的转印路径的装置; 以及用于基于由缺陷分类装置分类的缺陷的种类和存储在存储装置中的基板的传送路线来指定作为分类缺陷的发生原因的处理部分，并且判断是否存在指定处理部的异常，其中转移控制装置控制基板转移机构，以传递旁路通过缺陷处理指定装置判断为异常的处理部的基板。

2. 发明申请

US20070182814A1 Defect inspection method, defect inspection system, and computer readable storage medium 有权
标题翻译：缺陷检查方法，缺陷检查系统和计算机可读存储介质
公开(公告)号：US20070182814A1
公开(公告)日：2007-08-09
申请号：US11656956
申请日：2007-01-24
申请人： Makoto Hayakawa , Hiroshi Tomita
发明人： Makoto Hayakawa , Hiroshi Tomita
IPC分类号： H04N7/18
CPC分类号： G01N21/9501
摘要： In the present invention, an image of a substrate is picked up by an image pickup unit with the substrate being held by a transfer member. A drive unit for the transfer member is controlled by a driving signal from a first controller. A driving signal outputted to the first controller is outputted also to a second controller so that the second controller controls the image pickup unit based on the driving signal, thereby synchronizing drive of the transfer member with the image pickup by the image pickup unit. According to the present invention, the throughput in performing a defect inspection for the substrate is improved and a precise image is captured and subjected to accurate inspection.
摘要翻译：在本发明中，基板被转印部件保持的图像拾取单元拾取基板的图像。用于传送构件的驱动单元由来自第一控制器的驱动信号控制。输出到第一控制器的驱动信号也输出到第二控制器，使得第二控制器基于驱动信号控制图像拾取单元，由此通过图像拾取单元使传送部件与图像拾取器的驱动同步。根据本发明，提高了对基板进行缺陷检查的吞吐量，并捕获精确的图像并进行了精确的检查。

3. 发明授权

US09025852B2 Substrate inspection apparatus and method for operating the same 有权
标题翻译：基板检查装置及其操作方法
公开(公告)号：US09025852B2
公开(公告)日：2015-05-05
申请号：US13482270
申请日：2012-05-29
申请人： Kazuya Hisano , Hiroshi Tomita , Norihisa Koga , Tadashi Nishiyama , Makoto Hayakawa
发明人： Kazuya Hisano , Hiroshi Tomita , Norihisa Koga , Tadashi Nishiyama , Makoto Hayakawa
IPC分类号： G06K9/00 , G01N21/956 , G01N21/88 , G01N21/93 , G01N21/95 , G06T7/00
CPC分类号： G01N21/956 , G01N21/8806 , G01N21/93 , G01N21/9501 , G01N2021/9513 , G06T7/0004
摘要： In one embodiment, a substrate inspection apparatus performs, in its maintenance mode, operations including: guiding a light emitted from an illuminating unit to an imaging device via a light-guiding member disposed in a casing; judging whether or not a level of a brightness signal obtained by the imaging device falls within a predetermined allowable range when a light emitted from the illuminating unit falls on the imaging device via the light-guiding member; and alarming, if it is judged that the value of the brightness signal is out of the predetermined allowable range, that replacement of the illuminating unit is required.
摘要翻译：在一个实施例中，基板检查装置在其维护模式中执行以下操作，其包括：经由设置在壳体中的导光构件将从照明单元发射的光引导到成像装置; 当从照明单元发射的光经由导光部件落在成像装置上时，判断由成像装置获得的亮度信号的电平是否落入预定的允许范围内; 并且如果判断亮度信号的值在预定的允许范围之外，则需要更换照明单元。

4. 发明授权

US08985880B2 Coating and developing apparatus and method 有权
标题翻译：涂装与显影装置及方法
公开(公告)号：US08985880B2
公开(公告)日：2015-03-24
申请号：US13177997
申请日：2011-07-07
申请人： Nobuaki Matsuoka , Akira Miyata , Shinichi Hayashi , Suguru Enokida , Hiroshi Tomita , Makoto Hayakawa , Tatsuhei Yoshida
发明人： Nobuaki Matsuoka , Akira Miyata , Shinichi Hayashi , Suguru Enokida , Hiroshi Tomita , Makoto Hayakawa , Tatsuhei Yoshida
IPC分类号： G03D5/00 , G03B27/32 , H01L21/67
CPC分类号： G03F7/16 , H01L21/6715
摘要： In one embodiment, a coating and developing apparatus includes a processing block having two early-stage coating unit blocks, two later-stage coating unit blocks and two developing unit blocks, each unit blocks being vertically stacked on each other. The apparatus has at least two operation modes M1 and M2 adapted for abnormality. In mode M1 the processing module that processed the abnormal substrate in the developing unit blocks is identified, and subsequent substrates are transported to the processing module or modules, of the same type as the identified processing module, other than the identified processing module. In mode M2, the developing unit block that processed the abnormal substrate is identified, and subsequent substrates are transported to the developing unit block other than the identified developing unit block.
摘要翻译：在一个实施例中，涂层和显影装置包括具有两个早期涂覆单元块，两个后期涂层单元块和两个显影单元块的处理块，每个单元块彼此垂直堆叠。该装置具有至少两个适于异常的操作模式M1和M2。在模式M1中，识别处理显影单元块中的异常衬底的处理模块，并且随后的衬底被传送到除了所识别的处理模块之外的与所识别的处理模块相同类型的处理模块。在模式M2中，识别处理异常衬底的显影单元块，并且随后的衬底被传送到除了所识别的显影单元块之外的显影单元块。

5. 发明授权

US08139107B2 Defect inspection method, defect inspection system, and computer readable storage medium 有权
标题翻译：缺陷检查方法，缺陷检查系统和计算机可读存储介质
公开(公告)号：US08139107B2
公开(公告)日：2012-03-20
申请号：US11656956
申请日：2007-01-24
申请人： Makoto Hayakawa , Hiroshi Tomita
发明人： Makoto Hayakawa , Hiroshi Tomita
IPC分类号： H04N7/18
CPC分类号： G01N21/9501
摘要： In the present invention, an image of a substrate is picked up by an image pickup unit with the substrate being held by a transfer member. A drive unit for the transfer member is controlled by a driving signal from a first controller. A driving signal outputted to the first controller is outputted also to a second controller so that the second controller controls the image pickup unit based on the driving signal, thereby synchronizing drive of the transfer member with the image pickup by the image pickup unit. According to the present invention, the throughput in performing a defect inspection for the substrate is improved and a precise image is captured and subjected to accurate inspection.
摘要翻译：在本发明中，基板被转印部件保持的图像拾取单元拾取基板的图像。用于传送构件的驱动单元由来自第一控制器的驱动信号控制。输出到第一控制器的驱动信号也输出到第二控制器，使得第二控制器基于驱动信号控制图像拾取单元，由此通过图像拾取单元使传送部件与图像拾取器的驱动同步。根据本发明，提高了对基板进行缺陷检查的吞吐量，并捕获精确的图像并进行了精确的检查。

6. 发明申请

US20120013859A1 COATING AND DEVELOPING APPARATUS AND METHOD 有权
标题翻译：涂料和开发设备和方法
公开(公告)号：US20120013859A1
公开(公告)日：2012-01-19
申请号：US13177997
申请日：2011-07-07
申请人： Nobuaki Matsuoka , Akira Miyata , Shinichi Hayashi , Suguru Enokida , Hiroshi Tomita , Makoto Hayakawa , Tatsuhei Yoshida
发明人： Nobuaki Matsuoka , Akira Miyata , Shinichi Hayashi , Suguru Enokida , Hiroshi Tomita , Makoto Hayakawa , Tatsuhei Yoshida
IPC分类号： G03B27/52
CPC分类号： G03F7/16 , H01L21/6715
摘要： In one embodiment, a coating and developing apparatus includes a processing block having two early-stage coating unit blocks, two later-stage coating unit blocks and two developing unit blocks, each unit blocks being vertically stacked on each other. The apparatus has at least two operation modes M1 and M2 adapted for abnormality. In mode M1 the processing module that processed the abnormal substrate in the developing unit blocks is identified, and subsequent substrates are transported to the processing module or modules, of the same type as the identified processing module, other than the identified processing module. In mode M2, the developing unit block that processed the abnormal substrate is identified, and subsequent substrates are transported to the developing unit block other than the identified developing unit block.
摘要翻译：在一个实施例中，涂层和显影装置包括具有两个早期涂覆单元块，两个后期涂层单元块和两个显影单元块的处理块，每个单元块彼此垂直堆叠。该装置具有至少两个适于异常的操作模式M1和M2。在模式M1中，识别处理显影单元块中的异常衬底的处理模块，并且随后的衬底被传送到除了所识别的处理模块之外的与所识别的处理模块相同类型的处理模块。在模式M2中，识别处理异常衬底的显影单元块，并且随后的衬底被传送到除了所识别的显影单元块之外的显影单元块。

7. 发明申请

US20120307045A1 SUBSTRATE INSPECTION APPARATUS AND METHOD FOR OPERATING THE SAME 有权
标题翻译：基板检查装置及其操作方法
公开(公告)号：US20120307045A1
公开(公告)日：2012-12-06
申请号：US13482270
申请日：2012-05-29
申请人： Kazuya Hisano , Hiroshi Tomita , Norihisa Koga , Tadashi Nishiyama , Makoto Hayakawa
发明人： Kazuya Hisano , Hiroshi Tomita , Norihisa Koga , Tadashi Nishiyama , Makoto Hayakawa
IPC分类号： H04N7/18
CPC分类号： G01N21/956 , G01N21/8806 , G01N21/93 , G01N21/9501 , G01N2021/9513 , G06T7/0004
摘要： In one embodiment, a substrate inspection apparatus performs, in its maintenance mode, operations including: guiding a light emitted from an illuminating unit to an imaging device via a light-guiding member disposed in a casing; judging whether or not a level of a brightness signal obtained by the imaging device falls within a predetermined allowable range when a light emitted from the illuminating unit falls on the imaging device via the light-guiding member; and alarming, if it is judged that the value of the brightness signal is out of the predetermined allowable range, that replacement of the illuminating unit is required.
摘要翻译：在一个实施例中，基板检查装置在其维护模式中执行以下操作，其包括：经由设置在壳体中的导光部件将从照明单元发射的光引导到成像装置; 当从照明单元发射的光经由导光部件落在成像装置上时，判断由成像装置获得的亮度信号的电平是否落入预定的允许范围内; 并且如果判断亮度信号的值在预定的允许范围之外，则需要更换照明单元。

8. 发明授权

US09026240B2 Substrate treatment apparatus, method of transferring substrate, and non-transitory computer storage medium 有权
标题翻译：基板处理装置，基板转印方法和非暂时性计算机存储介质
公开(公告)号：US09026240B2
公开(公告)日：2015-05-05
申请号：US13281535
申请日：2011-10-26
申请人： Makoto Hayakawa , Hiroshi Tomita , Tatsuhei Yoshida
发明人： Makoto Hayakawa , Hiroshi Tomita , Tatsuhei Yoshida
IPC分类号： G06F19/00 , G06F17/50 , G06F11/00 , G06F7/02 , H01L21/67 , H01L21/677
CPC分类号： H01L21/67288 , H01L21/67178 , H01L21/67276 , H01L21/67745
摘要： A coating and developing treatment apparatus includes a substrate transfer mechanism; and a defect inspection section. A transfer control part controls transfer of a substrate. A defect classification part classifies a defect based on the state of the defect. A storage part stores a transfer route of the substrate by the substrate transfer mechanism when the substrate has been treated by treatment sections. A defective treatment specification part specifies, based on a kind of the defect classified by the defect classification part and the transfer route of the substrate stored in the storage part, a treatment section which is a cause of occurrence of the classified defect, and judges presence or absence of an abnormality of the specified treatment section. The transfer control part controls the substrate transfer mechanism to transfer a substrate bypassing the treatment section which has been judged to be abnormal by the defective treatment specification part.
摘要翻译：涂布显影处理装置包括基板转印机构; 和缺陷检查部。转印控制部件控制基板的转印。缺陷分类部根据缺陷的状态对缺陷进行分类。当基板已经被处理部处理时，存储部件通过基板传送机构来存储基板的传送路径。有缺陷的处理规范部分基于由缺陷分类部分分类的缺陷的种类和存储在存储部分中的基板的传送路径，指定作为分类缺陷的发生的原因的处理部，并且判断存在或没有指定治疗部位的异常。转印控制部分控制基板转印机构，以传递由缺陷处理指定部分判断为异常的处理部旁路的基板。

9. 发明授权

US07652276B2 Defect inspection method, defect inspection apparatus having a mounting table with a substrate thereon and an image pickup device are relatively moved for capturing the image of the substrate, and computer readable storage medium storing a program for performing the method 有权
标题翻译：相对移动缺陷检查方法，具有其上具有基板的安装台和图像拾取装置的缺陷检查装置用于捕获基板的图像，以及存储用于执行该方法的程序的计算机可读存储介质
公开(公告)号：US07652276B2
公开(公告)日：2010-01-26
申请号：US11698049
申请日：2007-01-26
申请人： Makoto Hayakawa , Hiroshi Tomita
发明人： Makoto Hayakawa , Hiroshi Tomita
IPC分类号： G01N21/86
CPC分类号： G01N21/9501
摘要： In the present invention, an image pickup device moving by drive of a drive unit picks up an image of a substrate on a mounting table. The drive unit is controlled by a driving signal from a first controller. The driving signal outputted to the first controller is outputted also to a second controller, so that the second controller controls the image pickup device based on the driving signal. The movement of the image pickup device itself is synchronized with the image pickup by the image pickup device. According to the present invention, at the time when the mounting table mounting the substrate thereon and the image pickup device are relatively moved to capture the image of the substrate, a precise image without image distortion can be captured for accurate inspection.
摘要翻译：在本发明中，通过驱动单元的驱动移动的图像拾取装置在安装台上拾取基板的图像。驱动单元由来自第一控制器的驱动信号控制。输出到第一控制器的驱动信号也输出到第二控制器，使得第二控制器基于驱动信号控制图像拾取装置。图像拾取装置本身的移动与图像拾取装置的图像拾取同步。根据本发明，当安装基板的安装台和图像拾取装置相对移动以捕获基板的图像时，可以捕获没有图像失真的精确图像以进行精确的检查。

10. 发明申请

US20070188832A1 Defect inspection method, defect inspection apparatus, and computer readable storage medium 有权
标题翻译：缺陷检查方法，缺陷检查装置和计算机可读存储介质
公开(公告)号：US20070188832A1
公开(公告)日：2007-08-16
申请号：US11698049
申请日：2007-01-26
申请人： Makoto Hayakawa , Hiroshi Tomita
发明人： Makoto Hayakawa , Hiroshi Tomita
IPC分类号： H04N1/00
CPC分类号： G01N21/9501
摘要： In the present invention, an image pickup device moving by drive of a drive unit picks up an image of a substrate on a mounting table. The drive unit is controlled by a driving signal from a first controller. The driving signal outputted to the first controller is outputted also to a second controller, so that the second controller controls the image pickup device based on the driving signal. The movement of the image pickup device itself is synchronized with the image pickup by the image pickup device. According to the present invention, at the time when the mounting table mounting the substrate thereon and the image pickup device are relatively moved to capture the image of the substrate, a precise image without image distortion can be captured for accurate inspection.
摘要翻译：在本发明中，通过驱动单元的驱动移动的图像拾取装置在安装台上拾取基板的图像。驱动单元由来自第一控制器的驱动信号控制。输出到第一控制器的驱动信号也输出到第二控制器，使得第二控制器基于驱动信号控制图像拾取装置。图像拾取装置本身的移动与图像拾取装置的图像拾取同步。根据本发明，当安装基板的安装台和图像拾取装置相对移动以捕获基板的图像时，可以捕获没有图像失真的精确图像以进行精确的检查。

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