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1. 发明申请

US20160061723A1 FOCUSED BEAM SCATTEROMETRY APPARATUS AND METHOD 有权
标题翻译：聚焦光束扫描仪和方法
公开(公告)号：US20160061723A1
公开(公告)日：2016-03-03
申请号：US14833540
申请日：2015-08-24
申请人： Miguel A. Alonso , Stephen Head , Michael Theisen , Thomas Brown
发明人： Miguel A. Alonso , Stephen Head , Michael Theisen , Thomas Brown
IPC分类号： G01N21/47 , G01J4/04 , G01N21/21
CPC分类号： H01L22/12 , G01B11/02 , G01B11/22 , G01B11/30 , G01B2210/56 , G01N21/21 , G01N21/9501 , G03F7/70625
摘要： The capacity to measure nanoscale features rapidly and accurately is of central importance for the monitoring of manufacturing processes in the production of computer integrated circuits. It is known that far-field scattered light requires a priori sample information in order to reconstruct nanoscale information such as is required in semiconductor metrology. Parameters of interest include, for example, trench depth, duty cycle, wall angle and oxide layer thickness. We describe a scatterometry apparatus and method that uses unconventional polarization states in the pupil of a high NA objective lens, and refer to this as focused beam scatterometry, in which the illumination consists of a focused field with a suitably tailored, spatially-varying polarization distribution. We describe how four or more parameters can be measured and distinguished with an accuracy consistent with the needs laid out in the semiconductor roadmap.
摘要翻译：快速准确地测量纳米尺度特征的能力对于计算机集成电路生产过程中的制造过程的监控至关重要。已知远场散射光需要先验样本信息，以便重建诸如半导体计量学中所需的纳米尺度信息。感兴趣的参数包括例如沟槽深度，占空比，壁角和氧化物层厚度。我们描述了在高NA物镜的瞳孔中使用非常规极化状态的散射测量装置和方法，并且将其称为聚焦光束散射法，其中照明由具有适当调整的空间变化的偏振分布的聚焦场。我们描述如何测量和区分四个或更多个参数，其精度与半导体路线图中的要求一致。

2. 发明授权

US09793178B2 Focused beam scatterometry apparatus and method 有权
公开(公告)号：US09793178B2
公开(公告)日：2017-10-17
申请号：US14833540
申请日：2015-08-24
申请人： Miguel A. Alonso , Stephen Head , Michael Theisen , Thomas Brown
发明人： Miguel A. Alonso , Stephen Head , Michael Theisen , Thomas Brown
IPC分类号： H01L21/66 , G01B11/22 , G01N21/21 , G01N21/95 , G01B11/30 , G01B11/02 , G03F7/20
CPC分类号： H01L22/12 , G01B11/02 , G01B11/22 , G01B11/30 , G01B2210/56 , G01N21/21 , G01N21/9501 , G03F7/70625
摘要： The capacity to measure nanoscale features rapidly and accurately is of central importance for the monitoring of manufacturing processes in the production of computer integrated circuits. It is known that far-field scattered light requires a priori sample information in order to reconstruct nanoscale information such as is required in semiconductor metrology. Parameters of interest include, for example, trench depth, duty cycle, wall angle and oxide layer thickness. We describe a scatterometry apparatus and method that uses unconventional polarization states in the pupil of a high NA objective lens, and refer to this as focused beam scatterometry, in which the illumination consists of a focused field with a suitably tailored, spatially-varying polarization distribution. We describe how four or more parameters can be measured and distinguished with an accuracy consistent with the needs laid out in the semiconductor roadmap.

3. 发明授权

US4835255A T-cell membrane protein 失效
标题翻译： T细胞膜蛋白
公开(公告)号：US4835255A
公开(公告)日：1989-05-30
申请号：US31316
申请日：1987-03-26
申请人： Sherman M. Weissman , Miguel A. Alonso
发明人： Sherman M. Weissman , Miguel A. Alonso
IPC分类号： C07K14/705 , C07K14/725 , C07K16/28
CPC分类号： C07K16/28 , C07K14/705
摘要： A 16.7 kilodalton membrane protein which is produced in mature, but no early-stage, T cells has been discovered. The protein has four distinct amphipathic domains, each having an amino acid composition which is predictive of an alpha helical structure that would be stable in a lipid bilayer. Each of these regions is flanked by a relatively polar domain whose amino acid sequence is predictive of .beta. pleat peptide regions. An antibody specific against one of the polar domains can be used to discriminate mature T-cells in a mixed-cell sample.
摘要翻译：已经发现在成熟但没有早期阶段的T细胞中产生的16.7千道尔顿膜蛋白。蛋白质具有四个不同的两亲性结构域，每个具有氨基酸组成，其预示着在脂质双层中稳定的α螺旋结构。这些区域中的每一个侧翼都是相对极性的结构域，其氨基酸序列预测β褶皱肽区域。可以使用针对一个极性结构域的特异性抗体来鉴别混合细胞样品中的成熟T细胞。

4. 发明授权

US5605905A Antitumoral compounds 失效
标题翻译：抗肿瘤化合物
公开(公告)号：US5605905A
公开(公告)日：1997-02-25
申请号：US412983
申请日：1995-03-28
申请人： Carmen Avendano , Miguel A. Alonso , Modesta Espada , Dolores Garcia-Gravalos , Jose C. Mendendez , Blanca Ocana , Jose M. Perez
发明人： Carmen Avendano , Miguel A. Alonso , Modesta Espada , Dolores Garcia-Gravalos , Jose C. Mendendez , Blanca Ocana , Jose M. Perez
IPC分类号： A61K31/435 , A61K31/47 , A61K31/473 , A61K31/4745 , A61P35/00 , C07D221/08 , C07D471/04 , A61K31/44 , C07D471/06
CPC分类号： C07D471/04 , C07D221/08
摘要： Azaanthracene-triones of the formula: ##STR1## (in which: R.sup.1, R.sup.2, R.sup.4 and R.sup.5 are the same or are different and each is a hydrogen atom or a lower alkyl group;R.sup.3 is a hydrogen atom, a lower alkyl group, a phenyl group or an amino-substituted phenyl group; andX is a --CH--, .dbd.N-- or --NH--, whereby the ring containing the group X is a benzene, pyridine or dihydropyridene ring)have antitumoral activity.
摘要翻译：式（ⅰ）（其中：R 1，R 2，R 4和R 5相同或不同并且各自为氢原子或低级烷基）; R 3为氢原子，低级烷基烷基，苯基或氨基取代的苯基; X为-CH-，= N-或-NH-，其中含有基团X的环为苯，吡啶或二氢吡叉环）具有抗肿瘤活性。

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