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    • 3. 发明申请
    • Gate of a Semiconductor Device and Method for Forming the Same
    • 半导体器件的栅极及其形成方法
    • US20060252199A1
    • 2006-11-09
    • US11458224
    • 2006-07-18
    • Min Yoo
    • Min Yoo
    • H01L21/8242
    • H01L29/0653H01L27/10876H01L27/10888H01L27/10891
    • Disclosed herein is a method for forming a gate structure in a semiconductor device. The method comprises forming a SiGe film on a predetermined region of a silicon substrate corresponding to a bit-line node portion where a bit-line junction is formed, growing a silicon film over the silicon substrate having the SiGe film formed thereon, selectively etching the SiGe film, embedding a dielectric material into a portion where the SiGe film is removed, forming a stepped profile on the silicon film by etching a predetermined portion of the silicon film such that the bit-line node portion is included in the stepped profile, and forming a gate on the silicon film having the stepped profile formed therein such that the gate overlaps the stepped profile. The dielectric pad prevents the bit-line junction from spreading downward upon operation of the gate, thereby enhancing a punch-through phenomenon.
    • 这里公开了一种在半导体器件中形成栅极结构的方法。 该方法包括在对应于形成位线结的位线节点部分的硅衬底的预定区域上形成SiGe膜,在其上形成有SiGe膜的硅衬底上生长硅膜,选择性地蚀刻 SiGe膜,将介电材料嵌入到去除SiGe膜的部分中,通过蚀刻硅膜的预定部分使得在硅膜上形成阶梯形轮廓,使得位线节点部分包括在阶梯轮廓中,以及 在硅膜上形成具有形成在其中的阶梯轮廓的栅极,使得栅极与阶梯轮廓重叠。 电介质垫在栅极操作时防止位线结面向下扩展,从而增强穿通现象。
    • 7. 发明申请
    • GATE STRUCTURE OF A SEMICONDUCTOR DEVICE
    • 半导体器件的门结构
    • US20060145200A1
    • 2006-07-06
    • US11174788
    • 2005-07-05
    • Min Yoo
    • Min Yoo
    • H01L31/112
    • H01L29/0653H01L27/10876H01L27/10888H01L27/10891
    • Disclosed herein is a method for forming a gate structure in a semiconductor device. The method comprises forming a SiGe film on a predetermined region of a silicon substrate corresponding to a bit-line node portion where a bit-line junction is formed, growing a silicon film over the silicon substrate having the SiGe film formed thereon, selectively etching the SiGe film, embedding a dielectric material into a portion where the SiGe film is removed, forming a stepped profile on the silicon film by etching a predetermined portion of the silicon film such that the bit-line node portion is included in the stepped profile, and forming a gate on the silicon film having the stepped profile formed therein such that the gate overlaps the stepped profile. The dielectric pad prevents the bit-line junction from spreading downward upon operation of the gate, thereby enhancing a punch-through phenomenon.
    • 这里公开了一种在半导体器件中形成栅极结构的方法。 该方法包括在对应于形成位线结的位线节点部分的硅衬底的预定区域上形成SiGe膜,在其上形成有SiGe膜的硅衬底上生长硅膜,选择性地蚀刻 SiGe膜,将介电材料嵌入到去除SiGe膜的部分中,通过蚀刻硅膜的预定部分使得在硅膜上形成阶梯形轮廓,使得位线节点部分包括在阶梯轮廓中,以及 在硅膜上形成具有形成在其中的阶梯轮廓的栅极,使得栅极与阶梯轮廓重叠。 电介质垫在栅极操作时防止位线结面向下扩展,从而增强穿通现象。