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    • 3. 发明授权
    • Disk drive head gimbal assembly including a PZT micro-actuator with a pair of separate PZT elements
    • 磁盘驱动器头万向架组件包括具有一对单独的PZT元件的PZT微型致动器
    • US08134809B2
    • 2012-03-13
    • US12081699
    • 2008-04-18
    • MingGao YaoLin GuoYu Sun
    • MingGao YaoLin GuoYu Sun
    • G11B5/56G11B21/24
    • G11B5/4826G11B5/483G11B5/4873G11B5/5552
    • A PZT micro-actuator for a head gimbal assembly includes a pair of separate PZT elements and each PZT element has a body and a plurality of electrical pads. The body has at least two electrode-piezoelectric combination layers laminated together. The at least two electrode-piezoelectric combination layers are physically connected with but electrically isolated from each other. Each electrode-piezoelectric combination layer has at least two of the electrical pads thereon. The electrical pads extend out from the body of the corresponding PZT element. All the electrical pads of each PZT element are offset a predetermined distance therebetween to be electrically isolated. The present invention also discloses a head gimbal assembly (HGA) with the PZT micro-actuator, an assembling method for the head gimbal assembly and a disk drive unit having such HGA.
    • 用于头万向节组件的PZT微致动器包括一对单独的PZT元件,并且每个PZT元件具有主体和多个电垫。 主体具有层叠在一起的至少两个电极 - 压电组合层。 所述至少两个电极 - 压电组合层在物理上彼此连接但是电隔离。 每个电极 - 压电组合层在其上具有至少两个电焊垫。 电焊盘从相应的PZT元件的主体延伸出来。 每个PZT元件的所有电焊垫偏移预定距离以进行电隔离。 本发明还公开了一种具有PZT微型致动器的头部万向节组件(HGA),用于头部万向节组件的组装方法和具有这种HGA的盘驱动单元。
    • 4. 发明授权
    • Rotational micro-actuator with a rotatable plate, head gimbal assembly and disk drive device with the same
    • 具有可旋转板的旋转微致动器,头万向架组件和具有相同的磁盘驱动装置
    • US07768746B2
    • 2010-08-03
    • US11319577
    • 2005-12-29
    • MingGao YaoYiru Xie
    • MingGao YaoYiru Xie
    • G11B5/56
    • G11B5/596G11B5/4826G11B5/4833G11B5/5552
    • A head gimbal assembly includes a micro-actuator, a slider, and a suspension that supports the micro-actuator and the slider. The micro-actuator includes a metal frame including a top support to support the slider, a bottom support to connect to the suspension, and a pair of side arms that interconnect the top support and the bottom support. The top support includes a rotatable plate and connection arms that couple the rotatable plate to respective side arms. A PZT element is mounted to each of the side arms. Each PZT element is excitable to cause selective movement of the side arms. The suspension includes a load beam having a dimple that engages and supports the rotatable plate in use.
    • 头万向节组件包括微致动器,滑块和支撑微致动器和滑块的悬架。 微致动器包括金属框架,其包括用于支撑滑块的顶部支撑件,连接到悬架的底部支撑件以及将顶部支撑件和底部支撑件相互连接的一对侧臂。 顶部支撑件包括可旋转板和将可旋转板联接到相应侧臂的连接臂。 PZT元件安装到每个侧臂。 每个PZT元件是可激励的,以引起侧臂的选择性移动。 悬架包括具有在使用中接合并支撑可旋转板的凹坑的负载梁。
    • 5. 发明申请
    • Thin film piezoelectric element and its manufacturing method, head gimbal assembly and disk drive unit with the same
    • 薄膜压电元件及其制造方法,头万向架组件和磁盘驱动单元相同
    • US20090316306A1
    • 2009-12-24
    • US12289172
    • 2008-10-22
    • MingGao YaoLin Guo
    • MingGao YaoLin Guo
    • G11B5/48H01L41/22H01L41/083
    • G11B5/4826G11B5/4873G11B5/5552G11B5/596H01L41/314Y10T29/42
    • A thin film piezoelectric element includes a piezoelectric thin film layer, a seed layer and an elastic substrate layer. The piezoelectric thin film layer is a laminated structure comprising a first electrode layer, a second electrode layer and a piezoelectric layer sandwiched between the first electrode layer and the second electrode layer. The seed layer is formed on the second electrode layer, and the elastic substrate layer is formed on the seed layer. The thin film piezoelectric element is a single layer structure and has an elastic substrate layer for supporting the single layer structure, thereby it has enough stiffness and flexibility to afford facilities for manufacture and assembly and to avoid film peeling and deformation, ultimately increasing the production efficiency and lowering the cost. The invention also discloses a method for manufacturing the thin film piezoelectric element, a head gimal assembly and a disk drive unit with the same.
    • 薄膜压电元件包括​​压电薄膜层,种子层和弹性基底层。 压电薄膜层是包括第一电极层,第二电极层和夹在第一电极层和第二电极层之间的压电层的叠层结构。 种子层形成在第二电极层上,弹性基底层形成在种子层上。 薄膜压电元件是单层结构,并且具有用于支撑单层结构的弹性基底层,由此具有足够的刚度和柔性以提供用于制造和组装的设备,并且避免膜剥离和变形,最终提高生产效率 并降低成本。 本发明还公开了一种用于制造薄膜压电元件的方法,头部组件和具有该方法的盘驱动单元。
    • 8. 发明授权
    • Micro-actuator, micro-actuator suspension, and head gimbal assembly with the same
    • 微执行器,微执行器悬架和头万向节万向节总成相同
    • US07468869B2
    • 2008-12-23
    • US11414546
    • 2006-05-01
    • MingGao YaoMasashi Shiraishi
    • MingGao YaoMasashi Shiraishi
    • G11B5/56
    • G11B5/5552G11B5/4813G11B5/4873
    • A micro-actuator for a head gimbal assembly includes a support frame integrated with a suspension flexure of the head gimbal assembly, a block, and a pair of PZT elements. The support frame includes a bottom support, a top support adapted to support a slider of the head gimbal assembly, and a pair of side arms that interconnect the bottom support and the top support. The side arms extend vertically from respective sides of the bottom support and the top support. The block is mounted to the bottom support to provide resonance balance. Each PZT element is mounted to a respective side arm of the support frame and a respective side of the block. The PZT elements are excitable to cause selective movement of the side arms.
    • 用于头部万向架组件的微致动器包括与头部万向节组件,块体和一对PZT元件的悬架弯曲部一体化的支撑框架。 支撑框架包括底部支撑件,适于支撑头部万向架组件的滑块的顶部支撑件以及将底部支撑件与顶部支撑件相互连接的一对侧臂。 侧臂从底部支撑件和顶部支撑件的相应侧面垂直延伸。 该块被安装到底部支撑件以提供共振平衡。 每个PZT元件安装到支撑框架的相应侧臂和块的相应侧。 PZT元件是兴奋的,以引起侧臂的选择性移动。
    • 10. 发明申请
    • Systems and methods for identifying problems with PZT elements of micro-actuators
    • 用于识别微执行器的PZT元件的问题的系统和方法
    • US20080106823A1
    • 2008-05-08
    • US11593169
    • 2006-11-06
    • MingGao Yao
    • MingGao Yao
    • G11B5/56
    • G11B5/5552G11B5/4826G11B5/4873G11B19/048
    • Systems and methods for identifying problems with PZT elements of micro-actuators are provided. In certain example embodiments, a voltage (e.g., a sine voltage) may be applied to a reference unit causing it as well as a test unit to vibrate. Characteristics of the respective resonances (e.g., frequency, amplitude, phase, etc.) may be compared (e.g., by a processor) to determine whether there are problems with the test unit. The reference unit may include an HGA or an HSA of a hard disk drive device. The test unit may include corresponding parts for inspection. Such techniques make it possible to detect problems with PZT elements when there is only one PZT element per micro-actuator.
    • 提供了用于识别微致动器的PZT元件的问题的系统和方法。 在某些示例性实施例中,可以将电压(例如,正弦电压)施加到参考单元,使其以及测试单元振动。 可以比较各个谐振的特性(例如,频率,振幅,相位等)(例如,通过处理器)来确定测试单元是否存在问题。 参考单元可以包括硬盘驱动器装置的HGA或HSA。 测试单元可以包括相应的检查部件。 当每个微致动器只有一个PZT元件时,这种技术使得可以检测PZT元件的问题。