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    • 1. 发明授权
    • Thin film piezoelectric element and its manufacturing method, head gimbal assembly and disk drive unit with the same
    • 薄膜压电元件及其制造方法,头万向架组件和磁盘驱动单元相同
    • US08089732B2
    • 2012-01-03
    • US12289172
    • 2008-10-22
    • MingGao YaoLin Guo
    • MingGao YaoLin Guo
    • G11B5/48
    • G11B5/4826G11B5/4873G11B5/5552G11B5/596H01L41/314Y10T29/42
    • A thin film piezoelectric element includes a piezoelectric thin film layer, a seed layer and an elastic substrate layer. The piezoelectric thin film layer is a laminated structure comprising a first electrode layer, a second electrode layer and a piezoelectric layer sandwiched between the first electrode layer and the second electrode layer. The seed layer is formed on the second electrode layer, and the elastic substrate layer is formed on the seed layer. The thin film piezoelectric element is a single layer structure and has an elastic substrate layer for supporting the single layer structure, thereby it has enough stiffness and flexibility to afford facilities for manufacture and assembly and to avoid film peeling and deformation, ultimately increasing the production efficiency and lowering the cost. The invention also discloses a method for manufacturing the thin film piezoelectric element, a head gimal assembly and a disk drive unit with the same.
    • 薄膜压电元件包括​​压电薄膜层,种子层和弹性基底层。 压电薄膜层是包括第一电极层,第二电极层和夹在第一电极层和第二电极层之间的压电层的叠层结构。 种子层形成在第二电极层上,弹性基底层形成在种子层上。 薄膜压电元件是单层结构,并且具有用于支撑单层结构的弹性基底层,由此具有足够的刚度和柔性以提供用于制造和组装的设备,并且避免膜剥离和变形,最终提高生产效率 并降低成本。 本发明还公开了一种用于制造薄膜压电元件的方法,头部组件和具有该方法的盘驱动单元。
    • 2. 发明申请
    • Suspension, head gimbal assembly and manufacturing method thereof, and disk drive unit with the same
    • 悬架,头万向架组装及其制造方法以及具有该悬架的磁头驱动单元
    • US20080266713A1
    • 2008-10-30
    • US11790564
    • 2007-04-26
    • MingGao YaoYiRu XieYu SunLin Guo
    • MingGao YaoYiRu XieYu SunLin Guo
    • G11B5/60
    • G11B5/4853
    • A suspension for a HGA includes a suspension flexure and an out trigger. The suspension flexure has a tongue region having a first flexure part in a tip portion thereof for mounting a trailing edge of a slider and a PZT mounting region for mounting PZT elements. One end of the out trigger is connected to the suspension flexure, and the other end of the out trigger has a trigger support portion which extends above the tongue region so as to support the leading edge of the slider. The structure of the out trigger is capable of stiffening the tongue region of the suspension flexure and, in turns, avoiding the deformation problem and the dimple separation problem during the manufacturing process or in vibration or shock events. The invention also discloses a HGA with the suspension, manufacturing methods of the HGA and a disk drive unit having such HGA.
    • 用于HGA的悬架包括悬架弯曲和外触发。 悬架挠曲件具有舌部区域,其顶端部具有用于安装滑动件的后缘的第一挠曲部分和用于安装PZT元件的PZT安装区域。 输出触发器的一端连接到悬架弯曲部,而触发器的另一端具有在舌部上方延伸的触发器支撑部分,以便支撑滑块的前缘。 出口触发器的结构能够加强悬架挠曲的舌部区域,并且反过来避免在制造过程中或振动或冲击事件期间的变形问题和凹坑分离问题。 本发明还公开了一种HGA,具有HGA的悬挂,制造方法和具有这种HGA的盘驱动单元。
    • 3. 发明授权
    • Disk drive head gimbal assembly including a PZT micro-actuator with a pair of separate PZT elements
    • 磁盘驱动器头万向架组件包括具有一对单独的PZT元件的PZT微型致动器
    • US08134809B2
    • 2012-03-13
    • US12081699
    • 2008-04-18
    • MingGao YaoLin GuoYu Sun
    • MingGao YaoLin GuoYu Sun
    • G11B5/56G11B21/24
    • G11B5/4826G11B5/483G11B5/4873G11B5/5552
    • A PZT micro-actuator for a head gimbal assembly includes a pair of separate PZT elements and each PZT element has a body and a plurality of electrical pads. The body has at least two electrode-piezoelectric combination layers laminated together. The at least two electrode-piezoelectric combination layers are physically connected with but electrically isolated from each other. Each electrode-piezoelectric combination layer has at least two of the electrical pads thereon. The electrical pads extend out from the body of the corresponding PZT element. All the electrical pads of each PZT element are offset a predetermined distance therebetween to be electrically isolated. The present invention also discloses a head gimbal assembly (HGA) with the PZT micro-actuator, an assembling method for the head gimbal assembly and a disk drive unit having such HGA.
    • 用于头万向节组件的PZT微致动器包括一对单独的PZT元件,并且每个PZT元件具有主体和多个电垫。 主体具有层叠在一起的至少两个电极 - 压电组合层。 所述至少两个电极 - 压电组合层在物理上彼此连接但是电隔离。 每个电极 - 压电组合层在其上具有至少两个电焊垫。 电焊盘从相应的PZT元件的主体延伸出来。 每个PZT元件的所有电焊垫偏移预定距离以进行电隔离。 本发明还公开了一种具有PZT微型致动器的头部万向节组件(HGA),用于头部万向节组件的组装方法和具有这种HGA的盘驱动单元。
    • 5. 发明申请
    • Thin film piezoelectric element and its manufacturing method, head gimbal assembly and disk drive unit with the same
    • 薄膜压电元件及其制造方法,头万向架组件和磁盘驱动单元相同
    • US20090316306A1
    • 2009-12-24
    • US12289172
    • 2008-10-22
    • MingGao YaoLin Guo
    • MingGao YaoLin Guo
    • G11B5/48H01L41/22H01L41/083
    • G11B5/4826G11B5/4873G11B5/5552G11B5/596H01L41/314Y10T29/42
    • A thin film piezoelectric element includes a piezoelectric thin film layer, a seed layer and an elastic substrate layer. The piezoelectric thin film layer is a laminated structure comprising a first electrode layer, a second electrode layer and a piezoelectric layer sandwiched between the first electrode layer and the second electrode layer. The seed layer is formed on the second electrode layer, and the elastic substrate layer is formed on the seed layer. The thin film piezoelectric element is a single layer structure and has an elastic substrate layer for supporting the single layer structure, thereby it has enough stiffness and flexibility to afford facilities for manufacture and assembly and to avoid film peeling and deformation, ultimately increasing the production efficiency and lowering the cost. The invention also discloses a method for manufacturing the thin film piezoelectric element, a head gimal assembly and a disk drive unit with the same.
    • 薄膜压电元件包括​​压电薄膜层,种子层和弹性基底层。 压电薄膜层是包括第一电极层,第二电极层和夹在第一电极层和第二电极层之间的压电层的叠层结构。 种子层形成在第二电极层上,弹性基底层形成在种子层上。 薄膜压电元件是单层结构,并且具有用于支撑单层结构的弹性基底层,由此具有足够的刚度和柔性以提供用于制造和组装的设备,并且避免膜剥离和变形,最终提高生产效率 并降低成本。 本发明还公开了一种用于制造薄膜压电元件的方法,头部组件和具有该方法的盘驱动单元。
    • 6. 发明授权
    • Micro-actuator for use in small platform disk drive devices, and method of making the same
    • 用于小平台磁盘驱动器件的微型致动器及其制造方法
    • US07821743B2
    • 2010-10-26
    • US11648578
    • 2007-01-03
    • MingGao YaoYiRu XieLin GuoYu Sun
    • MingGao YaoYiRu XieLin GuoYu Sun
    • G11B5/55
    • G11B5/5552G11B5/4826G11B5/4853
    • A micro-actuator for use with an HGA and/or disk drive device (e.g., a small platform disk drive device) with the micro-actuator having a reduced mass suitable for improving shock performance, and/or methods of making the same are provided. In certain example embodiments, the micro-actuator may comprise a substantially U-shaped frame including a cavity capable of receiving a slider, with the frame including two side arms and a bottom support arm at least partially defining the cavity. The bottom support arm may have a reduced mass capable of providing improved shock performance and capable of conveying a high resonance frequency response at a low gain. The bottom support arm may be, for example, substantially rectangle shaped, substantially I-shaped, toothed, etc. Also, the bottom support arm may be less thick than the side arms.
    • 提供了一种用于具有适于改善冲击性能的减小质量的微致动器的HGA和/或盘驱动装置(例如,小平台盘驱动装置)的微型致动器和/或其制造方法 。 在某些示例性实施例中,微致动器可以包括基本上U形的框架,其包括能够容纳滑块的空腔,框架包括两个侧臂和至少部分地限定空腔的底部支撑臂。 底部支撑臂可以具有减小的质量,能够提供改善的冲击性能并且能够以低增益输送高谐振频率响应。 底部支撑臂可以是例如基本上矩形的,基本上为I形,齿形等。而且,底部支撑臂可以比侧臂更薄。
    • 7. 发明申请
    • Micro-actuator having at least one segmented flexible side arm, and method of making the same
    • 具有至少一个分段柔性侧臂的微致动器及其制造方法
    • US20080247088A1
    • 2008-10-09
    • US11730997
    • 2007-04-05
    • MingGao YaoLin GuoYu Sun
    • MingGao YaoLin GuoYu Sun
    • G11B5/48
    • G11B5/5552
    • Certain example embodiments described herein relate to a micro-actuator for use with an HGA and/or disk drive device. A substantially U-shaped frame may include a cavity capable of receiving a slider. The frame may include two segmented, flexible side arms and a bottom support arm at least partially defining the cavity. Each segmented side arm may have a PZT element mounted on an outer surface thereof facing away from the cavity, and each may include a lower portion proximate to the bottom support arm and an upper portion disposed at an end opposing the bottom support arm. The lower portion and the upper portion may be at least partially separated by a gap. Accordingly, micro-actuators having better resonance and servo performance, reduced difficulties associated with the slider/micro-actuator mounting process, and/or better shock performance may be provided.
    • 本文所述的某些示例性实施例涉及用于与HGA和/或盘驱动装置一起使用的微致动器。 基本上U形的框架可以包括能够容纳滑块的空腔。 框架可以包括两个分段的柔性侧臂和至少部分地限定空腔的底部支撑臂。 每个分段侧臂可以具有安装在其远离空腔的外表面上的PZT元件,并且每个可包括靠近底部支撑臂的下部和设置在与底部支撑臂相对的端部处的上部。 下部和上部可以至少部分地被间隙分开。 因此,可以提供具有更好的谐振和伺服性能的微致动器,减少与滑块/微执行器安装过程相关的困难和/或更好的冲击性能。
    • 8. 发明申请
    • Micro-actuator for use in small platform disk drive devices, and method of making the same
    • 用于小平台磁盘驱动器件的微型致动器及其制造方法
    • US20080158734A1
    • 2008-07-03
    • US11648578
    • 2007-01-03
    • MingGao YaoYiRu XieLin GuoYu Sun
    • MingGao YaoYiRu XieLin GuoYu Sun
    • G11B5/56
    • G11B5/5552G11B5/4826G11B5/4853
    • A micro-actuator for use with an HGA and/or disk drive device (e.g., a small platform disk drive device) with the micro-actuator having a reduced mass suitable for improving shock performance, and/or methods of making the same are provided. In certain example embodiments, the micro-actuator may comprise a substantially U-shaped frame including a cavity capable of receiving a slider, with the frame including two side arms and a bottom support arm at least partially defining the cavity. The bottom support arm may have a reduced mass capable of providing improved shock performance and capable of conveying a high resonance frequency response at a low gain. The bottom support arm may be, for example, substantially rectangle shaped, substantially I-shaped, toothed, etc. Also, the bottom support arm may be less thick than the side arms.
    • 提供了一种用于具有适于改善冲击性能的减小质量的微致动器的HGA和/或盘驱动装置(例如,小平台盘驱动装置)的微型致动器和/或其制造方法 。 在某些示例性实施例中,微致动器可以包括基本上U形的框架,其包括能够容纳滑块的空腔,框架包括两个侧臂和至少部分地限定空腔的底部支撑臂。 底部支撑臂可以具有减小的质量,能够提供改善的冲击性能并且能够以低增益输送高谐振频率响应。 底部支撑臂可以是例如基本上矩形的,基本上为I形,齿形等。而且,底部支撑臂可以比侧臂更薄。
    • 9. 发明授权
    • Suspension, head gimbal assembly and manufacturing method thereof, and disk drive unit with the same
    • 悬架,头万向架组装及其制造方法以及具有该悬架的磁头驱动单元
    • US07843666B2
    • 2010-11-30
    • US11790564
    • 2007-04-26
    • MingGao YaoYiRu XieYu SunLin Guo
    • MingGao YaoYiRu XieYu SunLin Guo
    • G11B5/48
    • G11B5/4853
    • A suspension for a HGA includes a suspension flexure and an out rigger. The suspension flexure has a tongue region having a first flexure part in a tip portion thereof for mounting a trailing edge of a slider and a PZT mounting region for mounting PZT elements. One end of the out rigger is connected to the suspension flexure, and the other end of the out rigger has a rigger support portion which extends above the tongue region so as to support the leading edge of the slider. The structure of the out rigger is capable of stiffening the tongue region of the suspension flexure and, in turns, avoiding the deformation problem and the dimple separation problem during the manufacturing process or in vibration or shock events. The invention also discloses a HGA with the suspension, manufacturing methods of the HGA and a disk drive unit having such HGA.
    • 用于HGA的悬架包括悬架挠曲件和出料器。 悬架挠曲件具有舌部区域,其顶端部具有用于安装滑动件的后缘的第一挠曲部分和用于安装PZT元件的PZT安装区域。 出料装置的一端连接到悬架挠曲件上,出料装置的另一端具有在舌部上方延伸以支撑滑块的前缘的装备支撑部分。 该装置的结构能够加强悬架挠曲的舌部区域,并且反过来避免在制造过程中或振动或冲击事件期间的变形问题和凹坑分离问题。 本发明还公开了一种HGA,具有HGA的悬挂,制造方法和具有这种HGA的盘驱动单元。