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    • 4. 发明申请
    • Etchant and method of etching
    • 蚀刻剂和蚀刻方法
    • US20060189123A1
    • 2006-08-24
    • US11289382
    • 2005-11-30
    • Noriyuki SaitouTakuji YoshidaKazunori InoueMakoto IshikawaYoshio Kamiharaguchi
    • Noriyuki SaitouTakuji YoshidaKazunori InoueMakoto IshikawaYoshio Kamiharaguchi
    • H01L21/4763H01L21/302
    • C23F1/44C23F1/20C23F1/26H01L21/32134
    • A fine wiring line profile with satisfactory precision is formed from a multilayer film containing a first layer made of an aluminum alloy and a second layer formed thereon made of a molybdenum-niobium alloy, by simultaneously etching the two layers constituting the multilayer film through only one etching operation while preventing the upper layer from forming overhangs. An etchant for etching a multilayer film containing an aluminum alloy layer formed over a substrate and a molybdenum-niobium alloy layer formed thereon having a niobium content of 2-19% by weight contains an aqueous solution of an acid mixture containing phosphoric acid, nitric acid, and an organic acid; and a method of etching is carried out with this etchant. The etchant preferably has a phosphoric acid concentration Np of 50-75% by weight, a nitric acid concentration Nn of 2-15% by weight, and an acid ingredient concentration defined by Np+(98/63)Nn of 55-85% by weight.
    • 由含有由铝合金制成的第一层和由钼铌合金构成的第二层的多层膜通过仅通过一个同时蚀刻构成多层膜的两层形成精细的布线线廓 同时防止上层形成悬垂。 用于蚀刻含有在基材上形成的铝合金层的多层膜的蚀刻剂和其上形成的铌含量为2〜19重量%的钼 - 铌合金层含有含有磷酸,硝酸的酸混合物的水溶液 ,和有机酸; 并且用该蚀刻剂进行蚀刻的方法。 蚀刻剂的磷酸浓度优选为50〜75重量%,硝酸浓度N 2〜2重量%,酸成分 浓度由55-85%(重量)的N + P +(98/63)N 所定义。
    • 10. 发明申请
    • ACOUSTIC WAVE FILTER
    • 声波滤波器
    • US20120105298A1
    • 2012-05-03
    • US13344274
    • 2012-01-05
    • Kazunori InoueTakashi MatsudaMichio Miura
    • Kazunori InoueTakashi MatsudaMichio Miura
    • H03H9/64H01Q1/50H03H9/72
    • H03H9/02992H03H9/02952H03H9/6483H03H9/725
    • A configuration that reduces a parasitic capacitance between wires is achieved at a low cost. Disclosed is an acoustic wave filter provided with a piezoelectric substrate 1, resonators 2a and 2b that include a comb-shaped electrode formed on the piezoelectric substrate 1, a wiring portion 3 that is connected to the comb-shaped electrode, and a dielectric layer 4 formed to cover the comb-shaped electrode. The wiring portion 3 is provided with a lower layer wiring portion 3d that is disposed in the same layer as the comb-shaped electrode and an upper layer wiring portion 3e that is disposed on the lower layer wiring portion 3d. The upper layer wiring portion 3e includes a region that has a wider electrode width than the electrode width of the lower layer wiring portion 3d.
    • 以低成本实现降低电线之间的寄生电容的结构。 公开了一种设置有压电基板1的谐波滤波器,包括形成在压电基板1上的梳状电极的谐振器2a和2b,连接到梳状电极的布线部分3和介电层4 形成为覆盖梳状电极。 布线部分3设置有与梳状电极相同的层中的下层布线部分3d和布置在下层布线部分3d上的上层布线部分3e。 上层布线部分3e包括具有比下层布线部分3d的电极宽度更宽的电极宽度的区域。