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    • 3. 发明申请
    • ACOUSTICS TRANSDUCER
    • 声学传感器
    • US20110123053A1
    • 2011-05-26
    • US12767658
    • 2010-04-26
    • Di-Bao WangChin-Fu KuoChia-Yu WuJien-Ming Chen
    • Di-Bao WangChin-Fu KuoChia-Yu WuJien-Ming Chen
    • H04R1/00
    • H04R19/005
    • According to an embodiment of the disclosure, an acoustics transducer is provided, which includes a support substrate having an upper surface and a lower surface, the upper surface including a first portion and a second portion surrounding the first portion, a recess extending from the upper surface towards the lower surface, the recess is between the first portion and the second portion of the upper surface, a vibratable membrane disposed directly on the recess, the vibratable membrane including a fixed portion fixed on the support substrate and a suspended portion, and a back plate disposed on the support substrate and opposite to the vibratable membrane. The suspended portion has an edge extending substantially along with an edge of an opening of the recess. The suspended portion is separated from the first portion and the second portion of the upper surface by an inner interval and an outer interval, respectively.
    • 根据本公开的实施例,提供了一种声学换能器,其包括具有上表面和下表面的支撑基底,所述上表面包括第一部分和围绕所述第一部分的第二部分,从所述上表面延伸的凹部 表面朝向下表面,凹部位于上表面的第一部分和第二部分之间,直接设置在凹部上的可振动膜,可振动膜包括固定在支撑基板上的固定部分和悬挂部分,以及 背板设置在支撑基板上并与可振动膜相对。 悬挂部分具有基本上与凹部的开口的边缘一起延伸的边缘。 悬挂部分分别与上表面的第一部分和第二部分分开内部间隔和外部间隔。
    • 4. 发明授权
    • Acoustics transducer
    • 声学传感器
    • US08340328B2
    • 2012-12-25
    • US12767658
    • 2010-04-26
    • Di-Bao WangChin-Fu KuoChia-Yu WuJien-Ming Chen
    • Di-Bao WangChin-Fu KuoChia-Yu WuJien-Ming Chen
    • H04R25/00
    • H04R19/005
    • According to an embodiment of the disclosure, an acoustics transducer is provided, which includes a support substrate having an upper surface and a lower surface, the upper surface including a first portion and a second portion surrounding the first portion, a recess extending from the upper surface towards the lower surface, the recess is between the first portion and the second portion of the upper surface, a vibratable membrane disposed directly on the recess, the vibratable membrane including a fixed portion fixed on the support substrate and a suspended portion, and a back plate disposed on the support substrate and opposite to the vibratable membrane. The suspended portion has an edge extending substantially along with an edge of an opening of the recess. The suspended portion is separated from the first portion and the second portion of the upper surface by an inner interval and an outer interval, respectively.
    • 根据本公开的实施例,提供了一种声学换能器,其包括具有上表面和下表面的支撑基底,所述上表面包括第一部分和围绕所述第一部分的第二部分,从所述上表面延伸的凹部 表面朝向下表面,凹部位于上表面的第一部分和第二部分之间,直接设置在凹部上的可振动膜,可振动膜包括固定在支撑基板上的固定部分和悬挂部分,以及 背板设置在支撑基板上并与可振动膜相对。 悬挂部分具有基本上与凹部的开口的边缘一起延伸的边缘。 悬挂部分分别与上表面的第一部分和第二部分分开内部间隔和外部间隔。