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    • 4. 发明申请
    • MICROELECTROMECHANICAL FILTER
    • 微电子放大器
    • US20120062340A1
    • 2012-03-15
    • US12940054
    • 2010-11-05
    • Tsun-Che HuangFeng-Chia HsuPin ChangChin-Hung Wang
    • Tsun-Che HuangFeng-Chia HsuPin ChangChin-Hung Wang
    • H03H9/00
    • H03H9/02228H03H9/462H03H9/505H03H9/54
    • A microelectromechanical filter is provided. The microelectromechanical filter includes an input electrode, an output electrode, one or several piezoelectric resonators, one or several high quality factor resonators, and one or several coupling beams. The input electrode and the output electrode are disposed on the piezoelectric resonators. The high quality factor resonator is silicon or of piezoelectric materials, and there is no metal electrode on top of the resonator. The coupling beam is connected between the piezoelectric resonator and the high quality factor resonator. The coupling beam transmits an acoustic wave among the resonators, and controls a bandwidth of filter. The microelectromechanical filter with low impedance and high quality factor fits the demand for next-generation communication systems.
    • 提供了微机电滤波器。 微机电滤波器包括输入电极,输出电极,一个或多个压电谐振器,一个或多个高品质因子谐振器以及一个或多个耦合光束。 输入电极和输出电极设置在压电谐振器上。 高品质因子谐振器是硅或压电材料,谐振器顶部没有金属电极。 耦合光束连接在压电谐振器和高品质因子谐振器之间。 耦合光束在谐振器之间传播声波,并控制滤波器的带宽。 具有低阻抗和高品质因数的微机电滤波器适合下一代通信系统的需求。
    • 7. 发明授权
    • Microelectromechanical filter
    • 微机电滤波器
    • US08471651B2
    • 2013-06-25
    • US12940054
    • 2010-11-05
    • Tsun-Che HuangFeng-Chia HsuPin ChangChin-Hung Wang
    • Tsun-Che HuangFeng-Chia HsuPin ChangChin-Hung Wang
    • H03H9/46H03H9/00
    • H03H9/02228H03H9/462H03H9/505H03H9/54
    • A microelectromechanical filter is provided. The microelectromechanical filter includes an input electrode, an output electrode, one or several piezoelectric resonators, one or several high quality factor resonators, and one or several coupling beams. The input electrode and the output electrode are disposed on the piezoelectric resonators. The high quality factor resonator is silicon or of piezoelectric materials, and there is no metal electrode on top of the resonator. The coupling beam is connected between the piezoelectric resonator and the high quality factor resonator. The coupling beam transmits an acoustic wave among the resonators, and controls a bandwidth of filter. The microelectromechanical filter with low impedance and high quality factor fits the demand for next-generation communication systems.
    • 提供了微机电滤波器。 微机电滤波器包括输入电极,输出电极,一个或多个压电谐振器,一个或多个高品质因子谐振器以及一个或多个耦合光束。 输入电极和输出电极设置在压电谐振器上。 高品质因子谐振器是硅或压电材料,谐振器顶部没有金属电极。 耦合光束连接在压电谐振器和高品质因子谐振器之间。 耦合光束在谐振器之间传播声波,并控制滤波器的带宽。 具有低阻抗和高品质因数的微机电滤波器适合下一代通信系统的需求。