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1. 发明申请

US20220084791A1 RF IMPEDANCE MATCHING NETWORK 有权
公开(公告)号：US20220084791A1
公开(公告)日：2022-03-17
申请号：US17534924
申请日：2021-11-24
申请人： Reno Technologies, Inc.
发明人： Imran Ahmed Bhutta
IPC分类号： H01J37/32 , H03H11/28 , H01G7/00 , H01L21/02 , H01L21/311 , H03H7/38 , H05K7/20
摘要： In one embodiment, an RF impedance matching circuit is disclosed. The matching circuit is coupled between a plasma chamber and an RF source. The matching circuit includes a first electronically variable capacitor (EVC) having a first variable capacitance, a terminal of the first EVC being operably coupled to the RF input, and a second EVC having a second variable capacitance, a terminal of the second EVC being operably coupled to the RF output. A control circuit determines, based on a first parameter, a first capacitance value for the first EVC and a second capacitance value for the second EVC. The control circuit then generates a control signal to alter the first and second variable capacitances accordingly. The alteration of the capacitances, while the frequency of the RF source is not altered, causes RF power reflected back to the RF source to decrease.

2. 发明授权

US11101110B2 Impedance matching network and method 有权
公开(公告)号：US11101110B2
公开(公告)日：2021-08-24
申请号：US16926002
申请日：2020-07-10
申请人： Reno Technologies, Inc.
发明人： Imran Ahmed Bhutta , Ronald Anthony Decker , Michael Gilliam Ulrich , Bala Kandampalayam
IPC分类号： H03H7/40 , H01J37/32 , H03H7/38 , H01L21/02 , H01L21/311 , H01L21/3213 , H01L21/67 , H01L21/285
摘要： In one embodiment, the present disclosure may be directed to an impedance matching network that includes an electronically variable capacitor (EVC). The EVC includes discrete capacitors and corresponding switches, each switch configured to switch in and out one of the discrete capacitors to alter a capacitance of the EVC. The switches are operably coupled to a power supply providing a blocking voltage to the switches. A control circuit determines a blocking voltage value of the power supply. Upon determining the blocking voltage value is at or below a predetermined first level, the control circuit causes a limited altering of the capacitance of the EVC, the limited altering limiting the number or type of discrete capacitors to switch in or out based on the extent to which the blocking voltage value is at or below the first level.

3. 发明申请

US20200335307A1 RF IMPEDANCE MATCHING CIRCUIT AND SYSTEMS AND METHODS INCORPORATING SAME 审中-公开
公开(公告)号：US20200335307A1
公开(公告)日：2020-10-22
申请号：US16922228
申请日：2020-07-07
申请人： Reno Technologies, Inc.
发明人： Imran Ahmed Bhutta , Michael Gilliam Ulrich
IPC分类号： H01J37/32 , H03H11/28 , H01G7/00 , H01L21/02 , H01L21/311 , H03H7/38 , H05K7/20
摘要： In one embodiment, an RF impedance matching network utilizing at least one electronically variable capacitors (EVC) is disclosed. Each EVC includes discrete capacitors operably coupled in parallel, the discrete capacitors including fine capacitors and coarse capacitors. A control circuit determines a parameter related to the plasma chamber and, based on the parameter, determines which of the coarse capacitors and which of the fine capacitors to have switched in to cause an impedance match. The increase of the variable total capacitance of each EVC is achieved by switching in more of the coarse capacitors or more of the fine capacitors than are already switched in without switching out a coarse capacitor that is already switched in.

4. 发明申请

US20190013183A1 RESTRICTED CAPACITOR SWITCHING 审中-公开
公开(公告)号：US20190013183A1
公开(公告)日：2019-01-10
申请号：US16029742
申请日：2018-07-09
申请人： Reno Technologies, Inc.
发明人： Imran Ahmed Bhutta , Tomislav Lozic
IPC分类号： H01J37/32 , H03H11/28
摘要： In one embodiment, the present disclosure is directed to a method for matching an impedance. The method can include determining or receiving a reflection parameter value at an RF input or output; stopping the altering of a first capacitance and a second capacitance when the reflection parameter value is at or below a first reflection value; causing a limited altering of the first capacitance and the second capacitance to pursue an impedance match when the reflection parameter value is at or above a second reflection value and at or below the third reflection value; and causing an unlimited altering of the first capacitance and the second capacitance to pursue an impedance match when the reflection parameter value is at or above a third reflection value.

5. 发明申请

US20170301516A1 SYSTEM FOR PROVIDING VARIABLE CAPACITANCE 审中-公开
公开(公告)号：US20170301516A1
公开(公告)日：2017-10-19
申请号：US15637271
申请日：2017-06-29
申请人： Reno Technologies, Inc.
发明人： Imran Ahmed Bhutta , Michael Gilliam Ulrich
IPC分类号： H01J37/32 , H01G7/00 , H01L21/02 , H01L21/311 , H03H11/28
CPC分类号： H01J37/32183 , H01G7/00 , H01J37/32935 , H01J2237/327 , H01J2237/332 , H01J2237/334 , H01L21/02274 , H01L21/31116 , H01L23/473 , H03H7/38 , H03H11/28 , H05K7/20609
摘要： In one embodiment, a radio frequency (RF) impedance matching network includes electronically variable capacitors (EVCs), each EVC including discrete capacitors operably coupled in parallel. The discrete capacitors include fine capacitors each having a capacitance value substantially similar to a fine capacitance value, and coarse capacitors each having a capacitance value substantially similar to a coarse capacitance value. The increase of the variable total capacitance of each EVC is achieved by switching in more of the coarse capacitors or more of the fine capacitors than are already switched in without switching out a coarse capacitor that is already switched in.

6. 发明授权

US09591739B2 Multi-stage heterodyne control circuit 有权
标题翻译：多级外差控制电路
公开(公告)号：US09591739B2
公开(公告)日：2017-03-07
申请号：US14702863
申请日：2015-05-04
申请人： Reno Technologies, Inc.
发明人： Imran Ahmed Bhutta
IPC分类号： H01J7/24 , H05H1/46 , H04B10/00 , H01J37/32
CPC分类号： H05H1/46 , H01J37/32174 , H01J37/32183 , H04B10/142 , H05H2001/4645 , H05H2001/4682
摘要： A circuit for controlling an RF generator, the circuit including first and second heterodyne stages. The first heterodyne stage receives an input signal, which is based on a characteristic of an RF signal generated by the RF generator, and is configured to: mix the input signal with a first mix signal to generate a first heterodyne signal and to filter the first heterodyne signal through a low pass filter. The second heterodyne stage receives the filtered first heterodyne signal and is configured to: mix the filtered first heterodyne signal with a second mix signal to generate a second heterodyne signal and to filter the second heterodyne signal through a band pass filter. A detection stage converts the filtered second heterodyne signal to a DC signal, and a power control stage receives the DC signal and controls the RF signal in response to the DC signal.
摘要翻译：一种用于控制RF发生器的电路，该电路包括第一和第二外差级。第一外差级接收基于由RF发生器产生的RF信号的特性的输入信号，并且被配置为：将输入信号与第一混合信号进行混合，以产生第一外差信号并对第一外差信号进行滤波外差信号通过低通滤波器。第二外差级接收经滤波的第一外差信号，并且被配置为：将经滤波的第一外差信号与第二混合信号混合以产生第二外差信号，并通过带通滤波器对第二外差信号进行滤波。检测级将滤波后的第二外差信号转换为DC信号，功率控制级接收直流信号并根据直流信号控制RF信号。

7. 发明申请

US20150200079A1 RF IMPEDANCE MATCHING NETWORK 有权
标题翻译：射频阻抗匹配网络
公开(公告)号：US20150200079A1
公开(公告)日：2015-07-16
申请号：US14669568
申请日：2015-03-26
申请人： Reno Technologies, Inc.
发明人： Imran Ahmed Bhutta
IPC分类号： H01J37/32 , H01L21/67 , H01J37/244 , H01J37/248 , H01J37/24
CPC分类号： H01J37/32183 , H01J37/241 , H01J37/244 , H01J37/248 , H01L21/67253 , H03H7/40 , H03H11/30
摘要： An RF impedance matching network includes an RF input; an RF output configured to operably couple to a plasma chamber; a series electronically variable capacitor (“series EVC”), the series EVC electrically coupled in series between the RF input and the RF output; and a shunt electronically variable capacitor (“shunt EVC”), the shunt EVC electrically coupled in parallel between a ground and one of the RF input and the RF output; a control circuit to control the series variable capacitance and the shunt variable capacitance, wherein the control circuit is configured to determine the variable plasma impedance of the plasma chamber, determine a series capacitance value and a shunt capacitance value, and generate a control signal to alter at least one of the series variable capacitance and the shunt variable capacitance; wherein the alteration is caused by at least one of a plurality of switching circuits.
摘要翻译： RF阻抗匹配网络包括RF输入; 被配置为可操作地耦合到等离子体室的RF输出; 串联电可变电容器（“EVC”系列），串联EVC串联在RF输入和RF输出之间; 和分流电可变电容器（“并联EVC”），并联电气并联在地与RF输入和RF输出中的一个之间的并联EVC; 用于控制串联可变电容和分流可变电容的控制电路，其中控制电路被配置为确定等离子体室的可变等离子体阻抗，确定串联电容值和并联电容值，并产生控制信号以改变串联可变电容和分流可变电容中的至少一个; 其中所述改变由多个开关电路中的至少一个引起。

8. 发明授权

US11189466B2 High voltage switching circuit 有权
公开(公告)号：US11189466B2
公开(公告)日：2021-11-30
申请号：US17182902
申请日：2021-02-23
申请人： Reno Technologies, Inc.
发明人： Imran Ahmed Bhutta
IPC分类号： H01J37/32 , H03H11/28 , H01G7/00 , H01L21/02 , H01L21/311 , H03H7/38 , H05K7/20 , H01L23/473
摘要： In one embodiment, a switching circuit includes an electronic switch comprising one or more diodes for switching a reactance element within an electronically variable reactance element. A first power switch receives an input signal and a first voltage, and switchably connects the first voltage to a common output in response to the received input signal. A second power switch receives an input signal and a second voltage, and switchably connects the second voltage to the common output in response to the received input signal. The second voltage is opposite in polarity to the first voltage. The first power switch and the second power switch asynchronously connect the first voltage and the second voltage, respectively, to the common output, the one or more diodes of the electronic switch being switched according to the first voltage or the second voltage being connected to the common output.

9. 发明申请

US20210183623A1 HIGH VOLTAGE SWITCHING CIRCUIT 有权
公开(公告)号：US20210183623A1
公开(公告)日：2021-06-17
申请号：US17182902
申请日：2021-02-23
申请人： Reno Technologies, Inc.
发明人： Imran Ahmed Bhutta
IPC分类号： H01J37/32 , H03H11/28 , H01G7/00 , H01L21/02 , H01L21/311 , H03H7/38 , H05K7/20
摘要： In one embodiment, a switching circuit includes an electronic switch comprising one or more diodes for switching a reactance element within an electronically variable reactance element. A first power switch receives an input signal and a first voltage, and switchably connects the first voltage to a common output in response to the received input signal. A second power switch receives an input signal and a second voltage, and switchably connects the second voltage to the common output in response to the received input signal. The second voltage is opposite in polarity to the first voltage. The first power switch and the second power switch asynchronously connect the first voltage and the second voltage, respectively, to the common output, the one or more diodes of the electronic switch being switched according to the first voltage or the second voltage being connected to the common output.

10. 发明授权

US10692699B2 Impedance matching with restricted capacitor switching 有权
公开(公告)号：US10692699B2
公开(公告)日：2020-06-23
申请号：US16415764
申请日：2019-05-17
申请人： Reno Technologies, Inc.
发明人： Imran Ahmed Bhutta , Michael Gilliam Ulrich
IPC分类号： H01J37/32 , H03H7/38 , H05K7/20
摘要： In one embodiment, an RF impedance matching network for a plasma chamber is disclosed. It includes a variable capacitor comprising a plurality of capacitors comprising first coarse capacitors each having a substantially similar first coarse capacitance, second coarse capacitors each having a substantially similar second coarse capacitance, and fine capacitors having different capacitances that increase in value. At least one of the fine capacitors has a capacitance greater than the first coarse capacitance. A control circuit is configured cause a gradual increase in the total capacitance of the variable capacitor by switching in, in a predetermined order, each of the first coarse capacitors, followed by each of the second coarse capacitors, only switching in the fine capacitors whose capacitance is less than a capacitance of a next coarse capacitor of the coarse capacitors predetermined to be switched in next.

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