会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明申请
    • METHOD FOR PRODUCING AN INTEGRATED FIELD-EFFECT TRANSISTOR
    • 用于生成集成场效应晶体管的方法
    • US20100317162A1
    • 2010-12-16
    • US12848576
    • 2010-08-02
    • Ronald Kakoschke
    • Ronald Kakoschke
    • H01L21/336
    • H01L29/785H01L21/84H01L27/115H01L27/1203H01L29/7855H01L29/78612
    • A method for fabricating a field-effect transistor is provided. The method includes forming a substrate region, forming two terminal regions at the substrate region, one terminal region being a source region and the other terminal region being a drain region, forming two electrically insulating insulating layers, which are arranged at mutually opposite sides of the substrate region and are adjoined by control regions, forming an electrically conductive connecting region, which electrically conductively connects one of the terminal regions and the substrate region the conductive connecting region comprising a metal-semiconductor compound, leveling a surface by chemical mechanical polishing after forming the control regions, etching-back the control regions after polishing, and performing a self-aligning method for forming the metal-semiconductor compound in the etched-back regions, on the substrate region, and on a terminal region.
    • 提供了一种用于制造场效应晶体管的方法。 该方法包括形成衬底区域,在衬底区域形成两个端子区域,一个端子区域是源极区域,另一个端子区域是漏极区域,形成两个电绝缘绝缘层,它们布置在 并且与控制区域相邻,形成导电连接区域,该导电连接区域将导电连接区域和基板区域导电地连接到包含金属 - 半导体化合物的导电连接区域,在形成之后通过化学机械抛光来平整表面 控制区域,在抛光之后蚀刻回控制区域,并且在蚀刻后区域,基板区域和端子区域上进行用于形成金属 - 半导体化合物的自对准方法。
    • 9. 发明申请
    • VERTICAL FIELD-EFFECT TRANSISTOR
    • 垂直场效应晶体管
    • US20100142266A1
    • 2010-06-10
    • US12704287
    • 2010-02-11
    • Ronald KakoschkeHelmut Tews
    • Ronald KakoschkeHelmut Tews
    • G11C16/04H01L21/336G11C11/34
    • H01L21/823412H01L21/823418H01L21/823425H01L29/66666H01L29/7827
    • A method produces a vertical field-effect transistor having a semiconductor layer, in which a doped channel region is arranged along a depression. A “buried” terminal region leads as far as a surface of the semiconductor layer. The field-effect transistor also has a doped terminal region near an opening of the depression as well as the doped terminal region remote from the opening, a control region arranged in the depression, and an electrical insulating region between the control region and the channel region. The terminal region remote from the opening leads as far as a surface containing the opening or is electrically conductively connected to an electrically conductive connection leading to the surface. The control region is arranged in only one depression. The field-effect transistor is a drive transistor at a word line or at a bit line of a memory cell array.
    • 一种方法产生具有半导体层的垂直场效应晶体管,其中掺杂沟道区沿着凹陷布置。 “埋入”端子区域导通至半导体层的表面。 场效应晶体管还具有靠近凹陷的开口的掺杂端子区域以及远离开口的掺杂端子区域,布置在凹陷中的控制区域以及控制区域和沟道区域之间的电绝缘区域 。 远离开口的端子区域引出至包含开口的表面,或者导电地连接到通向该表面的导电连接。 控制区域仅布置在一个凹部中。 场效应晶体管是位于存储单元阵列的字线或位线处的驱动晶体管。