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    • 6. 发明授权
    • Flash memory and fabrication method and operation method for the same
    • 闪存及其制作方法及操作方法相同
    • US08526242B2
    • 2013-09-03
    • US13321120
    • 2011-03-07
    • Ru HuangYimao CaiShiqiang QinQianqian HuangPoren TangYu TangGengyu Yang
    • Ru HuangYimao CaiShiqiang QinQianqian HuangPoren TangYu TangGengyu Yang
    • G11C11/34
    • H01L27/11556H01L29/7391H01L29/7889H01L29/8616
    • The present invention discloses a flash memory and the fabrication method and the operation method for the same. The flash memory comprises two memory cells of vertical channels, wherein a lightly-doped N type (or P type) silicon is used as a substrate; a P+ region (or an N+ region) is provided on each of the both ends of the silicon surface, and two channel regions perpendicular to the surface are provided therebetween; an N+ region (or a P+ region) shared by two channels is provided over the channels; a tunneling oxide layer, a polysilicon floating gate, a block oxide layer and a polysilicon control gate are provided sequentially on the outer sides of each channel from inside to outside; and the polysilicon floating gate and the polysilicon control gate are isolated from the P+ region by a sidewall oxide layer. The whole device is a two-bit TFET type flash memory with vertical channels which has better compatibility with prior-art standard CMOS process. As compared with a conventional MOSFET-based flash memory, the flash memory according to the present invention possesses various advantages such as high programming efficiency, low power consumption, effective inhibition of punch-through effect, and high density, etc.
    • 本发明公开了一种闪存及其制作方法及其操作方法。 闪速存储器包括两个垂直通道的存储单元,其中使用轻掺杂N型(或P型)硅作为衬底; 在硅表面的两端分别设置有P +区域(或N +区域),并且在两面之间设置与该表面垂直的2个沟道区域。 在通道上设置由两个通道共享的N +区域(或P +区域); 隧道氧化物层,多晶硅浮置栅极,块状氧化物层和多晶硅控制栅极,从内向外依次设置在每个沟道的外侧上; 并且多晶硅浮置栅极和多晶硅控制栅极通过侧壁氧化物层与P +区域隔离。 整个器件是具有垂直通道的两位TFET型闪存,与现有的标准CMOS工艺具有更好的兼容性。 与传统的基于MOSFET的闪存相比,根据本发明的闪速存储器具有诸如编程效率高,功耗低,穿透效果有效抑制和高密度等各种优点。