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    • 3. 发明授权
    • Manufacturing method of semiconductor device and substrate processing apparatus
    • 半导体器件和衬底处理设备的制造方法
    • US08716147B2
    • 2014-05-06
    • US12273028
    • 2008-11-18
    • Takaaki NodaMasami MiyamotoRyuji Yamamoto
    • Takaaki NodaMasami MiyamotoRyuji Yamamoto
    • H01L21/31
    • H01L21/02661C23C16/0227C23C16/24C23C16/45578C23C16/54H01L21/02532H01L21/0262
    • Provided are a manufacturing method of a semiconductor device and a substrate processing apparatus. The manufacturing method of the semiconductor device includes: loading a plurality of substrates into a reaction vessel, which is configured by a process tube and a manifold that supports the process tube, and arranging the loaded substrates within the reaction vessel; pre-processing the plurality of substrates by supplying a pre-process gas from the manifold side toward the process tube side within the reaction vessel; main-processing the plurality of pre-processed substrates by supplying a main-process gas from the manifold side toward the process tube side within the reaction vessel; and unloading the plurality of main-processed substrates from the reaction vessel, wherein in pre-processing the plurality of substrates, the pre-process gas is supplied from at least one position in an area corresponding to the manifold, and at least one position in an upper area of an area corresponding to a substrate arrangement area.
    • 提供一种半导体器件和衬底处理设备的制造方法。 半导体器件的制造方法包括:将多个基板装载到反应容器中,该反应容器由处理管和支撑处理管的歧管构成,并将负载的基板布置在反应容器内; 通过在反应容器内从歧管侧向处理管侧供给预处理气体来预处理多个基板; 通过在反应容器内从歧管侧向处理管侧供给主工艺气体来主要处理多个预处理衬底; 以及从所述反应容器中卸载所述多个主处理基板,其中在预处理所述多个基板时,所述预处理气体从对应于所述歧管的区域中的至少一个位置供应,并且至少一个位置 与衬底布置区域相对应的区域的上部区域。
    • 8. 发明授权
    • Method of cooling steel plate
    • 钢板冷却方法
    • US07718018B2
    • 2010-05-18
    • US12087947
    • 2007-07-25
    • Yoshihiro SerizawaRyuji YamamotoShigeru Ogawa
    • Yoshihiro SerizawaRyuji YamamotoShigeru Ogawa
    • C21D9/573C21D1/667B21B45/02
    • B21B45/0218B21B37/74
    • A method of cooling both surfaces of steel plate, which stably secures precision of cooling control from a start of cooling to an end so as to uniformly cool the top and bottom surfaces of the steel plate and thereby stably secures the steel plate quality and cools the steel plate down to a target temperature with a good precision. The method comprises dividing a steel plate cooling region into at least a spray impact part region and a spray non-impact part region, predicting a heat transfer coefficient for each divided region in advance, computing a predicted temperature history of the steel plate based on this predicted value, and setting and controlling amounts of sprayed coolant on the spray impact part regions by top and bottom surface nozzles.
    • 一种冷却钢板的两面的方法,其从冷却开始到一端稳定地确保冷却控制的精度,以均匀地冷却钢板的顶面和底面,从而稳定地固定钢板的质量并冷却 钢板精度达到目标温度。 该方法包括将钢板冷却区域分成至少喷射冲击部分区域和喷射非冲击部分区域,预先预测每个分割区域的传热系数,基于该计算机预测钢板的温度历史 预测值,以及通过顶表面喷嘴和底表面喷嘴设置和控制喷射冲击部分区域上的喷射冷却剂的量。
    • 10. 发明授权
    • Method for producing vapor grown carbon fiber
    • 生产气相生长碳纤维的方法
    • US07524479B2
    • 2009-04-28
    • US10475777
    • 2002-06-26
    • Kazuo MuramakiYoshihisa SakamotoRyuji YamamotoToshio Morita
    • Kazuo MuramakiYoshihisa SakamotoRyuji YamamotoToshio Morita
    • D01F9/12
    • B82Y30/00D01F9/127D01F9/133
    • A method for producing vapor grown carbon, including mixing a raw material gas containing an organic compound and an organo-transition metallic compound preliminarily heated preferably to a temperature of 100 to 450° C. with a carrier gas heated preferably to a temperature of 700 to 1,600° C., and introducing the resultant gas mixture into a carbon fiber production zone, wherein preferably a mixture of an aromatic compound and acetylene, ethylene, or butadiene is used as an organic compound. The method can include dissolving the transition metallic compound in a solvent, atomizing the resultant solution into fine droplets, evaporating the solvent in the droplets to thereby obtain fine particles of the transition metal compound, and introducing the drifting particles with an organic compound gas into the carbon fiber production zone. Vapor grown carbon fiber is thereby produced.
    • 一种生产气相生长碳的方法,包括将预先加热至100至450℃的预先加热的有机化合物的原料气体和有机过渡金属化合物与优选加热至700℃的载气混合, 1600℃,将所得气体混合物引入碳纤维生产区,其中优选使用芳香族化合物和乙炔,乙烯或丁二烯的混合物作为有机化合物。 该方法可以包括将过渡金属化合物溶解在溶剂中,将所得溶液雾化成微小液滴,蒸发液滴中的溶剂,从而获得过渡金属化合物的细颗粒,并将漂移颗粒与有机化合物气体引入 碳纤维生产区。 由此生成气相生长的碳纤维。