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    • 3. 发明申请
    • ROLL TO ROLL LIGHT EXPOSURE SYSTEM
    • 滚动曝光系统
    • US20160209756A1
    • 2016-07-21
    • US14933896
    • 2015-11-05
    • SAMSUNG DISPLAY CO., LTD.
    • Jae Hyuk CHANGSang Hyun YUNKi Beom LEEHi Kuk LEE
    • G03F7/20
    • G03F7/70141G03F7/201G03F7/213G03F7/22G03F7/70791G03F9/00G03F9/7088
    • Embodiments of the present invention provide a roll-to-roll exposure system having a reference mark array and alignment scope units for precisely measuring the position and orientation of an object on a flexible multilayered circuit film. A roll-to-roll exposure system according to an exemplary embodiment of the present invention includes: a plurality of rolls configured to move a flexible multilayered circuit film having an object positioned thereon; alignment scope units positioned so as to be spaced apart from each other and proximate to the rolls; and at least one exposure unit positioned so as to be spaced proximate to the rolls and spaced apart from sides of the alignment scope units, in which one of the rolls has a reference mark array on its surface.
    • 本发明的实施例提供了具有参考标记阵列和对准范围单元的卷对卷曝光系统,用于精确测量柔性多层电路膜上的物体的位置和取向。 根据本发明的示例性实施例的卷对卷曝光系统包括:多个辊,其被配置为移动具有位于其上的物体的柔性多层电路膜; 定位范围单元定位成彼此间隔开并且靠近辊; 以及至少一个曝光单元,其定位成邻近所述辊并与所述对准示范单元的侧面间隔开,其中所述辊中的一个在其表面上具有参考标记阵列。