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    • 7. 发明申请
    • MEMS SENSOR
    • MEMS传感器
    • US20150212109A1
    • 2015-07-30
    • US14341457
    • 2014-07-25
    • SAMSUNG ELECTRO-MECHANICS CO., LTD.
    • In Young KANGJeong Suong YANGSeung Mo LIMYun Sung KANG
    • G01P15/09H01L41/09B81B3/00G01L1/16
    • G01P15/0922B06B1/0603B81B3/0021B81B2201/0271G01L1/16G01P15/09G01P15/097H01L41/0825
    • Embodiments of the invention provide a MEMS sensor, including a flexible substrate having a vibrator and a sensor, a mass body coupled with the flexible substrate, and a support part supporting the flexible substrate. The vibrator includes a multilayer piezoelectric part and an electrode part connected to the multilayer piezoelectric part, and the sensor includes a piezoelectric material and an electrode part. The multilayer piezoelectric part is polled in the same direction and one of the piezoelectric materials contacting each other is expanded or contracted in an opposite direction to the other piezoelectric material. An uppermost layer of the vibrator and an uppermost layer of the sensor with respect to a stacking direction in which the piezoelectric material and the electrode part of the vibrator and the sensor are each stacked, are disposed on the same surface.
    • 本发明的实施例提供一种MEMS传感器,包括具有振动器和传感器的柔性基板,与柔性基板连接的质量体以及支撑柔性基板的支撑部件。 振动器包括多层压电部件和连接到多层压电部件的电极部件,并且传感器包括压电材料和电极部件。 多层压电部件在相同的方向上被轮询,并且彼此接触的一个压电材料在与另一个压电材料相反的方向上膨胀或收缩。 振动器的最上层和传感器的最上层相对于堆叠方向,其中压电材料和振动器的电极部分和传感器各自堆叠,布置在同一表面上。