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1. 发明申请

US20190222189A1 ACOUSTIC WAVE DEVICES AND A METHOD OF PRODUCING THE SAME 审中-公开
公开(公告)号：US20190222189A1
公开(公告)日：2019-07-18
申请号：US16365160
申请日：2019-03-26
申请人： NGK INSULATORS, LTD.
发明人： Tomoyoshi Tai , Masahiko Namerikawa , Yudai Uno , Ryosuke Hattori , Keiichiro Asai
IPC分类号： H03H3/10 , H03H9/25 , H03H9/02 , H01L41/35 , H01L41/312 , H01L41/187
CPC分类号： H03H3/10 , H01L41/187 , H01L41/312 , H01L41/35 , H03H3/08 , H03H9/02559 , H03H9/02574 , H03H9/02614 , H03H9/02834 , H03H9/25
摘要： An acoustic wave device includes a piezoelectric material substrate, an intermediate layer on the piezoelectric material substrate and composed of one or more materials selected from the group consisting of silicon oxide, aluminum nitride and sialon, a bonding layer on the intermediate layer and composed of one or more materials selected from the group consisting of tantalum pentoxide, niobium pentoxide, titanium oxide, mullite, alumina, a high resistance silicon and hafnium oxide, a supporting body composed of a polycrystalline ceramic and bonded to the bonding layer by direct bonding, and an electrode on the piezoelectric material substrate.

2. 发明申请

US20170236994A1 PRECURSOR SOLUTION AND METHOD FOR THE PREPARATION OF A LEAD-FREE PIEZOELECTRIC MATERIAL 审中-公开
公开(公告)号：US20170236994A1
公开(公告)日：2017-08-17
申请号：US15582124
申请日：2017-04-28
申请人： STMicroelectronics S.R.L.
发明人： Angela Cimmino , Giovanna Salzillo , Valeria Casuscelli , Andrea Di Matteo
IPC分类号： H01L41/187 , C04B35/626 , H01L41/35 , C04B35/64 , C04B35/624 , C04B35/49 , C04B35/622
CPC分类号： H01L41/1871 , C04B35/465 , C04B35/4682 , C04B35/49 , C04B35/62218 , C04B35/62222 , C04B35/624 , C04B35/6264 , C04B35/62675 , C04B35/62685 , C04B35/6325 , C04B35/63444 , C04B35/63488 , C04B35/64 , C04B2235/3208 , C04B2235/3215 , C04B2235/3232 , C04B2235/3234 , C04B2235/3236 , C04B2235/3244 , C04B2235/3249 , C04B2235/3251 , C04B2235/3262 , C04B2235/3293 , C04B2235/441 , C04B2235/449 , C04B2235/6567 , C04B2235/72 , C04B2235/768 , C04B2235/81 , C04B2235/96 , C08K3/08 , C09D1/00 , C09D7/61 , H01L41/35
摘要： The present disclosure relates to a precursor solution for the preparation of a ceramic of the BZT-αBXT type, where X is selected from Ca, Sn, Mn, and Nb, and α is a molar fraction selected in the range between 0.10 and 0.90, said solution comprising: 1) at least one barium precursor compound; 2) a precursor compound selected from the group consisting of at least one calcium compound, at least one tin compound, at least one manganese compound, and at least one niobium compound; 3) at least one anhydrous precursor compound of zirconium; 4) at least one anhydrous precursor compound of titanium; 5) a solvent selected from the group consisting of a polyol and mixtures of a polyol and a secondary solvent selected from the group consisting of alcohols, carboxylic acids, ketones, and mixtures thereof; and 6) a chelating agent, as well as method of using the same.

3. 发明授权

US09246078B2 Piezoelectric apparatuses, systems and methods therefor 有权
标题翻译：压电设备，系统及方法
公开(公告)号：US09246078B2
公开(公告)日：2016-01-26
申请号：US13775640
申请日：2013-02-25
申请人： The Board of Trustees of the Leland Stanford Junior University
发明人： Evan J. Reed , Mitchell T. Ong , Karel-Alexander Niklaas Duerloo , Yao Li
IPC分类号： H01L41/09 , H01L41/08 , H01L41/25 , H01L41/113 , H01L41/18 , H01L41/35 , B82B1/00
CPC分类号： H01L41/08 , B82B1/008 , H01L41/094 , H01L41/1132 , H01L41/1136 , H01L41/18 , H01L41/25 , H01L41/35 , Y10T29/42
摘要： Various aspects as described herein are directed to piezoelectric materials. As consistent with one or more embodiments, an apparatus includes a nanomaterial and structures coupled to the nanomaterial. This nanomaterial-structure combination manifests piezoelectric characteristics, via the combination. In certain implementations, neither the nanomaterial nor the coupled structures independently exhibit piezoelectric characteristics, yet do so in combination.
摘要翻译：本文所述的各个方面涉及压电材料。与一个或多个实施例一致，装置包括纳米材料和耦合到纳米材料的结构。该纳米材料结构组合通过组合表现出压电特性。在某些实施方案中，纳米材料和偶联结构都不独立地表现出压电特性，而是组合地进行。

4. 发明申请

US20150135497A1 INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME 审中-公开
标题翻译：惯性传感器及其制造方法
公开(公告)号：US20150135497A1
公开(公告)日：2015-05-21
申请号：US14610919
申请日：2015-01-30
申请人： SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人： Seung Mo LIM , Yun Sung KANG , Sung Jun LEE , Sang Jin KIM , Jung Won LEE , Kyo Yeol LEE
IPC分类号： H01L41/25 , H01L41/35 , H01L41/29 , G01P15/09
CPC分类号： H01L41/25 , G01P15/0802 , G01P15/09 , H01L41/0475 , H01L41/0825 , H01L41/1138 , H01L41/257 , H01L41/29 , H01L41/35 , Y10T29/42
摘要： Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention may include a membrane 110, a piezoelectric body 130 formed over the membrane 110, an electrode 140 formed on the piezoelectric body 130, a first pad 150 electrically connected with the electrode 140, a second pad 160 electrically connected with an integrated circuit 170, and a connection member 180 electrically connecting the first pad 150 with the second pad 160.
摘要翻译：这里公开了惯性传感器及其制造方法。根据本发明的优选实施例的惯性传感器100可包括膜110，形成在膜110上的压电体130，形成在压电体130上的电极140，与电极140电连接的第一焊盘150，与集成电路170电连接的第二焊盘160以及将第一焊盘150与第二焊盘160电连接的连接部件180。

5. 发明申请

US20140084204A1 POLYMERIC PIEZOELECTRIC MATERIAL AND PROCESS FOR PRODUCING THE SAME 有权
标题翻译：聚合物压电材料及其制造方法
公开(公告)号：US20140084204A1
公开(公告)日：2014-03-27
申请号：US13990677
申请日：2012-10-12
申请人： Mitsui Chemicals, Inc.
发明人： Kazuhiro Tanimoto , Mitsunobu Yoshida , Shigeo Nishikawa , Masaki Shimizu
IPC分类号： H01L41/193 , H01L41/45
CPC分类号： H01L41/193 , B29C55/04 , B29C71/02 , B29C2071/022 , B29D7/01 , B29K2067/046 , B29K2995/004 , C08G63/02 , C08G63/06 , C08G63/08 , C08J5/18 , C08J7/08 , C08J2367/04 , C08K5/29 , C08L67/04 , H01L41/0478 , H01L41/18 , H01L41/22 , H01L41/33 , H01L41/35 , H01L41/45 , C08L79/00
摘要： The present invention provides a polymeric piezoelectric material comprising an aliphatic polyester (A) with a weight-average molecular weight of from 50,000 to 1,000,000 and having optical activity, and a stabilizing agent (B) with a weight-average molecular weight of from 200 to 60,000 having at least one kind of functional group selected from the group consisting of a carbodiimide group, an epoxy group and an isocyanate group, wherein the crystallinity of the material obtained by a DSC method is from 20% to 80%, and a content of the stabilizing agent (B) is from 0.01 part by mass to 10 parts by mass with respect to 100 parts by mass of the aliphatic polyester (A), as well as a process for producing the same.
摘要翻译：本发明提供一种聚合物压电材料，其包含重均分子量为50,000〜1,000,000的具有光学活性的脂族聚酯（A）和稳定剂（B），其重均分子量为200〜 60,000，具有选自碳二亚胺基，环氧基和异氰酸酯基的至少一种官能团，其中通过DSC法得到的材料的结晶度为20〜80％，含量为相对于100质量份的脂肪族聚酯（A），稳定剂（B）为0.01质量份〜10质量份，以及其制造方法。

6. 发明授权

US08633632B2 Vibration actuator and method for manufacturing the same 有权
标题翻译：振动致动器及其制造方法
公开(公告)号：US08633632B2
公开(公告)日：2014-01-21
申请号：US13052989
申请日：2011-03-21
申请人： Yuki Oda , Shinji Yamamoto , Akio Atsuta
发明人： Yuki Oda , Shinji Yamamoto , Akio Atsuta
IPC分类号： H02N11/00
CPC分类号： H01L41/35 , H02N1/008 , H02N2/001 , H02N2/005 , H02N2/0055 , H02N2/006 , H02N2/0065 , H02N2/12 , H02N2/16 , H02N2/163 , H02N2/22 , Y10T29/42 , Y10T29/49
摘要： A vibration actuator includes an elastic body on which at least one projection is formed and a vibrating body including an electromechanical conversion device, and drives a driven member that is in contact with a contact portion of the projection by causing an end portion of the projection to perform an ellipsoidal movement in response to a combination of two vibration modes generated in the vibrating body when an alternating driving voltage is applied. The elastic body is formed integrally with the projection and a bonding portion between the projection and the electromechanical conversion device. A space is provided between the contact portion and the electromechanical conversion device to which the projection is bonded. The spring portion is provided between the bonding portion and the contact portion and causes the projection to exhibit a spring characteristic when the contact portion is pressed by the driven member.
摘要翻译：振动致动器包括：弹性体，其上形成有至少一个突起;以及振动体，其包括机电转换装置，并且通过使突起的端部通过突出部的端部驱动与突起的接触部分接触的从动构件当施加交替的驱动电压时，响应于在振动体中产生的两种振动模式的组合来执行椭圆运动。弹性体与突起一体地形成，并且在突起和机电转换装置之间形成接合部。在接触部和与该凸起接合的机电转换装置之间设置有空间。弹性部分设置在接合部分和接触部分之间，并且当接触部分被被驱动部件按压时，使突起呈现出弹簧特性。

7. 发明申请

US20180062063A1 ELASTIC WAVE DEVICE 审中-公开
公开(公告)号：US20180062063A1
公开(公告)日：2018-03-01
申请号：US15651093
申请日：2017-07-17
申请人： Murata Manufacturing Co., Ltd.
发明人： Yasumasa TANIGUCHI
IPC分类号： H01L41/047 , H01L41/35 , H01L41/053 , H01L41/107
CPC分类号： H01L41/047 , H01L41/0533 , H01L41/107 , H01L41/35 , H03H9/02622 , H03H9/02818 , H03H9/059 , H03H9/1071 , H03H9/14541
摘要： An elastic wave device includes a piezoelectric substrate with first and second main surfaces internally facing each other, an elastic-wave element that includes an interdigital transducer electrode provided on or in the first main surface of the piezoelectric substrate, and a first protective film that is provided on the first main surface of the piezoelectric substrate so as to cover the IDT electrode. The IDT electrode includes a main electrode layer made of a metal having a density higher than that of the first protective film. The piezoelectric substrate has a thickness of about 0.35 mm or smaller, and irregularities are located on the second main surface.

8. 发明申请

US20170111028A1 ACOUSTIC RESONATOR STRUCTURE WITH INCLINED C-AXIS PIEZOELECTRIC BULK AND CRYSTALLINE SEED LAYERS 审中-公开
公开(公告)号：US20170111028A1
公开(公告)日：2017-04-20
申请号：US15293082
申请日：2016-10-13
申请人： Qorvo US, Inc.
发明人： Kevin McCarron , John Belsick
IPC分类号： H03H9/205 , H03H9/125 , H03H9/02
CPC分类号： H03H3/02 , C23C14/0036 , C23C14/024 , C23C14/0617 , C23C14/086 , C23C14/226 , C23C14/3442 , C23C14/35 , C23C14/566 , C23C14/568 , C30B25/06 , C30B25/186 , C30B29/403 , H01J37/32715 , H01J37/3408 , H01J37/3417 , H01J37/3447 , H01J37/347 , H01L41/35 , H03H9/02015 , H03H9/02047 , H03H9/02157 , H03H9/125 , H03H9/173 , H03H9/175 , H03H9/205
摘要： Systems and methods for growing hexagonal crystal structure piezoelectric material with a c-axis that is tilted (e.g., 25 to 50 degrees) relative to normal of a face of a substrate are provided. A deposition system includes a linear sputtering apparatus, a translatable multi-aperture collimator, and a translatable substrate table arranged to hold multiple substrates, with the substrate table and/or the collimator being electrically biased to a nonzero potential. An enclosure includes first and second deposition stations each including a linear sputtering apparatus, a collimator, and a deposition aperture.

9. 发明授权

US09559289B2 Polymeric piezoelectric material and process for producing the same 有权
标题翻译：聚合物压电材料及其制造方法
公开(公告)号：US09559289B2
公开(公告)日：2017-01-31
申请号：US14819663
申请日：2015-08-06
申请人： Mitsui Chemicals, Inc.
发明人： Kazuhiro Tanimoto , Mitsunobu Yoshida , Shigeo Nishikawa , Masaki Shimizu
IPC分类号： H01L41/193 , C08G63/02 , C08G63/06 , C08G63/08 , B29D7/01 , H01L41/047 , H01L41/18 , H01L41/22 , H01L41/33 , H01L41/35 , B29C71/02 , C08J5/18 , C08K5/29 , C08L67/04 , H01L41/45 , B29C55/04 , B29K67/00
CPC分类号： H01L41/193 , B29C55/04 , B29C71/02 , B29C2071/022 , B29D7/01 , B29K2067/046 , B29K2995/004 , C08G63/02 , C08G63/06 , C08G63/08 , C08J5/18 , C08J7/08 , C08J2367/04 , C08K5/29 , C08L67/04 , H01L41/0478 , H01L41/18 , H01L41/22 , H01L41/33 , H01L41/35 , H01L41/45 , C08L79/00
摘要： A polymeric piezoelectric material is provided that includes an aliphatic polyester (A) with a weight-average molecular weight of from 50,000 to 1,000,000 and having optical activity, and a stabilizing agent (B) with a weight-average molecular weight of from 200 to 60,000 having at least one kind of functional group selected from the group consisting of a carbodiimide group, an epoxy group and an isocyanate group, wherein the crystallinity of the material obtained by a DSC method is from 20% to 80%, a content of the stabilizing agent (B) is from 0.01 part by mass to 10 parts by mass with respect to 100 parts by mass of the aliphatic polyester (A), and internal haze with respect to visible light is 50% or less, as well as a process for producing the same.
摘要翻译：提供了一种聚合物压电材料，其包括重均分子量为50,000至1,000,000的具有光学活性的脂族聚酯（A）和具有200至60,000重均分子量的稳定剂（B）具有选自碳二亚胺基，环氧基和异氰酸酯基的至少一种官能团，其中通过DSC法获得的材料的结晶度为20％至80％，稳定化的含量相对于100质量份脂肪族聚酯（A），试剂（B）的含量为0.01质量份〜10质量份，相对于可见光的内部雾度为50％以下，生产相同。

10. 发明授权

US09293686B2 In-plane actuated resonant device and method of manufacturing the device 有权
标题翻译：平面内致动谐振装置及其制造方法
公开(公告)号：US09293686B2
公开(公告)日：2016-03-22
申请号：US13818771
申请日：2011-09-09
申请人： Sebastien Hentz
发明人： Sebastien Hentz
IPC分类号： H01L41/053 , H01L41/107 , H03H9/02 , H03H9/24 , H01L41/35
CPC分类号： H01L41/107 , H01L41/053 , H01L41/35 , H03H9/02259 , H03H9/2457 , H03H2009/02496 , Y10T29/42
摘要： An in-plane actuated resonant device, and method of manufacturing the device. The device includes a support; a suspended beam, moving parallel to the plane of the surface of the support and anchored to the support through at least one of its ends; and a mechanism actuating the beam to enable its displacement parallel to the support. The actuation mechanism includes at least one suspended element, anchored to the support and to one lateral face of the beam. The element moves when a control voltage is applied to the element and thus causes displacement of the beam. The device may be manufactured using surface technology and is applicable particularly for resonant mass sensors.
摘要翻译：平面内致动谐振装置及其制造方法。该装置包括支架; 悬挂梁，平行于支撑件的表面的平面移动并通过其至少一个端部锚固到支撑件; 以及致动梁以使其能够平行于支撑件的位移的机构。致动机构包括至少一个悬挂元件，锚固到支撑件和梁的一个侧面。当控制电压施加到元件上时，元件移动，从而导致光束的位移。该装置可以使用表面技术制造，并且特别适用于谐振质量传感器。

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