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    • 6. 发明申请
    • DIFFERENTIAL-TYPE MEMS ACOUSTIC TRANSDUCER
    • 差分型MEMS声学传感器
    • US20160173992A1
    • 2016-06-16
    • US14858997
    • 2015-09-18
    • STMicroelectronics S.r.l.
    • Germano NicolliniSilvia AdornoAndrea BarbieriFederica BarbieriSebastiano ContiEdoardo MarinoSergio Pernici
    • H04R19/00H04R19/02
    • H04R19/005H04R19/02H04R19/04H04R2201/003H04R2499/11H04R2499/15
    • A MEMS acoustic transducer has: a detection structure, which generates an electrical detection quantity as a function of a detected acoustic signal; and an electronic interface circuit, which is operatively coupled to the detection structure and generates an electrical output quantity as a function of the electrical detection quantity. The detection structure has a first micromechanical structure of a capacitive type and a second micromechanical structure of a capacitive type, each including a membrane that faces and is capacitively coupled to a rigid electrode and defines a respective first detection capacitor and second detection capacitor; the electronic interface circuit defines an electrical connection in series of the first detection capacitor and second detection capacitor between a biasing line and a reference line, and further has a first single-output amplifier and a second single-output amplifier, which are coupled to a respective one of the first detection capacitor and the second detection capacitor and have a respective first output terminal and second output terminal, between which the electrical output quantity is present.
    • MEMS声换能器具有:检测结构,其产生作为检测到的声信号的函数的电检测量; 以及电子接口电路,其可操作地耦合到所述检测结构并且产生作为所述电检测量的函数的电输出量。 该检测结构具有电容型的第一微机械结构和电容式的第二微机械结构,每个微机械结构均包括面对电容耦合到刚性电极并且限定相应的第一检测电容器和第二检测电容器的膜; 电子接口电路在偏置线和参考线之间限定了第一检测电容器和第二检测电容器串联的电连接,并且还具有第一单输出放大器和第二单输出放大器,其耦合到 第一检测电容器和第二检测电容器中的一个,并且具有各自的第一输出端子和第二输出端子,其间存在电输出量。