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    • 7. 发明授权
    • Variable wavelength interference filter, optical filter device, optical module, and electronic apparatus
    • 可变波长干涉滤波器,滤光器件,光模块和电子设备
    • US09335537B2
    • 2016-05-10
    • US13864612
    • 2013-04-17
    • Seiko Epson Corporation
    • Akira Sano
    • G02B26/00
    • G02B26/001
    • A variable wavelength interference filter includes a stationary substrate provided with a stationary reflecting film, a movable substrate provided with a movable reflecting film, a first electrostatic actuator, and a second electrostatic actuator which can be driven independently of the first electrostatic actuator, two first partial actuators constituting the first electrostatic actuator have the same shape as each other in the plan view, and are arranged at regular angular intervals and with the same distance with respect to the filter center point, and two second partial actuators constituting the second electrostatic actuator have the same shape as each other in the plan view, and are arranged at regular angular intervals and with the same distance with respect to the filter center point.
    • 可变波长干涉滤光器包括设置有静止反射膜的固定基板,设置有可移动反射膜的可移动基板,第一静电致动器和可独立于第一静电致动器驱动的第二静电致动器, 构成第一静电致动器的致动器在平面图中具有相同的形状,并且以相对于过滤器中心点的规定的角度间隔和相同的距离布置,并且构成第二静电致动器的两个第二部分致动器具有 在平面图中彼此相同的形状,并且以规则的角度间隔和相对于过滤器中心点具有相同的距离布置。
    • 8. 发明申请
    • OPTICAL MODULE, ELECTRONIC APPARATUS, AND SPECTROSCOPIC CAMERA
    • 光学模块,电子设备和光谱摄像机
    • US20140218586A1
    • 2014-08-07
    • US14171866
    • 2014-02-04
    • Seiko Epson Corporation
    • Akira Sano
    • G02B26/00
    • G02B26/001G01J3/26G01J3/51G02B6/29358G02B26/0841
    • An optical module includes a fixed reflection film, a movable reflection film, a first driver having a plurality of sub-drivers that can be driven independently of each other via voltage application in a plan view, a second driver that changes the dimension of a gap between the fixed reflection film and the movable reflection film, and a voltage controller that applies first drive voltages to the sub-drivers and applies a second drive voltage to the second driver, and the voltage controller applies a first drive voltage set for each of the sub-drivers in accordance with parallelism between the fixed reflection film and the movable reflection film at the time when the dimension of the gap is changed.
    • 光学模块包括固定反射膜,可移动反射膜,具有多个辅助驱动器的第一驱动器,其可以通过平面图中的电压施加而彼此独立地驱动;第二驱动器,其改变间隙的尺寸 在所述固定反射膜和所述可动反射膜之间,以及电压控制器,其对所述副驱动器施加第一驱动电压并对所述第二驱动器施加第二驱动电压,并且所述电压控制器对所述第二驱动电压施加第一驱动电压, 根据间隙尺寸改变时固定反射膜和可移动反射膜之间的平行度的副驱动器。