专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US11181547B2 Inertial sensor, electronic device, and vehicle 有权
公开(公告)号：US11181547B2
公开(公告)日：2021-11-23
申请号：US16694569
申请日：2019-11-25
申请人： SEIKO EPSON CORPORATION
发明人： Makoto Furuhata
IPC分类号： G01P15/18 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C19/574 , G01P3/44 , G01S19/49 , G01P15/08 , G05D1/02 , G01C21/16
摘要： An inertial sensor includes a substrate, a first detection movable body and a second detection movable body which overlap the substrate in a direction along the Z-axis and are disposed side by side in a direction along the X-axis, a first detection spring that supports the first detection movable body to be displaceable in the direction along the X-axis, a second detection spring that supports the second detection movable body to be displaceable in the direction along the X-axis, a first drive portion that drives the first detection movable body with a drive component in the direction along the X-axis, a second drive portion that drives the second detection movable body with the drive component in the direction along the X-axis, and a first and second fixed detection electrodes disposed on the substrate and facing the first and second detection movable bodies. The first and second detection springs are provided with a first thin portion thinner than a thickness of the first and second detection movable bodies in the direction along the Z-axis.

2. 发明授权

US10215566B2 Oscillator, electronic device, and moving object 有权
公开(公告)号：US10215566B2
公开(公告)日：2019-02-26
申请号：US15260793
申请日：2016-09-09
申请人： Seiko Epson Corporation
发明人： Makoto Furuhata
IPC分类号： G01C19/574 , G01C19/5712
摘要： An oscillator includes a substrate, a detection flap plate which is disposed facing the substrate, and an elastically deformable beam portion which displaceably supports the detection flap plate in a Z axis direction with respect to the substrate, in which the detection flap plate is displaced to the substrate side in a range in which recovery force of the beam portion is larger than the electrostatic force which is formed between the substrate and the detection flap plate. That is, when a boundary at which electrostatic force and recovery force are equal is a pull in critical point, the detection flap plate is displaced within a region above the pull in critical point.

3. 发明授权

US09829505B2 Electronic device, electronic apparatus, and moving object 有权
公开(公告)号：US09829505B2
公开(公告)日：2017-11-28
申请号：US14658364
申请日：2015-03-16
申请人： Seiko Epson Corporation
发明人： Makoto Furuhata
IPC分类号： G01P15/08 , G01C19/56 , G01P15/18 , G01C19/5783
CPC分类号： G01P15/18 , G01C19/5783 , G01P15/08 , H01L2224/48091 , H01L2224/48227 , H01L2224/49109 , H01L2224/73265 , H01L2924/181 , H01L2924/00014 , H01L2924/00012
摘要： An electronic device includes an accommodation space formed between a first base material and a second base material so as to seal a space therebetween, and a functional element in the accommodation space. The accommodation space is formed in an inner region of a bonding portion between the first base material and the second base material. The electronic device includes wirings extending from the inner region through the bonding portion to the outside of the accommodation space. The bonding portion includes a first bonding region and a second bonding region. The wiring includes a first wiring portion having a first direction toward the outside through the first bonding region from the inner region and a second wiring portion having a second direction toward the outside through the second bonding region from the inner region. The first and the second directions are different.

4. 发明授权

US09798332B2 Functional element, electronic device, electronic apparatus, and moving object 有权
公开(公告)号：US09798332B2
公开(公告)日：2017-10-24
申请号：US14606370
申请日：2015-01-27
申请人： Seiko Epson Corporation
发明人： Kei Kanemoto , Makoto Furuhata
IPC分类号： G05B21/00 , G05B13/00 , G05D15/00 , G05D19/02
摘要： There is provided a functional element capable of preventing an oblique vibration due to a vibration leakage phenomenon from propagating to degrade the detection accuracy. A gyro element as the functional element includes a support body, a detection section, a drive coupling section having a first part and a second part, and a mass section connected to the drive coupling section, and connected to the support body via the drive coupling section, and the mass section performs the drive vibration in a direction along a third axis parallel to a normal line of a plane including the first axis and the second axis perpendicular to each other.

5. 发明授权

US09702699B2 Functional element with a mass body displaced in a direction which intersects its main surface, electronic apparatus and mobile object 有权
公开(公告)号：US09702699B2
公开(公告)日：2017-07-11
申请号：US14733321
申请日：2015-06-08
申请人： Seiko Epson Corporation
发明人： Makoto Furuhata
IPC分类号： G01C19/00 , G01C19/5747 , G01C19/5733 , G01C19/5769
CPC分类号： G01C19/5747 , G01C19/5733 , G01C19/5769 , Y10T29/49119
摘要： A functional element includes a first base body; a coupling section which is coupled to the first base body; a support body which extends from the coupling section; a mass body which is coupled to the support body; a drive electrode which is provided on a surface side that faces the mass body; a detection working electrode which extends from the support body; and a detection fixed electrode which is coupled to the first base body and faces at least a portion of the detection working electrode. The mass body can be displaced in a direction which intersects a main surface of the mass body. When a distance between the first base body and the mass body is referred to as d1 and a distance between the first base body and the detection fixed electrode is referred to as d2, a relation of d1>d2 is satisfied.

6. 发明授权

US09372084B2 Gyro sensor, electronic apparatus, and mobile unit 有权
标题翻译：陀螺传感器，电子仪器和移动单元
公开(公告)号：US09372084B2
公开(公告)日：2016-06-21
申请号：US13855152
申请日：2013-04-02
申请人： Seiko Epson Corporation
发明人： Makoto Furuhata
IPC分类号： G01C19/56 , G01C19/5747
CPC分类号： G01C19/56 , G01C19/5747
摘要： A gyro sensor includes a vibrator, a spring part extending from a first fixing part to the vibrator in a direction along a first axis, a drive part that excites the vibrator, and a detection part provided on the vibrator, wherein the vibrator has, in a plan view, first and second vibrating parts arranged side by side in the direction along the first axis and drive-vibrate in anti-phase with each other, a connecting spring part that connects the first and second vibrating parts in the direction along the first axis, and a first elastic member extending from the connecting spring part in a direction along a second axis intersecting with the first axis and fixed to a second fixing part.
摘要翻译：陀螺仪传感器包括：振动器，从第一固定部件沿着第一轴线方向延伸到振动器的弹簧部件，激励振动器的驱动部件和设置在振动器上的检测部件，其中振动器具有平面图，沿着第一轴线方向并排布置的第一和第二振动部件，彼此相反地驱动振动;连接弹簧部件，其沿着第一轴线方向连接第一和第二振动部件; 以及第一弹性构件，其沿着与第一轴线相交的第二轴线的方向从连接弹簧部分延伸并固定到第二固定部。

7. 发明授权

US11690594B2 Piezoelectric actuator, ultrasonic element, ultrasonic probe, ultrasonic device, and electronic device 有权
公开(公告)号：US11690594B2
公开(公告)日：2023-07-04
申请号：US17454879
申请日：2021-11-15
申请人： Seiko Epson Corporation
发明人： Chikara Kojima , Koji Ohashi , Makoto Furuhata
IPC分类号： A61B8/00 , G01N29/24 , H10N30/20
CPC分类号： A61B8/4427 , A61B8/4483 , A61B8/4488 , A61B8/4494 , G01N29/2437 , H10N30/2047
摘要： A piezoelectric actuator includes: a vibrating plate including a first surface configured to close an opening provided in a substrate and also including a second surface including a plurality of piezoelectric elements; a suppressing portion configured to suppress vibration of the vibrating plate; and a plurality of walls sticking out into the opening from the first surface, in which, when an active portion of a piezoelectric element is set as a portion where a first electrode, a piezoelectric layer, and a second electrode overlap, the walls are provided between adjacent active portions in plan view from a direction in which the first electrode, the piezoelectric layer, and the second electrode are stacked, and a distance between adjacent walls is longer than a distance between adjacent active portions in a plane perpendicular to the stacking direction.

8. 发明授权

US09165874B2 Semiconductor device, method of manufacturing semiconductor device, and electronic apparatus 有权
标题翻译：半导体装置，半导体装置的制造方法以及电子装置
公开(公告)号：US09165874B2
公开(公告)日：2015-10-20
申请号：US13860107
申请日：2013-04-10
申请人： Seiko Epson Corporation
发明人： Makoto Furuhata
IPC分类号： H01L29/24 , G01C19/56 , H01L23/498 , H01L21/768 , B81B3/00
CPC分类号： H01L23/498 , B81B3/0086 , B81B2207/07 , H01L21/76802 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device includes a base substrate and first and second semiconductor wires which are arranged side by side on the base substrate, and the base substrate is provided with an opening (inter-wire grove, slit) in an extending direction of the first and second semiconductor wires between the first semiconductor wire and the second semiconductor wire.
摘要翻译：半导体器件包括基底基板和在基底基板上并排布置的第一和第二半导体布线，并且基底基板在第一和第二基板的延伸方向上设置有开口（线间格子槽，狭缝）第一半导体布线和第二半导体布线之间的半导体布线。

9. 发明授权

US11084712B2 Physical quantity sensor with spring having protective beam 有权
公开(公告)号：US11084712B2
公开(公告)日：2021-08-10
申请号：US16200999
申请日：2018-11-27
申请人： Seiko Epson Corporation
发明人： Makoto Furuhata
IPC分类号： B81B3/00 , G01P15/125 , G01P15/097 , G01P15/08
摘要： A physical quantity sensor includes a movable body and a spring that supports the movable body. The spring includes an arm having an elongate shape in a first direction, and a first beam and a second beam that are adjacent to the arm and are disposed in the first direction. An end portion of the first beam on the second beam side and an end portion of the second beam on the first beam side are disposed side by side in a second direction orthogonal to the first direction. The beams preferably are protective of the side surfaces of the spring arm, function to enable arm machining accuracy, reduce shape deviations, and reduce the occurrence of quadrature. The sensor exemplarily may detect angular rate or acceleration.

10. 发明授权

US10823570B2 Physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle 有权
公开(公告)号：US10823570B2
公开(公告)日：2020-11-03
申请号：US15927554
申请日：2018-03-21
申请人： Seiko Epson Corporation
发明人： Kei Kanemoto , Makoto Furuhata
IPC分类号： G01C19/5747 , G01P15/125 , G01C19/5769 , G01P15/08
摘要： A physical quantity sensor includes: a base substrate; a first wiring portion that is fixed to the base substrate; a second wiring portion that is fixed to the base substrate and has at least a part disposed in parallel to the first wiring portion; and an electrode portion that is disposed in the base substrate and has a reference potential. The electrode portion is disposed between the base substrate, and the first and second wiring portions. At least parts of the first and second wiring portions overlap the electrode portion in a plan view.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式