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1. 发明授权

US11292714B2 Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle 有权
公开(公告)号：US11292714B2
公开(公告)日：2022-04-05
申请号：US17060378
申请日：2020-10-01
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： B81C1/00 , B81B3/00 , B60R25/24 , B60R16/023 , G01P15/125 , G01P15/08
摘要： A physical quantity sensor includes a movable body, a support portion supporting the movable body through a connecting portion, and a substrate that is disposed so as to overlap the movable body in plan view and provided with a first fixed electrode and a second fixed electrode along a first direction orthogonal to a longitudinal direction of the connecting portion. In plan view, a dummy electrode that is disposed next to the first fixed electrode and is at the same potential as the movable body is provided on the substrate. The first fixed electrode and the dummy electrode includes a first electrode material layer provided on the substrate, and a second electrode material layer provided on the substrate and on the first electrode material layer. The second electrode material layer constituting the first fixed electrode and the second electrode material layer constituting the dummy electrode are provided between the first electrode material layer constituting the first fixed electrode and the first electrode material layer constituting the dummy electrode, in plan view. A distance between the second electrode material layer constituting the first fixed electrode and the second electrode material layer constituting the dummy electrode is smaller than a distance between the first electrode material layer constituting the first fixed electrode and the first electrode material layer constituting the dummy electrode, in plan view.

2. 发明申请

US20210285983A1 PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND VEHICLE 有权
公开(公告)号：US20210285983A1
公开(公告)日：2021-09-16
申请号：US17186114
申请日：2021-02-26
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01P15/18
摘要： A physical quantity sensor includes, when three directions orthogonal to one another are defined as a first direction, a second direction, and a third direction, a substrate; and a moving member facing the substrate in the third direction via a gap and becoming displaced in the third direction in relation to the substrate. The moving member has a first region that has a plurality of penetration holes penetrating the moving member in the third direction and having a square opening shape as viewed from the third direction, and a second region having no penetration hole. At least one of a length in the first direction and a length in the second direction of the second region is equal to or greater than S0+2×S1, where S0 is a length of one side of the penetration hole, and S1 is a space between the penetration holes next to each other.

3. 发明授权

US11073392B2 Physical quantity sensor, complex sensor, inertial measurement unit, portable electronic device, electronic device, and vehicle 有权
公开(公告)号：US11073392B2
公开(公告)日：2021-07-27
申请号：US16115939
申请日：2018-08-29
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01C19/5769 , G01P15/125 , B81B7/00 , G01P15/08
摘要： A physical quantity sensor includes: a movable body that includes a beam, a coupling portion that is connected with the beam and is provided in a direction intersecting with the beam, and a first and second mass portions that are connected with the coupling portion at connection positions; a first and second fixed electrodes are opposed to the first and second mass portions; and a protrusion are provided and protrude toward the first and second mass portions. In the intersecting direction, in a case where a distance from connection positions to end portions of the first and second mass portions opposite to the beam is L, and a distance from the protrusions to end portions of the first and second mass portions opposite to the beam is L1, the distance L1 is 0.5 L or longer and 3.1 L or shorter.

4. 发明授权

US10850975B2 Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle 有权
公开(公告)号：US10850975B2
公开(公告)日：2020-12-01
申请号：US15900088
申请日：2018-02-20
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： H01L21/00 , B81C1/00 , B81B3/00 , B60R25/24 , B60R16/023 , G01P15/125 , G01P15/08
摘要： A manufacturing method of a physical quantity sensor includes forming first and second fixed electrodes, and a dummy electrode on a substrate; and a movable body forming. The electrode forming includes forming a first mask layer on the substrate, forming a first electrode material layer by forming a first conductive layer on the substrate and the first mask layer, forming a second conductive layer on the substrate and the first electrode material layer, forming a second mask layer by forming a mask material layer on the second conductive layer, and removing a part of a section of the mask material layer not overlapping the first electrode material layer in plan view, and forming a second electrode material layer by etching the second conductive layer, with the second mask layer as a mask such that the second conductive layer is provided on the first electrode material layer and on the substrate.

5. 发明授权

US10809278B2 Physical quantity sensor having a movable body formed with through-holes to reduce a difference between the inside-hole damping and the squeeze film damping 有权
公开(公告)号：US10809278B2
公开(公告)日：2020-10-20
申请号：US16371168
申请日：2019-04-01
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01P15/08 , G01C19/5755 , G01P15/125
摘要： A physical quantity sensor includes a substrate, a movable body that faces the substrate, a fixed portion that is fixed to the substrate, and a support beam that couples the movable body to the fixed portion. The movable body is displaceable with the support beam as a rotation axis, and includes, in a plan view, a first mass that is located on one side of a second direction with respect to the rotation axis, and a second mass that is located on the other side. Each of the first mass and the second mass has a plurality of through-holes which penetrate through the movable body and each of which has a square shape as an opening shape. When damping is indicated by C, and a minimum value of the damping is indicated by Cmin, C≤1.5≤Cmin.

6. 发明授权

US10739374B2 Physical quantity sensor, physical quantity sensor device, composite sensor device, inertial measurement unit, electronic apparatus, and vehicle 有权
公开(公告)号：US10739374B2
公开(公告)日：2020-08-11
申请号：US16201044
申请日：2018-11-27
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01C19/5733 , G01P15/08 , G01P15/125 , G01C19/56 , G01P15/097
摘要： A inertial sensor includes a substrate, a fixed portion that is fixed to the substrate, a movable portion is connected to the fixed portion, and is displaceable in an X axis direction, and a movable electrode that is supported at the movable portion, and a frame part includes a first edge that is located on one side of the X axis direction, and is disposed along a Y axis direction, and a second edge that is located on the other side of the X axis direction, and is disposed along the Y axis direction. The fixed portion is disposed further toward the second edge than the first edge, and the substrate includes a first projection that overlaps the first edge, and is disposed to be separated from the first edge, and a second projection that overlaps the second edge, and is disposed to be separated from the second edge.

7. 发明授权

US10317425B2 Functional element, electronic apparatus, and moving object 有权
公开(公告)号：US10317425B2
公开(公告)日：2019-06-11
申请号：US14628587
申请日：2015-02-23
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： B81B3/00 , G01P15/125 , G01P15/08
摘要： A functional element includes: a substrate; a movable body that includes a movable electrode portion; a support portion that supports the movable body; a first fixed electrode portion that is disposed on the substrate and a portion of which faces a first portion as one of portions of the movable body; a second fixed electrode portion that is disposed on the substrate and a portion of which faces a second portion as the other portion of the movable body; and a third fixed electrode portion that is disposed on the substrate and a portion of which faces the first portion. An opening that faces a region of the substrate between the first fixed electrode portion and the third fixed electrode portion is provided in the movable body, and the width of the opening is equal to or more than the width of the region.

8. 发明授权

US10168350B2 Physical quantity sensor, physical quantity sensor device, electronic apparatus, and moving object 有权
公开(公告)号：US10168350B2
公开(公告)日：2019-01-01
申请号：US15187175
申请日：2016-06-20
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01P15/125
摘要： A physical quantity sensor includes an element piece, in which the element piece includes a support portion that includes a first support portion, a second support portion, and a third support portion that links the first and second support portions, and is connected to a base substrate at the third support portion, a movable electrode portion that is positioned between the first and second support portions, and includes a movable electrode finger, an elastic portion that links the movable electrode portion and the support portion and has elasticity, and a fixed electrode portions having fixed electrode fingers that are arranged facing the movable electrode finger.

9. 发明授权

US09835646B2 Functional device, electronic apparatus, and moving object 有权
公开(公告)号：US09835646B2
公开(公告)日：2017-12-05
申请号：US14338910
申请日：2014-07-23
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： H05K7/00 , G01P15/125
CPC分类号： G01P15/125
摘要： A functional device includes a fixed electrode portion including a first fixed electrode portion and a second fixed electrode portion, a first wiring portion connected to the first fixed electrode portion, and a second wiring portion connected to the second fixed electrode portion. At least one of the first wiring portion and the second wiring portion is provided with a branch portion. One wiring line extending from the branch portion is connected to the fixed electrode portion, and another wiring line extending from the branch portion is provided along the first wiring portion or the second wiring portion.

10. 发明授权

US09828235B2 Functional element, physical quantity sensor, electronic apparatus and mobile entity 有权
公开(公告)号：US09828235B2
公开(公告)日：2017-11-28
申请号：US14696709
申请日：2015-04-27
申请人： Seiko Epson Corporation
发明人： Satoru Tanaka
IPC分类号： G01P15/125 , B81B3/00 , G01C19/5656 , G01P15/08
CPC分类号： B81B3/0051 , B81B2201/0235 , B81B2203/0181 , G01C19/5656 , G01P15/125 , G01P2015/0814
摘要： An acceleration sensor includes a substrate, a support beam, a weight body a stationary section and an engaging section. The weight body is divided into a first weight section and a second weight section based on the support beam as a boundary line, and the first weight section and the second weight section have different weights from each other. The first weight section and the second weight section include a facing section which faces a side of the engaging section opposite to a side facing the support beam. In an X axis direction intersecting the Y axis direction, if a distance between a corner section of the engaging section in the vicinity of one end portion and the support beam is L1 and a distance between the engaging section and the facing section is L2, a relational expression, L1>L2 is satisfied.

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