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1. 发明申请

US20220236057A1 Vibrator Device, Electronic Apparatus, And Vehicle 有权
公开(公告)号：US20220236057A1
公开(公告)日：2022-07-28
申请号：US17718418
申请日：2022-04-12
申请人： Seiko Epson Corporation
发明人： Seiichiro OGURA , Keiichi YAMAGUCHI , Ryuta NISHIZAWA
IPC分类号： G01C19/5642 , B60R16/023 , G01C19/5656 , G01P15/18 , G01C19/5607 , G01C19/56
摘要： A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.

2. 发明授权

US11085766B2 Micromachined multi-axis gyroscopes with reduced stress sensitivity 有权
公开(公告)号：US11085766B2
公开(公告)日：2021-08-10
申请号：US16143772
申请日：2018-09-27
申请人： SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
发明人： Cenk Acar , Brenton Simon , Sandipan Maity
IPC分类号： G01C19/5712 , G01C19/5656 , B81C1/00 , B81B3/00
摘要： In a general aspect, a micromachined gyroscope can include a substrate and a static mass suspended in an x-y plane over the substrate by a plurality of anchors attached to the substrate. The static mass can be attached to the anchors by anchor suspension flexures. The micromachined gyroscope can include a dynamic mass surrounding the static mass and suspended from the static mass by one or more gyroscope suspension flexures.

3. 发明授权

US10596813B2 Liquid discharge apparatus and liquid discharge method 有权
公开(公告)号：US10596813B2
公开(公告)日：2020-03-24
申请号：US16273249
申请日：2019-02-12
申请人： Hiroki Tanaka , Ryosuke Takeuchi , Takeshi Shikama
发明人： Hiroki Tanaka , Ryosuke Takeuchi , Takeshi Shikama
IPC分类号： B41J2/045 , B41J3/36 , G01C19/5656 , G06F3/03
摘要： A liquid discharge apparatus includes a head configured to discharge liquid to print an image on a recording medium according to image data while the liquid discharge apparatus is moved; a sensor configured to detect movement of the liquid discharge apparatus in a predetermined period and output movement information including at least one of a movement amount and an angular velocity of the liquid discharge apparatus; a heater configured to heat the head; a temperature sensor configured to detect a temperature of the head; and circuitry. The circuitry is configured to instruct liquid discharge from the head based on the image data and the movement information from the sensor, detect floating of the liquid discharge apparatus based on a detection result generated by the sensor, and control heating of the head based on a result of detection of the floating.

4. 发明申请

US20190283408A1 LIQUID DISCHARGE APPARATUS AND LIQUID DISCHARGE METHOD 审中-公开
公开(公告)号：US20190283408A1
公开(公告)日：2019-09-19
申请号：US16273249
申请日：2019-02-12
申请人： Hiroki TANAKA , Ryosuke TAKEUCHI , Takeshi SHIKAMA
发明人： Hiroki TANAKA , Ryosuke TAKEUCHI , Takeshi SHIKAMA
IPC分类号： B41J2/045 , B41J3/36 , G01C19/5656 , G06F3/03
摘要： A liquid discharge apparatus includes a head configured to discharge liquid to print an image on a recording medium according to image data while the liquid discharge apparatus is moved; a sensor configured to detect movement of the liquid discharge apparatus in a predetermined period and output movement information including at least one of a movement amount and an angular velocity of the liquid discharge apparatus; a heater configured to heat the head; a temperature sensor configured to detect a temperature of the head; and circuitry. The circuitry is configured to instruct liquid discharge from the head based on the image data and the movement information from the sensor, detect floating of the liquid discharge apparatus based on a detection result generated by the sensor, and control heating of the head based on a result of detection of the floating.

5. 发明授权

US10294095B2 Micromechanical sensor and method for producing a micromechanical sensor 有权
公开(公告)号：US10294095B2
公开(公告)日：2019-05-21
申请号：US15582333
申请日：2017-04-28
申请人： Robert Bosch GmbH
发明人： Benny Pekka Herzogenrath , Johannes Classen
IPC分类号： H01L29/84 , B81B3/00 , B81C1/00 , G01C19/5712 , G01P15/125 , G01C19/56 , G01C19/5656 , G01P1/00 , G01P15/08
摘要： A micromechanical sensor that is produced surface-micromechanically includes at least one mass element formed in a third functional layer that is non-perforated at least in certain portions. The sensor has a gap underneath the mass element that is formed by removal of a second functional layer and at least one oxide layer. The removal of the at least one oxide layer takes place by introducing a gaseous etching medium into a defined number of etching channels arranged substantially parallel to one another. The etching channels are configured to be connected to a vertical access channel in the third functional layer.

6. 发明申请

US20190145772A1 MICROMACHINED MULTI-AXIS GYROSCOPES WITH REDUCED STRESS SENSITIVITY 审中-公开
公开(公告)号：US20190145772A1
公开(公告)日：2019-05-16
申请号：US16143772
申请日：2018-09-27
申请人： SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
发明人： Cenk ACAR , Brenton SIMON , Sandipan MAITY
IPC分类号： G01C19/5712 , G01C19/5656 , B81B3/00 , B81C1/00
摘要： In a general aspect, a micromachined gyroscope can include a substrate and a static mass suspended in an x-y plane over the substrate by a plurality of anchors attached to the substrate. The static mass can be attached to the anchors by anchor suspension flexures. The micromachined gyroscope can include a dynamic mass surrounding the static mass and suspended from the static mass by one or more gyroscope suspension flexures.

7. 发明授权

US09519004B2 Sensor with moving sensitive element having mixed vibrating and pendular operation, and methods for controlling such a sensor 有权
标题翻译：具有混合振动和摆动操作的移动敏感元件的传感器以及用于控制这种传感器的方法
公开(公告)号：US09519004B2
公开(公告)日：2016-12-13
申请号：US15037518
申请日：2014-10-21
申请人： SAGEM DEFENSE SECURITE
发明人： Alain Jeanroy
IPC分类号： G01P15/00 , G01P15/097 , G01P15/08 , G01C19/5656 , G01C19/5719 , G01P15/18 , G01P15/14 , G01C19/5733 , G01C19/5642 , G01C19/56 , G01P15/125
CPC分类号： G01P15/097 , G01C19/56 , G01C19/5642 , G01C19/5656 , G01C19/5719 , G01C19/5733 , G01P15/0802 , G01P15/0888 , G01P15/125 , G01P15/14 , G01P15/18 , G01P2015/0814 , G01P2015/082 , G01P2015/0848 , G01P2015/0857
摘要： A sensor comprising: a stand; a first body movable along a sensing axis; two pairs of second bodies arranged symmetrically relative to the first body and along the sensing axis; transducers for detecting a position of the first body relative to the stand, for setting the second bodies into vibration along a vibration axis, and for detecting respective vibration frequencies of the second bodies; and surface electrostatic coupling means connecting each second body to the first body in such a manner that a movement of the first body relative to the stand along the sensing axis gives rise respectively to an increase and to a decrease in the electrostatic coupling for one and the other of the pairs of second bodies. Methods of controlling such a sensor.
摘要翻译：一种传感器，包括：支架; 沿着感测轴可移动的第一主体; 两对第二主体相对于第一主体并沿传感轴对称地布置; 用于检测第一主体相对于支架的位置的换能器，用于将第二主体沿着振动轴线设置成振动，并且用于检测第二主体的各个振动频率; 以及表面静电耦合装置，其将每个第二主体连接到第一主体，使得第一主体相对于支架沿传感轴的运动分别产生一个和第二主体的静电耦合的增加和减小其他两对第二体。控制这种传感器的方法。

8. 发明申请

US20160349053A1 Micromachined Resonating Beam Gyroscopes 审中-公开
标题翻译：微加工共振光束陀螺仪
公开(公告)号：US20160349053A1
公开(公告)日：2016-12-01
申请号：US14924085
申请日：2015-10-27
申请人： Analog Devices, Inc.
发明人： Eugene Oh Hwang , Sunil Ashok Bhave
IPC分类号： G01C19/5656
CPC分类号： G01C19/5656 , G01C19/5649
摘要： A single-axis resonating beam gyroscope uses a special arrangement of support tethers that maximizes the Q (quality factor) and minimizes stress sensitivity. The tethers are located at the nodal points of the beam with respect to a predetermined drive mode and are approximately one-fourth the length of the beam. Also, the tethers do not extend above or through the nodal points of the beam, which would be difficult to produce in typical MEMS fabrication processes. Embodiments typically use electrostatic drive and sense transduction. Trim electrodes may be used to compensate for any erroneous modal coupling.
摘要翻译：单轴谐振光束陀螺仪使用支撑系绳的特殊布置，使Q（品质因数）最大化并使应力灵敏度最小化。系绳相对于预定的驱动模式位于梁的节点处，并且大约是梁的长度的四分之一。此外，系绳不会在光束的节点之上或之上延伸，这在典型的MEMS制造工艺中将难以产生。实施例通常使用静电驱动和感测传导。修剪电极可用于补偿任何错误的模态耦合。

9. 发明授权

US09494472B2 Device for measuring the temperature of a vibrating beam and application to the improvement of the precision of measurement of a vibrating-beam sensor 有权
标题翻译：用于测量振动光束温度的装置，以及提高振动光束传感器测量精度的应用
公开(公告)号：US09494472B2
公开(公告)日：2016-11-15
申请号：US13981056
申请日：2012-01-23
申请人： Oliver Le Traon , Claude Chartier , Vincent Gaudineau , Jean Guerard , Denis Janiaud , Raphaël Levy
发明人： Oliver Le Traon , Claude Chartier , Vincent Gaudineau , Jean Guerard , Denis Janiaud , Raphaël Levy
IPC分类号： G01K11/22 , G01K11/26 , G01K3/10 , G01K7/32 , G01P15/097 , G01C19/5656 , G01H13/00
CPC分类号： G01K11/26 , G01C19/5656 , G01H13/00 , G01K3/10 , G01K7/32 , G01P15/097
摘要： The invention is a device for measuring the temperature of the vibrating beam of a vibrating-beam sensor. It comprises a resonator (10) vibrating in torsion in resonant mode and exhibiting a torsional vibration node (N), said node being its zone of fixing in the vicinity of the middle of the length (L3) of the vibrating beam, said fixing allowing thermal transfers between the resonator and the beam. The frequency of the resonator and the variations of this frequency are representative respectively of the mean temperature T of the beam and of the variations of this temperature T, the effects of which may be compensated by a model.
摘要翻译：本发明是用于测量振动束传感器的振动束的温度的装置。它包括在谐振模式下以扭转振动并呈现扭转振动节点（N）的谐振器（10），所述节点是其在振动梁的长度（L3）的中间附近固定的区域，所述固定允许谐振器和光束之间的热传递。谐振器的频率和该频率的变化分别代表光束的平均温度T和该温度T的变化，其影响可以通过模型来补偿。

10. 发明授权

US09316665B2 Estimation of sidewall skew angles of a structure 有权
标题翻译：一种结构侧壁倾斜角的估计
公开(公告)号：US09316665B2
公开(公告)日：2016-04-19
申请号：US13867720
申请日：2013-04-22
申请人： FREESCALE SEMICONDUCTOR, INC.
发明人： Aaron A. Geisberger , Kemiao Jia
IPC分类号： G01N3/20 , G01P15/08 , G01C19/5656 , G01C19/5663 , G01C25/00 , G01B5/24 , B81C99/00
CPC分类号： G01P15/0888 , B81C99/004 , B81C2201/0132 , G01B5/24 , G01C19/5656 , G01C19/5663 , G01C25/005
摘要： An apparatus (36) includes a motion amplification structure (52), an actuator (54), and a sense electrode (50) in proximity to the structure (52). The actuator (54) induces an axial force (88) upon the structure (52), which causes a relatively large amount of in-plane motion (108) in one or more beams (58, 60) of the structure (52). When sidewalls (98) of the beams (58, 60) exhibit a skew angle (28), the in-plane motion (108) of the beams (58, 60) produces out-of-plane motion (110) of a paddle element (62) connected to the end of the beams (58, 60). The skew angle (28), which results from an etch process, defines a degree to which the sidewalls (98) of beams (58, 60) are offset or tilted from their design orientation. The out-of-plane motion (110) of element (62) is sensed at the electrode (50), and is utilized to determine an estimated skew angle (126).
摘要翻译：装置（36）包括靠近结构（52）的运动放大结构（52），致动器（54）和感测电极（50）。致动器（54）在结构（52）上引起轴向力（88），其在结构（52）的一个或多个梁（58,60）中引起相对大量的平面内运动（108）。当梁（58,60）的侧壁（98）呈现偏斜角（28）时，梁（58,60）的平面内运动（108）产生桨叶的平面外运动（110）元件（62）连接到梁（58,60）的端部。由蚀刻工艺产生的偏斜角（28）限定了梁（58,60）的侧壁（98）从其设计取向偏移或倾斜的程度。在电极（50）处感测元件（62）的平面外运动（110），并用于确定估计的倾斜角（126）。

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