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    • 1. 发明授权
    • Semiconductor device and display device
    • US11626037B2
    • 2023-04-11
    • US16634955
    • 2018-07-27
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei YamazakiYukinori ShimaMasami Jintyou
    • H01L29/786G09F9/30H01L51/50H01L27/32
    • A semiconductor device that can be highly integrated is provided.
      The semiconductor device includes a semiconductor layer, a first insulating layer, a second insulating layer, a third insulating layer, and a first conductive layer. The third insulating layer is positioned over the semiconductor layer and includes a first opening over the semiconductor layer. The first conductive layer is positioned over the semiconductor layer, the first insulating layer is positioned between the first conductive layer and the semiconductor layer, and the second insulating layer is provided in a position that is in contact with a side surface of the first opening, the semiconductor layer, and the first insulating layer. The semiconductor layer includes a first portion overlapping with the first insulating layer, a pair of second portions between which the first portion is sandwiched and which overlap with the second insulating layer, and a pair of third portions between which the first portion and the pair of second portions are sandwiched and which overlap with neither the first insulating layer nor the second insulating layer. The first portion has a smaller width than the first opening and has a thinner shape of the semiconductor layer than the second portions, and the second portions have a thinner shape of the semiconductor layer than the third portions.