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    • 5. 发明授权
    • Phase-change device, related manufacturing method, and related electronic device
    • 相变装置,相关制造方法及相关电子装置
    • US09419054B2
    • 2016-08-16
    • US14614099
    • 2015-02-04
    • Semiconductor Manufacturing International (Shanghai) Corporation
    • Ying LiYipeng ChanLei Wang
    • H01L45/00H01L27/24H01L21/306
    • H01L45/06H01L21/306H01L27/2436H01L45/144H01L45/16H01L45/1675
    • A method for manufacturing a phase-change device may include the following steps: preparing a substrate; preparing a first dielectric layer, which may be positioned on the substrate; preparing a first electrode, which may be positioned in the first dielectric layer; forming a phase-change material layer, which may overlap the first electrode; processing (e.g., etching) the phase-change material layer to form a phase-change member, which may be electrically connected to the first electrode; forming an etch-stop layer, which may overlap and/or cover the phase-change member; forming an intermediary layer, which may be positioned on the etch-stop layer; forming a second dielectric layer, which may be positioned on the intermediary layer; and forming a second electrode, which may extend through the second dielectric layer, the intermediary layer, and the etch-stop layer and may be electrically connected to the phase-change member.
    • 相变装置的制造方法可以包括以下步骤:准备基板; 制备可位于基底上的第一介电层; 制备可位于第一介电层中的第一电极; 形成可与第一电极重叠的相变材料层; 处理(例如蚀刻)相变材料层以形成可相互电连接的第一电极的相变元件; 形成可以重叠和/或覆盖相变构件的蚀刻停止层; 形成中间层,其可以位于蚀刻停止层上; 形成第二电介质层,其可以位于中间层上; 以及形成第二电极,其可以延伸穿过第二介电层,中间层和蚀刻停止层,并且可以电连接到相变元件。