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    • 2. 发明申请
    • UV LIGHT EMITTING DIODE AND METHOD OF FABRICATING THE SAME
    • 紫外线发光二极管及其制造方法
    • US20170033263A1
    • 2017-02-02
    • US15294563
    • 2016-10-14
    • Seoul Viosys Co., Ltd.
    • Ki Yon ParkJeong Hun HeoHwa Mok KimGun Woo Han
    • H01L33/32H01L33/06H01L33/00
    • H01L33/32H01L33/007H01L33/06
    • Exemplary embodiments provide a UV light emitting diode and a method of fabricating the same. The method of fabricating a UV light emitting diode includes growing a first n-type semiconductor layer including AlGaN, wherein growth of the first n-type semiconductor layer includes changing a growth pressure within a growth chamber and changing a flow rate of an n-type dopant source introduced into the growth chamber. A pressure change during growth of the first n-type semiconductor layer includes at least one cycle of a pressure increasing period and a pressure decreasing period over time, and change in flow rate of the n-type dopant source includes increasing the flow rate of the n-type dopant source in the form of at least one pulse. The UV light emitting diode fabricated by the method has excellent crystallinity.
    • 示例性实施例提供了一种UV发光二极管及其制造方法。 制造UV发光二极管的方法包括生长包括AlGaN的第一n型半导体层,其中第一n型半导体层的生长包括改变生长室内的生长压力并改变n型的流速 掺杂剂源引入生长室。 第一n型半导体层的生长期间的压力变化包括至少一个增压周期和随时间推移的压力降低周期,并且n型掺杂剂源的流量变化包括增加 n型掺杂剂源,其形式为至少一个脉冲。 通过该方法制造的UV发光二极管具有优异的结晶度。
    • 4. 发明申请
    • UV LIGHT EMITTING DIODE AND METHOD OF FABRICATING THE SAME
    • 紫外线发光二极管及其制造方法
    • US20160027964A1
    • 2016-01-28
    • US14810464
    • 2015-07-27
    • Seoul Viosys Co., Ltd.
    • Ki Yon ParkJeong Hun HeoHwa Mok KimGun Woo Han
    • H01L33/06H01L33/32H01L33/00
    • H01L33/32H01L33/007H01L33/06
    • Exemplary embodiments provide a UV light emitting diode and a method of fabricating the same. The method of fabricating a UV light emitting diode includes growing a first n-type semiconductor layer including AlGaN, wherein growth of the first n-type semiconductor layer includes changing a growth pressure within a growth chamber and changing a flow rate of an n-type dopant source introduced into the growth chamber. A pressure change during growth of the first n-type semiconductor layer includes at least one cycle of a pressure increasing period and a pressure decreasing period over time, and change in flow rate of the n-type dopant source includes increasing the flow rate of the n-type dopant source in the form of at least one pulse. The UV light emitting diode fabricated by the method has excellent crystallinity.
    • 示例性实施例提供了一种UV发光二极管及其制造方法。 制造UV发光二极管的方法包括生长包括AlGaN的第一n型半导体层,其中第一n型半导体层的生长包括改变生长室内的生长压力并改变n型的流速 掺杂剂源引入生长室。 第一n型半导体层的生长期间的压力变化包括至少一个增压周期和随时间推移的压力降低周期,并且n型掺杂剂源的流量变化包括增加 n型掺杂剂源,其形式为至少一个脉冲。 通过该方法制造的UV发光二极管具有优异的结晶度。