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    • 2. 发明授权
    • Electrical fuse structure and method of fabricating same
    • 电熔丝结构及其制造方法
    • US08609534B2
    • 2013-12-17
    • US12890941
    • 2010-09-27
    • Chih-Chao YangDavid V. HorakCharles W. Koburger, IIIShom Ponoth
    • Chih-Chao YangDavid V. HorakCharles W. Koburger, IIIShom Ponoth
    • H01L21/4763
    • H01L23/5256H01L21/76805H01L21/76807H01L21/76831H01L23/5226H01L2924/0002H01L2924/00
    • A high programming efficiency electrical fuse is provided utilizing a dual damascene structure located atop a metal layer. The dual damascene structure includes a patterned dielectric material having a line opening located above and connected to an underlying via opening. The via opening is located atop and is connected to the metal layer. The dual damascene structure also includes a conductive feature within the line opening and the via opening. Dielectric spacers are also present within the line opening and the via opening. The dielectric spacers are present on vertical sidewalls of the patterned dielectric material and separate the conductive feature from the patterned dielectric material. The presence of the dielectric spacers within the line opening and the via opening reduces the area in which the conductive feature is formed. As such, a high programming efficiency electrical fuse is provided in which space is saved.
    • 使用位于金属层顶部的双镶嵌结构来提供高编程效率电熔丝。 双镶嵌结构包括图案化电介质材料,其具有位于下面的通孔开口上方并连接到下面的通孔开口的线路开口。 通孔开口位于顶部并连接到金属层。 双镶嵌结构还包括线路开口和通孔开口内的导电特征。 电介质间隔物也存在于线路开口和通孔开口内。 介电间隔物存在于图案化电介质材料的垂直侧壁上,并将导电特征与图案化电介质材料分开。 在线路开口和通孔开口内的电介质间隔物的存在减少了形成导电特征的区域。 因此,提供了节省空间的高编程效率电熔丝。