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1. 发明授权

US08525993B2 Scatterometry measurement of asymmetric structures 有权
标题翻译：不对称结构的散射测量
公开(公告)号：US08525993B2
公开(公告)日：2013-09-03
申请号：US12696974
申请日：2010-01-29
申请人： Silvio J. Rabello , William A. McGahan , Jie Li , Yongdong Liu
发明人： Silvio J. Rabello , William A. McGahan , Jie Li , Yongdong Liu
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01B11/24 , G01B2210/56 , G01N2021/213 , G01N2021/214 , G03F7/70633
摘要： Asymmetry metrology is performed using at least a portion of Mueller matrix elements, including, e.g., the off-diagonal elements of the Mueller matrix. The Mueller matrix may be generated using, e.g., a spectroscopic or angle resolved ellipsometer that may include a rotating compensator. The Mueller matrix is analyzed by fitting at least a portion of the elements to Mueller matrix elements calculated using a rigorous electromagnetic model of the sample or by fitting the off-diagonal elements to a calibrated linear response. The use of the Mueller matrix elements in the asymmetry measurement permits, e.g., overlay analysis using in-chip devices thereby avoiding the need for special off-chip targets.
摘要翻译：使用Mueller矩阵元素的至少一部分（包括例如Mueller矩阵的非对角线元素）来执行不对称度量。可以使用例如可以包括旋转补偿器的分光镜或角度分辨椭圆偏振器来生成Mueller矩阵。通过将至少一部分元素装配到使用样品的严格电磁模型计算的Mueller矩阵元素或通过将非对角元素拟合到校准的线性响应来分析Mueller矩阵。在不对称测量中使用Mueller矩阵元件允许例如使用片上器件的覆盖分析，从而避免需要特殊的片外目标。

2. 发明申请

US20110080585A1 Scatterometry Measurement of Asymmetric Structures 有权
标题翻译：不对称结构的散射测量
公开(公告)号：US20110080585A1
公开(公告)日：2011-04-07
申请号：US12696974
申请日：2010-01-29
申请人： Silvio J. Rabello , William A. McGahan , Jie Li , Yongdong Liu
发明人： Silvio J. Rabello , William A. McGahan , Jie Li , Yongdong Liu
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01B11/24 , G01B2210/56 , G01N2021/213 , G01N2021/214 , G03F7/70633
摘要： Asymmetry metrology is performed using at least a portion of Mueller matrix elements, including, e.g., the off-diagonal elements of the Mueller matrix. The Mueller matrix may be generated using, e.g., a spectroscopic or angle resolved ellipsometer that may include a rotating compensator. The Mueller matrix is analyzed by fitting at least a portion of the elements to Mueller matrix elements calculated using a rigorous electromagnetic model of the sample or by fitting the off-diagonal elements to a calibrated linear response. The use of the Mueller matrix elements in the asymmetry measurement permits, e.g., overlay analysis using in-chip devices thereby avoiding the need for special off-chip targets.
摘要翻译：使用Mueller矩阵元素的至少一部分（包括例如Mueller矩阵的非对角线元素）来执行不对称度量。可以使用例如可以包括旋转补偿器的分光镜或角度分辨椭圆偏振器来生成Mueller矩阵。通过将至少一部分元素装配到使用样品的严格电磁模型计算的Mueller矩阵元素或通过将非对角元素拟合到校准的线性响应来分析Mueller矩阵。在不对称测量中使用Mueller矩阵元件允许例如使用片上器件的覆盖分析，从而避免需要特殊的片外目标。

3. 发明授权

US08170838B2 Simulating two-dimensional periodic patterns using compressed fourier space 有权
标题翻译：使用压缩傅立叶空间模拟二维周期模式
公开(公告)号：US08170838B2
公开(公告)日：2012-05-01
申请号：US12430805
申请日：2009-04-27
申请人： Silvio J. Rabello , William A. McGahan , Jie Li
发明人： Silvio J. Rabello , William A. McGahan , Jie Li
IPC分类号： H03F1/26 , G06F15/00
CPC分类号： G06F17/5018
摘要： The process of modeling a complex two-dimensional periodic structure is improved by selectively truncating the Fourier expansion used in the calculation of resulting scatter signature from the model. The Fourier expansion is selectively truncated by determining the contribution for each harmonic order in the Fourier transform of the permittivity function and retaining the harmonic orders with a contribution that is above a threshold. The Fourier space may be compressed so that only the selected harmonic orders are used, thereby reducing the required memory and calculation times. The compressed Fourier space may be used in a real-time analysis of a sample or to generate a library that is used in the analysis of a sample.
摘要翻译：通过选择性地截断从模型计算得到的散射特征中使用的傅立叶展开，改善了对复杂二维周期结构进行建模的过程。通过确定介电常数函数的傅立叶变换中的每个谐波阶数的贡献并且保持具有高于阈值的贡献的谐波阶数来选择性地截断傅里叶展开。可以压缩傅里叶空间，使得仅使用所选择的谐波阶数，从而减少所需的存储和计算时间。压缩的傅立叶空间可以用于样本的实时分析或生成用于样本分析的文库。

4. 发明申请

US20100274521A1 Simulating Two-Dimensional Periodic Patterns Using Compressed Fourier Space 有权
标题翻译：使用压缩傅立叶空间模拟二维周期模式
公开(公告)号：US20100274521A1
公开(公告)日：2010-10-28
申请号：US12430805
申请日：2009-04-27
申请人： Silvio J. Rabello , William A. McGahan , Jie Li
发明人： Silvio J. Rabello , William A. McGahan , Jie Li
IPC分类号： G06F15/00
CPC分类号： G06F17/5018
摘要： The process of modeling a complex two-dimensional periodic structure is improved by selectively truncating the Fourier expansion used in the calculation of resulting scatter signature from the model. The Fourier expansion is selectively truncated by determining the contribution for each harmonic order in the Fourier transform of the permittivity function and retaining the harmonic orders with a contribution that is above a threshold. The Fourier space may be compressed so that only the selected harmonic orders are used, thereby reducing the required memory and calculation times. The compressed Fourier space may be used in a real-time analysis of a sample or to generate a library that is used in the analysis of a sample.
摘要翻译：通过选择性地截断从模型计算得到的散射特征中使用的傅立叶展开，改善了对复杂二维周期结构进行建模的过程。通过确定介电常数函数的傅立叶变换中的每个谐波阶数的贡献并且保持具有高于阈值的贡献的谐波阶数来选择性地截断傅里叶展开。可以压缩傅里叶空间，使得仅使用所选择的谐波阶数，从而减少所需的存储和计算时间。压缩的傅立叶空间可以用于样本的实时分析或生成用于样本分析的文库。

5. 发明授权

US09239523B2 Diffraction based overlay linearity testing 有权
$Diffraction based overlay linearity testing$
标题翻译：基于衍射的覆盖线性度测试
公开(公告)号：US09239523B2
公开(公告)日：2016-01-19
申请号：US13053584
申请日：2011-03-22
申请人： Jie Li , Zhuan Liu , Silvio J. Rabello , Nigel P. Smith
发明人： Jie Li , Zhuan Liu , Silvio J. Rabello , Nigel P. Smith
IPC分类号： G03F7/20
CPC分类号： G03F7/70633
摘要： An empirical diffraction based overlay (eDBO) measurement of an overlay error is produced using diffraction signals from a plurality of diffraction based alignment pads from an alignment target. The linearity of the overlay error is tested using the same diffraction signals or a different set of diffraction signals from diffraction based alignment pads. Wavelengths that do not have a linear response to overlay error may be excluded from the measurement error.
摘要翻译：使用来自对准靶的多个基于衍射的对准焊盘的衍射信号产生覆盖误差的经验衍射叠加（eDBO）测量。使用相同的衍射信号或来自基于衍射的对准焊盘的不同衍射信号集来测试覆盖误差的线性。不会对测量误差排除不具有重叠误差线性响应的波长。

6. 发明申请

US20110238365A1 Diffraction Based Overlay Linearity Testing 有权
$Diffraction Based Overlay Linearity Testing$
标题翻译：基于衍射的覆盖线性度测试
公开(公告)号：US20110238365A1
公开(公告)日：2011-09-29
申请号：US13053584
申请日：2011-03-22
申请人： Jie Li , Zhuan Liu , Silvio J. Rabello , Nigel P. Smith
发明人： Jie Li , Zhuan Liu , Silvio J. Rabello , Nigel P. Smith
IPC分类号： G06F15/00 , G01B11/00
CPC分类号： G03F7/70633
摘要： An empirical diffraction based overlay (eDBO) measurement of an overlay error is produced using diffraction signals from a plurality of diffraction based alignment pads from an alignment target. The linearity of the overlay error is tested using the same diffraction signals or a different set of diffraction signals from diffraction based alignment pads. Wavelengths that do not have a linear response to overlay error may be excluded from the measurement error.
摘要翻译：使用来自对准靶的多个基于衍射的对准焊盘的衍射信号产生覆盖误差的经验衍射叠加（eDBO）测量。使用相同的衍射信号或来自基于衍射的对准焊盘的不同衍射信号集来测试覆盖误差的线性。不会对测量误差排除不具有重叠误差线性响应的波长。

7. 发明授权

US10921882B1 Human-machine interaction method, system and apparatus for controlling an electronic device 有权
公开(公告)号：US10921882B1
公开(公告)日：2021-02-16
申请号：US16727069
申请日：2019-12-26
申请人： Jie Li
发明人： Jie Li , Yanghui Li
IPC分类号： G06F3/01 , G06F3/0346 , H04R1/10 , G06F3/038 , G06F3/16
摘要： A human-machine interaction method, system and apparatus of the present invention enables a user to interact with an electronic device by turning the user's head to implement a mouse's point-and-click functionality. A main characteristic is to detect the user's head rotation (moving direction, displacement and nod/shake one's head action) following the direction of eye watching by adding an angular velocity sensor in an earphone, so as to realize a more natural and convenient human-machine interaction, where you are watching is where the cursor will point, look-and-nod instead of point-and-click with mouse. With the supports of the virtual keyboard on the screen of the electronic device, information can be inputted. Combined with the earphone microphone sound input, it can realize more complicated control combination with head movement input and sound input; making use of the earphone sound output as user output, user input and user output are integrated in one.

8. 发明授权

US10494377B1 Bergenin lipoic acid ester with antioxidant activity and a method of preparing the same 有权
公开(公告)号：US10494377B1
公开(公告)日：2019-12-03
申请号：US16120403
申请日：2018-09-03
申请人： Bin Tian , Xingke Ju , Lei Tian , Jie Li , Songsong Ruan , Minyi Jia , Danni Tian , Han Li , Qianqian Zhao , Xuechuan Wang , Chengyuan Liang
发明人： Bin Tian , Xingke Ju , Lei Tian , Jie Li , Songsong Ruan , Minyi Jia , Danni Tian , Han Li , Qianqian Zhao , Xuechuan Wang , Chengyuan Liang
IPC分类号： C07D493/04
摘要： A compound having the formula (I): is disclosed. A method of preparing the compound of formula (I) is also disclosed.

9. 发明授权

US09975804B2 Continuous flow synthesis of VO2 nanoparticles or nanorods by using a microreactor 有权
公开(公告)号：US09975804B2
公开(公告)日：2018-05-22
申请号：US15487276
申请日：2017-04-13
申请人： Jie Li , Yugang Sun , Ralph T. Muehleisen , Leah B. Guzowski , Xiaojie Yan , Samuel Dull , Ioannina Castano
发明人： Jie Li , Yugang Sun , Ralph T. Muehleisen , Leah B. Guzowski , Xiaojie Yan , Samuel Dull , Ioannina Castano
IPC分类号： C03C4/02 , C03C1/02 , C03C1/10 , C03C3/04 , C03B25/02
CPC分类号： C03C4/02 , C01G31/02 , C01P2002/50 , C01P2002/52 , C01P2002/72 , C01P2004/16 , C01P2004/32 , C01P2004/54 , C01P2004/62 , C01P2004/64 , C01P2004/84 , C03B19/106 , C03B25/02 , C03B37/014 , C03B37/0753 , C03C1/02 , C03C1/10 , C03C3/04 , C03C17/007 , C03C2204/00 , C03C2217/452 , C03C2217/475 , C03C2217/485
摘要： The invention provides a method for producing composite nanoparticles, the method using a first compound capable of transitioning from a monoclinic to a tetragonal rutile crystal state upon heating, and having the steps of subjecting the first compound to a hydrothermal synthesis to create anisotropic crystals of the compound; encapsulating the first compound with a second compound to create a core-shell construct; and annealing the construct as needed. Also provided is a device for continuously synthesizing composite nanoparticles, the device having a first precursor supply and a second precursor supply; a mixer to homogeneously combine the first precursor and second precursor to create a liquor; a first microreactor to subject the liquor to hydrothermic conditions to create an\isotropic particles in a continuous operation mode; and a second microreactor for coating the particles with a third precursor to create a core-shell construct.

10. 发明授权

US09513768B2 Generation of depth images based upon light falloff 有权
标题翻译：基于光衰减生成深度图像
公开(公告)号：US09513768B2
公开(公告)日：2016-12-06
申请号：US13490457
申请日：2012-06-07
申请人： Chunshui Zhao , Jing Yan , Jiawei Gu , Feng-hsiung Hsu , Shaopeng Song , Mingjie Wang , Jie Li
发明人： Chunshui Zhao , Jing Yan , Jiawei Gu , Feng-hsiung Hsu , Shaopeng Song , Mingjie Wang , Jie Li
IPC分类号： H04N5/33 , H04N13/04 , G06F3/0482 , G06F3/01 , G06F3/0485 , G06T7/00 , G01B11/24 , G06K9/00 , H04N13/02
CPC分类号： G06F3/0482 , G01B11/24 , G06F3/017 , G06F3/0485 , G06K9/00355 , G06T7/55 , G06T2207/10016 , G06T2207/10021 , G06T2207/10048 , G06T2207/20221 , G06T2207/30196 , H04N13/254
摘要： Technologies pertaining to computing depth images of a scene that includes a mobile object based upon the principle of light falloff are described herein. An infrared image of a scene that includes a mobile object is captured, wherein the infrared image has a plurality of pixels having a respective plurality of intensity values. A depth image for the scene is computed based at least in part upon square roots of respective intensity values in the infrared image.
摘要翻译：本文描述了关于基于轻衰减原理计算包括移动对象的场景的深度图像的技术。捕获包括移动对象的场景的红外图像，其中所述红外图像具有具有相应多个强度值的多个像素。至少部分地基于红外图像中各个强度值的平方根计算场景的深度图像。

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