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1. 发明授权

US08270058B1 Coherence length controller 有权
标题翻译：相干长度控制器
公开(公告)号：US08270058B1
公开(公告)日：2012-09-18
申请号：US13277835
申请日：2011-10-20
申请人： Steven Edward Muenter , Todd Harding Tomkinson
发明人： Steven Edward Muenter , Todd Harding Tomkinson
IPC分类号： G02B26/00 , A61B3/00 , G01B9/02 , G02F1/01
CPC分类号： G01B9/0209 , G01B9/02009
摘要： Techniques for producing higher fidelity interferometer measurements by reducing sensitivity to spurious sources include reducing the coherence length of an electromagnetic beam. In addition, multiple surfaces within an optical system may be measured by electronically tuning the position of a coherence plane along the optical paths of an interferometer. A phase modulator is used in conjunction with a long coherence length electromagnetic source to generate beams for each leg of an interferometer. Providing a controlled broadband RF signal to the phase modulator increases the bandwidth of the beam and thereby reduces the coherence length of the beam. This reduces the spurious contributions to the output interference fringes from undesired surfaces along the beam path.
摘要翻译：通过降低对杂散源的灵敏度来产生更高保真干涉仪测量的技术包括降低电磁波束的相干长度。此外，光学系统中的多个表面可以通过电子调谐沿着干涉仪的光路的相干平面的位置来测量。相位调制器与长相干长度电磁源结合使用，以产生干涉仪每个支路的光束。向相位调制器提供受控的宽带RF信号增加了光束的带宽，从而降低了光束的相干长度。这减少了对沿着光束路径的不期望的表面的输出干涉条纹的杂散贡献。

2. 发明授权

US08045251B2 Coherence length controller 有权
标题翻译：相干长度控制器
公开(公告)号：US08045251B2
公开(公告)日：2011-10-25
申请号：US11951399
申请日：2007-12-06
申请人： Steven Edward Muenter , Todd Harding Tomkinson
发明人： Steven Edward Muenter , Todd Harding Tomkinson
IPC分类号： G02B26/00 , A61B3/00 , G01B9/02 , G02F1/01
CPC分类号： G01B9/0209 , G01B9/02009
摘要： Techniques for producing higher fidelity interferometer measurements by reducing sensitivity to spurious sources include reducing the coherence length of an electromagnetic beam. In addition, multiple surfaces within an optical system may be measured by electronically tuning the position of a coherence plane along the optical paths of an interferometer. A phase modulator is used in conjunction with a long coherence length electromagnetic source to generate beams for each leg of an interferometer. Providing a controlled broadband RF signal to the phase modulator increases the bandwidth of the beam and thereby reduces the coherence length of the beam. This reduces the spurious contributions to the output interference fringes from undesired surfaces along the beam path.
摘要翻译：通过降低对杂散源的灵敏度来产生更高保真干涉仪测量的技术包括降低电磁波束的相干长度。此外，光学系统中的多个表面可以通过电子调谐沿着干涉仪的光路的相干平面的位置来测量。相位调制器与长相干长度电磁源结合使用，以产生干涉仪每个支路的光束。向相位调制器提供受控的宽带RF信号增加了光束的带宽，从而降低了光束的相干长度。这减少了对沿着光束路径的不期望的表面的输出干涉条纹的杂散贡献。

3. 发明申请

US20090147341A1 Coherence Length Controller 有权
标题翻译：相干长度控制器
公开(公告)号：US20090147341A1
公开(公告)日：2009-06-11
申请号：US11951399
申请日：2007-12-06
申请人： Steven Edward Muenter , Todd Harding Tomkinson
发明人： Steven Edward Muenter , Todd Harding Tomkinson
IPC分类号： G02F1/01
CPC分类号： G01B9/0209 , G01B9/02009
摘要： Techniques for producing higher fidelity interferometer measurements by reducing sensitivity to spurious sources include reducing the coherence length of an electromagnetic beam. In addition, multiple surfaces within an optical system may be measured by electronically tuning the position of a coherence plane along the optical paths of an interferometer. A phase modulator is used in conjunction with a long coherence length electromagnetic source to generate beams for each leg of an interferometer. Providing a controlled broadband RF signal to the phase modulator increases the bandwidth of the beam and thereby reduces the coherence length of the beam. This reduces the spurious contributions to the output interference fringes from undesired surfaces along the beam path.
摘要翻译：通过降低对杂散源的灵敏度来产生更高保真干涉仪测量的技术包括降低电磁波束的相干长度。此外，光学系统中的多个表面可以通过电子调谐沿着干涉仪的光路的相干平面的位置来测量。相位调制器与长相干长度电磁源结合使用，以产生干涉仪每个支路的光束。向相位调制器提供受控的宽带RF信号增加了光束的带宽，从而降低了光束的相干长度。这减少了对沿着光束路径的不期望的表面的输出干涉条纹的杂散贡献。

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