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1. 发明授权

US09157802B2 System for real-time analysis of material distribution in CIGS thin film using laser-induced breakdown spectroscopy 有权
标题翻译：使用激光诱导击穿光谱法实时分析CIGS薄膜中材料分布的系统
公开(公告)号：US09157802B2
公开(公告)日：2015-10-13
申请号：US13325840
申请日：2011-12-14
申请人： Sungho Jeong , Seokhee Lee , Hee-Sang Shim
发明人： Sungho Jeong , Seokhee Lee , Hee-Sang Shim
IPC分类号： G01J3/443 , G01N21/71
CPC分类号： G01J3/443 , G01N21/718
摘要： The present invention relates to a process control system which can measure the physical properties of a CIGS thin film in real-time in a continuous production line of a CIGS thin film solar cell, more specifically to a system for real-time analysis of material distribution of a CIGS thin film comprising: a header, which comprises a laser irradiation unit producing plasma from the CIGS thin film by irradiating a laser beam to a part of the CIGS thin film; and a spectrum detection optical unit detecting a spectrum generated from the plasma; a transfer unit, which transfers the header at the same rate and to the direction with the transfer rate and direction of the CIGS thin film; and a spectrum analysis unit, which analyzes the spectrum detected by the spectrum detection optical unit.
摘要翻译：本发明涉及一种能够在CIGS薄膜太阳能电池的连续生产线中实时测量CIGS薄膜的物理性能的工艺控制系统，更具体地涉及一种实时分析材料分布的系统包括：头部，其包括通过将激光束照射到CIGS薄膜的一部分而从CIGS薄膜产生等离子体的激光照射单元; 以及频谱检测光学单元，检测从等离子体产生的光谱; 传送单元，其以相同的速率传送头部并且传送到具有CIGS薄膜的传送速率和方向的方向; 以及分析由频谱检测光学单元检测到的频谱的频谱分析单元。

2. 发明授权

US08554353B2 Fabrication system of CIGS thin film solar cell equipped with real-time analysis facilities for profiling the elemental components of CIGS thin film using laser-induced breakdown spectroscopy 有权
标题翻译：配有CIGS薄膜太阳能电池的制造系统，配有实时分析设备，用于使用激光诱导击穿光谱分析CIGS薄膜的元素成分
公开(公告)号：US08554353B2
公开(公告)日：2013-10-08
申请号：US13326247
申请日：2011-12-14
申请人： Sungho Jeong , Seokhee Lee , Hee-Sang Shim
发明人： Sungho Jeong , Seokhee Lee , Hee-Sang Shim
IPC分类号： G06F19/00
CPC分类号： H01L31/03923 , G01N21/718 , H01L31/0322 , H01L31/0463 , Y02E10/541 , Y02P70/521
摘要： A fabrication processing system is used to produce copper indium gallium selenide (CuIn1-xGaxSe2 or CIGS) thin film solar cells, more particularly to a fabrication processing system CIGS of thin film solar cells, equipped with real-time analysis facilities for profiling the elemental components of CIGS thin film using laser-induced breakdown spectroscopy. The system provides a process control system for determining whether abnormalities are present or not by measuring a physical and chemical properties on a continuous production process lines of CIGS thin film solar cell in real time, and performs a production and quality management at the same time by providing a feedback to CIGS fabrication process.
摘要翻译：使用制造处理系统来生产铜铟镓硒（CuIn1-xGaxSe2或CIGS）薄膜太阳能电池，更具体地涉及一种薄膜太阳能电池的制造处理系统CIGS，其配备有用于对元素组分进行成型的实时分析设备的CIGS薄膜使用激光诱导击穿光谱法。该系统通过实时测量CIGS薄膜太阳能电池连续生产线上的物理化学性质，确定是否存在异常情况的过程控制系统，同时进行生产和质量管理向CIGS制造工艺提供反馈。

3. 发明申请

US20130153552A1 SCRIBING APPARATUS AND METHOD FOR HAVING ANALYSIS FUNCTION OF MATERIAL DISTRIBUTION 审中-公开
标题翻译：具有材料分布分析功能的筛选装置和方法
公开(公告)号：US20130153552A1
公开(公告)日：2013-06-20
申请号：US13325578
申请日：2011-12-14
申请人： Sungho JEONG , Seokhee Lee , Hee-Sang Shim
发明人： Sungho JEONG , Seokhee Lee , Hee-Sang Shim
IPC分类号： B23K26/36 , B23K26/40
CPC分类号： B23K26/032 , B23K26/364
摘要： A scribing apparatus having a function to analyze distribution of a material forming a semiconductor or solar cell in real-time in a process producing the semiconductor or solar cell of is disclosed. The scribing apparatus having the analysis function of material distribution comprises: a laser irradiation unit, which conducts scribing by irradiating laser to a position to be scribed of an analysis subject; a spectrum detection optical unit, which detects a spectrum generated from plasma, which is produced by the irradiated laser; a spectrum information storage, which stores spectrum state information of each material forming the analysis subject; and a spectrum analysis unit, which analyzes distribution state information of the material by comparing the spectrum state information and the detected spectrum.
摘要翻译：公开了一种在制造半导体或太阳能电池的过程中实时分析形成半导体或太阳能电池的材料的分布的功能的划线装置。具有材料分布分析功能的划线装置包括：激光照射单元，其通过将激光照射到待分析对象的位置进行划线; 光谱检测光学单元，其检测由照射的激光产生的等离子体产生的光谱; 频谱信息存储器，其存储形成分析对象的各种材料的频谱状态信息; 以及频谱分析单元，其通过比较频谱状态信息和检测到的频谱来分析材料的分布状态信息。

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