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    • 5. 发明申请
    • ROLLED FILM FORMATION APPARATUS
    • 滚镀膜成型设备
    • US20150083043A1
    • 2015-03-26
    • US14556608
    • 2014-12-01
    • TOPPAN PRINTING CO., LTD.
    • Yasuhiro SASAKIMitsuru Kano
    • B05B13/02B65H20/02
    • B05B13/0221B65H20/02B65H2301/51145C23C14/562C23C16/45551C23C16/545
    • A rolled film formation apparatus including a first chamber in which a first precursor is applied to a substrate, a second chamber in which a second precursor is applied to the substrate such that the first and second precursors react with each other and that an atomic layer is deposited on the substrate, a third chamber in which a purge gas is applied to the substrate, and conveyance roller pairs which are positioned in the first, second and third chambers, and convey the substrate. Each conveyance roller pair includes a first roller and a second roller which sandwich the substrate in a thickness direction of the substrate. At least one of the first and second rollers has an outer peripheral surface having a surface unevenness. The substrate is moved back and forth among the first, second and third chambers. The atomic layer is deposited more than once on the substrate.
    • 一种轧制成膜装置,包括:第一室,其中将第一前体施加到基板;第二室,其中将第二前体施加到所述基板,使得所述第一和第二前体彼此反应,并且原子层为 沉积在基板上的第三室,其中向基板施加吹扫气体,以及传送辊对,其定位在第一,第二和第三室中并传送基板。 每个输送辊对包括在基板的厚度方向夹着基板的第一辊和第二辊。 第一和第二辊中的至少一个具有表面凹凸的外周面。 基板在第一,第二和第三室之间来回移动。 原子层在衬底上沉积不止一次。