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1. 发明授权

US07772747B2 Process for producing a piezoelectric film, film forming apparatus, and piezoelectric film 有权
标题翻译：制造压电薄膜，成膜装置和压电薄膜的方法
公开(公告)号：US07772747B2
公开(公告)日：2010-08-10
申请号：US12409185
申请日：2009-03-23
申请人： Takamichi Fujii , Ryuji Tsukamoto
发明人： Takamichi Fujii , Ryuji Tsukamoto
IPC分类号： H01L41/22 , H05B6/00
CPC分类号： H01L41/257 , C23C14/088 , C23C14/34 , C23C14/3442 , C23C14/345 , H01L41/316 , Y10T29/42
摘要： A piezoelectric film is formed on a substrate by a sputtering technique at a film formation temperature higher than a Curie temperature. An electric field is formed across the piezoelectric film in a direction heading from a surface side of the piezoelectric film toward the substrate side before a temperature of the piezoelectric film having been formed falls to a temperature lower than the Curie temperature, polarization processing being caused to begin by the formation of the electric field across the piezoelectric film. The temperature of the piezoelectric film is allowed to fall to a temperature lower than the Curie temperature in the state in which the electric field is being formed.
摘要翻译：通过溅射技术在高于居里温度的成膜温度下在基板上形成压电膜。在形成压电膜的温度下降到低于居里温度的温度之前，在压电膜的从压电膜的表面侧朝向基板侧的方向上形成电场，使偏振处理首先是形成跨越压电薄膜的电场。在形成电场的状态下，使压电膜的温度下降到低于居里温度的温度。

2. 发明授权

US10675865B2 Liquid discharge apparatus 有权
公开(公告)号：US10675865B2
公开(公告)日：2020-06-09
申请号：US16365872
申请日：2019-03-27
申请人： Ryuji Tsukamoto
发明人： Ryuji Tsukamoto
IPC分类号： B41J2/045 , B41J2/14 , B41J2/175
摘要： A liquid discharge apparatus includes a liquid discharge head including a nozzle plate including at least one nozzle configured to discharge liquid; at least one individual liquid chamber respectively communicating with the at least one nozzle; at least one individual supply channel respectively communicating with the at least one individual liquid chamber; and at least one individual collecting channel respectively communicating with the at least one individual liquid chamber. The apparatus further includes circuitry configured to store, in a memory, a backflow-inducing discharge amount at which the liquid in the individual collecting channel flows in a reverse direction toward the individual liquid chamber, in response to discharge of the liquid from the nozzle; and set a discharge amount from the nozzle equal to or greater than the backflow-inducing discharge amount, to cause the liquid to flow in the reverse direction in the individual collecting channel.

3. 发明授权

US07765659B2 Method of manufacturing a liquid ejection head 失效
标题翻译：液体喷射头的制造方法
公开(公告)号：US07765659B2
公开(公告)日：2010-08-03
申请号：US11364082
申请日：2006-03-01
申请人： Ryuji Tsukamoto
发明人： Ryuji Tsukamoto
IPC分类号： H04R17/00 , B21D53/76
CPC分类号： B41J2/1623 , B41J2/161 , B41J2/1642 , B41J2/1646 , B41J2002/14459 , Y10T29/42 , Y10T29/49126 , Y10T29/49401
摘要： A method of manufacturing a liquid ejection head includes a pressure chamber forming step of forming at least one of recess sections and through holes corresponding at least to the pressure chambers, in a plurality of calcined bodies obtained by calcining a plurality of ceramic green sheets; a piezoelectric body forming step of forming a plurality of films of piezoelectric bodies which constitute the piezoelectric elements by means of an aerosol deposition method, onto the calcined body corresponding to the diaphragm, of the plurality of calcined bodies; a laminating step of forming glass layers onto surfaces of the calcined bodies and arranging the calcined bodies to overlap each other; and a heating step of heating the arranged calcined bodies to a prescribed temperature, and simultaneously performing glass bonding of the calcined bodies and annealing of the piezoelectric bodies.
摘要翻译：一种制造液体喷射头的方法包括：在通过煅烧多个陶瓷生坯而获得的多个煅烧体中形成至少一个至少一个对应于压力室的凹部和通孔的压力室形成步骤; 压电体形成步骤，通过气溶胶沉积法将构成所述压电元件的压电体的多个膜形成在所述多个煅烧体的对应于所述隔膜的煅烧体上; 将煅烧体的表面形成玻璃层并使煅烧体重叠的层叠工序; 以及将排列的煅烧体加热到规定温度的加热工序，同时进行煅烧体的玻璃接合和压电体的退火。

4. 发明授权

US08382257B2 Piezoelectric actuator, method of manufacturing piezoelectric actuator, liquid ejection head, method of manufacturing liquid ejection head and image forming apparatus 有权
标题翻译：压电致动器，制造压电致动器的方法，液体喷射头，液体喷射头的制造方法和成像设备
公开(公告)号：US08382257B2
公开(公告)日：2013-02-26
申请号：US12726169
申请日：2010-03-17
申请人： Ryuji Tsukamoto
发明人： Ryuji Tsukamoto
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1646 , B41J11/0005 , B41J11/002 , B41J11/007 , B41J11/0085 , B41J15/04 , B41J29/38 , B41J29/393 , H01L41/047 , H01L41/0973 , H01L41/257 , H01L41/314 , Y10T29/42 , Y10T29/49401
摘要： A piezoelectric actuator includes: a piezoelectric layer formed by a film formation method so as to have orientation in a prescribed orientation direction; and a pair of electrodes, disposed on a same surface which is substantially perpendicular to the orientation direction of the piezoelectric layer, for applying to the piezoelectric layer an electric field in a direction substantially perpendicular to the orientation direction.
摘要翻译：压电致动器包括：通过成膜方法形成的压电层，以便在规定的取向方向上具有取向; 以及一对电极，其设置在与压电层的取向方向大致垂直的同一表面上，用于向基本上垂直于取向方向的方向施加电压。

5. 发明授权

US08252365B2 Method of manufacturing piezoelectric element and method of manufacturing liquid ejection head 有权
标题翻译：制造压电元件的方法和制造液体喷射头的方法
公开(公告)号：US08252365B2
公开(公告)日：2012-08-28
申请号：US12057151
申请日：2008-03-27
申请人： Ryuji Tsukamoto
发明人： Ryuji Tsukamoto
IPC分类号： B41J2/16 , B41J2/04
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1642 , B41J2/1646 , B41J2002/14459 , B41J2202/20 , H01L41/257 , H01L41/314
摘要： The method of manufacturing a piezoelectric element includes the steps of: a lower electrode forming step of forming a lower electrode on a surface of a substrate; a piezoelectric film deposition step of depositing a piezoelectric film made of a piezoelectric material by one of epitaxial growth and oriented growth onto a surface of the lower electrode reverse to a surface adjacent to the substrate; an upper electrode forming step of forming an upper electrode onto a surface of the piezoelectric film reverse to a surface adjacent to the lower electrode; and a polarization direction reversal step of reversing a polarization direction of the piezoelectric film by applying an alternating electric field of an intensity not lower than a coercive electric field of the piezoelectric material, between the upper electrode and the lower electrode, and then applying a direct electric field of an intensity not lower than the coercive electric field in a direction from the upper electrode toward the lower electrode.
摘要翻译：制造压电元件的方法包括以下步骤：在基板的表面上形成下电极的下电极形成步骤; 压电膜沉积步骤，通过外延生长和定向生长之一将由压电材料制成的压电膜沉积到与所述衬底相邻的表面的所述下电极的表面上; 上电极形成步骤，在与所述下电极相邻的表面相反的方向上在所述压电薄膜的表面上形成上电极; 以及偏振方向反转步骤，通过在上部电极和下部电极之间施加不低于压电材料的矫顽电场的强度的交变电场来反转压电膜的偏振方向，然后施加直接在从上电极向下电极的方向上强度不低于矫顽电场的电场。

6. 发明授权

US08266773B2 Method of manufacturing a piezoelectric actuator 有权
标题翻译：制造压电致动器的方法
公开(公告)号：US08266773B2
公开(公告)日：2012-09-18
申请号：US12568397
申请日：2009-09-28
申请人： Ryuji Tsukamoto
发明人： Ryuji Tsukamoto
IPC分类号： H04R17/10 , H01L41/24
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1632 , B41J2/1639 , B41J2/1642 , B41J2/1646 , H01L41/257 , H01L41/337 , Y10T29/42 , Y10T29/49155
摘要： A method of manufacturing a piezoelectric actuator includes a first polarization of a piezoelectric body; polishing the piezoelectric body; first heating step of heating the piezoelectric body to a temperature which is not lower than a Curie point of the piezoelectric body and performing a re-polarization of the piezoelectric body in a second polarization of the piezoelectric body having been heated in the first heating step.
摘要翻译：一种制造压电致动器的方法包括：压电体的第一极化; 抛光压电体; 第一加热步骤，其将压电体加热到不低于压电体的居里点的温度，并且在第一加热步骤中被加热的压电体的第二极化中进行压电体的再极化。

7. 发明授权

US07963637B2 Method of driving piezoelectric actuator and liquid ejection apparatus 有权
标题翻译：驱动压电致动器和液体喷射装置的方法
公开(公告)号：US07963637B2
公开(公告)日：2011-06-21
申请号：US12265576
申请日：2008-11-05
申请人： Ryuji Tsukamoto
发明人： Ryuji Tsukamoto
IPC分类号： B41J2/045 , H01L41/00
CPC分类号： B41J2/155 , B41J2/04581 , B41J2/04588 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1646 , B41J2002/14491 , H01L41/042
摘要： A method of driving a piezoelectric actuator which is constituted of a lower electrode film, a piezoelectric film and an upper electrode film that are layered successively onto a diaphragm, includes the step of: applying an electric field to the piezoelectric film in a direction opposite to the orientation direction of the piezoelectric film while continuously changing an intensity of the electric field from a first electric field intensity to a second electric field intensity, the first electric field intensity being smaller than a coercive electric field of the piezoelectric film, the second electric field intensity being larger than the coercive electric field of the piezoelectric film. The piezoelectric film is oriented in the orientation direction from the lower electrode film toward the upper electrode film.
摘要翻译：驱动由连续层叠在隔膜上的下电极膜，压电膜和上电极膜构成的压电致动器的方法包括以下步骤：向与压电膜相反的方向施加电场在将电场强度从第一电场强度连续变化到第二电场强度的同时，压电膜的取向方向，第一电场强度小于压电膜的矫顽电场，第二电场强度大于压电膜的矫顽电场。压电膜从下电极膜向上电极膜的取向方向取向。

8. 发明申请

US20100238216A1 Piezoelectric Actuator, Method Of Manufacturing Piezoelectric Actuator, Liquid Ejection Head, Method Of Manufacturing Liquid Ejection Head And Image Forming Apparatus 有权
标题翻译：压电致动器，制造压电致动器的方法，液体喷射头，制造液体喷射头和成像装置的方法
公开(公告)号：US20100238216A1
公开(公告)日：2010-09-23
申请号：US12726169
申请日：2010-03-17
申请人： Ryuji Tsukamoto
发明人： Ryuji Tsukamoto
IPC分类号： B41J2/045 , H01L41/22 , B41J2/16 , B21D53/76 , H01L41/04 , B41J29/38
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1646 , B41J11/0005 , B41J11/002 , B41J11/007 , B41J11/0085 , B41J15/04 , B41J29/38 , B41J29/393 , H01L41/047 , H01L41/0973 , H01L41/257 , H01L41/314 , Y10T29/42 , Y10T29/49401
摘要： A piezoelectric actuator includes: a piezoelectric layer formed by a film formation method so as to have orientation in a prescribed orientation direction; and a pair of electrodes, disposed on a same surface which is substantially perpendicular to the orientation direction of the piezoelectric layer, for applying to the piezoelectric layer an electric field in a direction substantially perpendicular to the orientation direction.
摘要翻译：压电致动器包括：通过成膜方法形成的压电层，以便在规定的取向方向上具有取向; 以及一对电极，其设置在与压电层的取向方向大致垂直的同一表面上，用于向基本上垂直于取向方向的方向施加电压。

9. 发明申请

US20060186766A1 Piezoelectric actuator, droplet ejection apparatus, and manufacturing method thereof 有权
标题翻译：压电致动器，液滴喷射装置及其制造方法
公开(公告)号：US20060186766A1
公开(公告)日：2006-08-24
申请号：US11355154
申请日：2006-02-16
申请人： Ryuji Tsukamoto
发明人： Ryuji Tsukamoto
IPC分类号： H01L41/08
CPC分类号： B41J2/14233 , B41J2002/14459 , H01L41/047 , H01L41/0973
摘要： The piezoelectric actuator comprises: a plate-shaped piezoelectric body which has a portion polarized in a thickness direction of the piezoelectric body and a portion polarized in a direction oblique to the thickness direction; and a pair of electrodes which are disposed on opposite surfaces of the piezoelectric body facing each other in the thickness direction across the piezoelectric body, have plane-symmetrical portions and plane-asymmetrical portions in relation to the piezoelectric body, are used as polarization electrodes for polarizing the piezoelectric body so that the portion polarized in the thickness direction and the portion polarized in the direction oblique to the thickness direction are formed in the piezoelectric body, and are used as drive electrodes for inducing strain in the piezoelectric body.
摘要翻译：压电致动器包括：板状压电体，其具有在压电体的厚度方向上极化的部分和沿与厚度方向倾斜的方向偏振的部分; 并且一对电极设置在压电体的相对于压电体的厚度方向上彼此面对的相对表面上，具有相对于压电体的平面对称部分和平面不对称部分，用作极化电极使压电体偏振，使得在压电体中形成厚度方向偏振的部分和与厚度方向倾斜的方向偏振的部分，并且用作在压电体中引起应变的驱动电极。

10. 发明授权

US10029465B2 Liquid discharge head, liquid discharge device, and liquid discharge apparatus 有权
公开(公告)号：US10029465B2
公开(公告)日：2018-07-24
申请号：US15444927
申请日：2017-02-28
申请人： Ryuji Tsukamoto
发明人： Ryuji Tsukamoto
IPC分类号： B41J2/145 , B41J2/14
摘要： A liquid discharge head includes a plurality of nozzles, a plurality of individual liquid chambers, a plurality of liquid delivery channels, and a deformation unit. The plurality of nozzles discharges liquid. The plurality of individual liquid chambers is communicated with the plurality of nozzles. The plurality of liquid delivery channels is communicated with the plurality of individual liquid chambers. Each of the plurality of liquid delivery channels includes a channel portion at a partition wall between adjacent individual liquid chambers of the plurality of individual liquid chambers. The deformation unit deforms at least a portion of the channel portion.

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