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    • 2. 发明申请
    • PROCESS ENVIRONMENT VARIATION EVALUATION
    • 过程环境变化评估
    • US20070263472A1
    • 2007-11-15
    • US11382722
    • 2006-05-11
    • Brent AndersonEdward NowakNoah Zamdmer
    • Brent AndersonEdward NowakNoah Zamdmer
    • G11C8/00H01L21/8234H01L29/788H01L21/336
    • H01L22/34H01L2924/0002H01L2924/00
    • Structures and methods are disclosed for evaluating the effect of a process environment variation. A structure and related method are disclosed including a plurality of electrical structures arranged in a non-collinear fashion for determining a magnitude and direction of a process environment variation in the vicinity of the plurality of electrical structures. The plurality of structures may include a first polarity FET coupled to a second polarity FET, each of the first polarity FET and the second polarity FET are coupled to a first pad and a second pad such that the structure allows independent measurement of the first polarity FET and the second polarity FET using only the first and second pads. Alternatively, the electrical structures may include resistors, diodes or ring oscillators. Appropriate measurements of each electrical structure allow a gradient field including a magnitude and direction of the effect of a process environment variation to be determined.
    • 公开了用于评估过程环境变化的影响的结构和方法。 公开了一种结构和相关方法,其包括以非共线方式布置的多个电结构,用于确定多个电结构附近的工艺环境变化的大小和方向。 多个结构可以包括耦合到第二极性FET的第一极性FET,第一极性FET和第二极性FET中的每一个耦合到第一焊盘和第二焊盘,使得该结构允许独立测量第一极性FET 和仅使用第一和第二焊盘的第二极性FET。 或者,电气结构可以包括电阻器,二极管或环形振荡器。 每个电气结构的适当测量允许确定包括过程环境变化的影响的幅度和方向的梯度场。