专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08731701B2 Substrate treatment method and substrate treatment system 有权
标题翻译：底物处理方法和底物处理系统
公开(公告)号：US08731701B2
公开(公告)日：2014-05-20
申请号：US12733614
申请日：2008-08-21
申请人： Wataru Tsukinoki , Yuichi Yamamoto
发明人： Wataru Tsukinoki , Yuichi Yamamoto
IPC分类号： B65B69/00 , B65G61/00 , B65H1/00 , C23C16/00 , G03C5/00 , G06F7/00 , G06F19/00 , H01L21/677
CPC分类号： H01L21/67745 , H01L21/67276
摘要： After a cassette is mounted on a cassette mounting part, a control unit instructs a substrate treatment apparatus to start treatment on substrates in the cassette. Thereafter, the control unit indicates, to the substrate treatment apparatus, a cassette on the cassette mounting part to which a substrate is transferred at completion of the treatment. If the transfer destination cassette for the substrate at the completion of treatment has not been indicated when a number of remaining treatment steps for the substrate reaches a predetermined set number, an alarm is given from the substrate treatment apparatus. This alarm is sent from the substrate treatment apparatus to the control unit, and the control unit indicates a transfer destination cassette for the substrate.
摘要翻译：在盒式磁带安装在盒安装部件上之后，控制单元指示基板处理设备开始对盒中的基板进行处理。此后，控制单元在处理完成时向基板处理设备指示在盒安装部分上传送基板的盒。如果当基板的剩余处理步骤数达到预定的设定数量时，在处理完成时用于基板的转印目的地盒未被指示，则从基板处理装置发出报警。该报警从基板处理装置发送到控制单元，控制单元指示用于基板的转印目的地盒。

2. 发明授权

US08909364B2 Substrate processing system and substrate processing method 有权
标题翻译：基板加工系统和基板加工方法
公开(公告)号：US08909364B2
公开(公告)日：2014-12-09
申请号：US13114103
申请日：2011-05-24
申请人： Wataru Tsukinoki , Yuichi Yamamoto
发明人： Wataru Tsukinoki , Yuichi Yamamoto
IPC分类号： H01L21/67 , H01L21/677
CPC分类号： H01L21/67276 , H01L21/67745 , H01L21/67778
摘要： Provided is a substrate processing system including a group controller which determines a combination of processing apparatuses having the shortest total processing time including the processing end time in a final processing apparatus, determines a predictable elapsed time up to a processing start time by a predetermined downstream processing apparatus for a wafer lot from a processing end time of the wafer lot by a predetermined processing apparatus in the combination of the processing apparatuses, and determines a timing of discharging the substrate to the predetermined processing apparatus or an upstream processing apparatus of the predetermined processing apparatus so that the predictable elapsed time is set within a predetermined time when the predictable elapsed time exceeds the predetermined time.
摘要翻译：提供了一种基板处理系统，其包括：组控制器，其确定在最终处理装置中包括处理结束时间的具有最短总处理时间的处理装置的组合，通过预定的下游处理确定直到处理开始时间的可预测经过时间在处理装置的组合中，通过预定的处理装置从晶片块的处理结束时间开始的晶片批次装置，并且确定将基板排出到预定处理装置或预定处理装置的上游处理装置的定时使得可预测的经过时间设定在可预测的经过时间超过预定时间的预定时间内。

3. 发明申请

US20100203434A1 SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM 有权
标题翻译：基板处理方法和基板处理系统
公开(公告)号：US20100203434A1
公开(公告)日：2010-08-12
申请号：US12733614
申请日：2008-08-21
申请人： Wataru Tsukinoki , Yuichi Yamamoto
发明人： Wataru Tsukinoki , Yuichi Yamamoto
IPC分类号： G03F7/20 , G03B27/42
CPC分类号： H01L21/67745 , H01L21/67276
摘要： After a cassette is mounted on a cassette mounting part, a control unit instructs a substrate treatment apparatus to start treatment on substrates in the cassette. Thereafter, the control unit indicates, to the substrate treatment apparatus, a cassette on the cassette mounting part to which a substrate is transferred at completion of the treatment. If the transfer destination cassette for the substrate at the completion of treatment has not been indicated when a number of remaining treatment steps for the substrate reaches a predetermined set number, an alarm is given from the substrate treatment apparatus. This alarm is sent from the substrate treatment apparatus to the control unit, and the control unit indicates a transfer destination cassette for the substrate.
摘要翻译：在盒式磁带安装在盒安装部件上之后，控制单元指示基板处理设备开始对盒中的基板进行处理。此后，控制单元在处理完成时向基板处理设备指示在盒安装部分上传送基板的盒。如果当基板的剩余处理步骤数达到预定的设定数量时，在处理完成时用于基板的转印目的地盒未被指示，则从基板处理装置发出报警。该报警从基板处理装置发送到控制单元，控制单元指示用于基板的转印目的地盒。

4. 发明授权

US08043039B2 Substrate treatment apparatus 有权
标题翻译：基板处理装置
公开(公告)号：US08043039B2
公开(公告)日：2011-10-25
申请号：US12207809
申请日：2008-09-10
申请人： Yuichi Yamamoto , Akihiro Teramoto , Wataru Tsukinoki
发明人： Yuichi Yamamoto , Akihiro Teramoto , Wataru Tsukinoki
IPC分类号： H01L21/677
CPC分类号： H01L21/67766 , H01L21/67775 , Y10S414/14
摘要： A substrate treatment apparatus is disclosed. The substrate treatment apparatus includes: a cassette loading portion on which a cassette for containing a substrate is loaded when the cassette is carried to/from outside of the substrate treatment apparatus; a substrate treatment portion for performing a treatment on the substrate; a substrate carrying portion for carrying the substrate in the cassette loaded on the cassette loading portion to the substrate treatment portion, and carrying the substrate that has been subjected to the treatment by the substrate treatment portion to the cassette on the cassette loading portion; a vacant cassette loading portion on which the cassette caused to be vacant by carrying the substrate to the substrate treatment portion is temporarily loaded; and a vacant cassette transfer mechanism for transferring the vacant cassette between the vacant cassette loading portion and the cassette loading portion.
摘要翻译：公开了一种基板处理装置。所述基板处理装置包括：盒装载部，当将所述盒搬运到所述基板处理装置的外部时，装载用于容纳基板的盒; 用于对所述基板进行处理的基板处理部; 用于将装载在所述盒装载部分上的所述盒中的所述基板运送到所述基板处理部分的基板承载部分，以及将已经被所述基板处理部分处理的所述基板运送到所述盒装载部分上的所述盒; 临时装载通过将基板运送到基板处理部而使盒空置的空置盒装载部; 以及用于在空的盒装载部分和盒装载部分之间传送空盒的空的盒传送机构。

5. 发明申请

US20090081009A1 SUBSTRATE TREATMENT APPARATUS 有权
标题翻译：基板处理设备
公开(公告)号：US20090081009A1
公开(公告)日：2009-03-26
申请号：US12207809
申请日：2008-09-10
申请人： Yuichi Yamamoto , Akihiro Teramoto , Wataru Tsukinoki
发明人： Yuichi Yamamoto , Akihiro Teramoto , Wataru Tsukinoki
IPC分类号： H01L21/677
CPC分类号： H01L21/67766 , H01L21/67775 , Y10S414/14
摘要： A substrate treatment apparatus is disclosed. The substrate treatment apparatus includes: a cassette loading portion on which a cassette for containing a substrate is loaded when the cassette is carried to/from outside of the substrate treatment apparatus; a substrate treatment portion for performing a treatment on the substrate; a substrate carrying portion for carrying the substrate in the cassette loaded on the cassette loading portion to the substrate treatment portion, and carrying the substrate that has been subjected to the treatment by the substrate treatment portion to the cassette on the cassette loading portion; a vacant cassette loading portion on which the cassette caused to be vacant by carrying the substrate to the substrate treatment portion is temporarily loaded; and a vacant cassette transfer mechanism for transferring the vacant cassette between the vacant cassette loading portion and the cassette loading portion.
摘要翻译：公开了一种基板处理装置。所述基板处理装置包括：盒装载部，当将所述盒搬运到所述基板处理装置的外部时，装载用于容纳基板的盒; 用于对所述基板进行处理的基板处理部; 用于将装载在所述盒装载部分上的所述盒中的所述基板运送到所述基板处理部分的基板承载部分，以及将已经被所述基板处理部分处理的所述基板运送到所述盒装载部分上的所述盒; 临时装载通过将基板运送到基板处理部而使盒空置的空置盒装载部; 以及用于在空的盒装载部分和盒装载部分之间传送空盒的空的盒传送机构。

6. 发明授权

US08818242B2 Image forming apparatus capable of performing rotational phase control of image bearing member 有权
标题翻译：能够进行图像承载部件的旋转相位控制的图像形成装置
公开(公告)号：US08818242B2
公开(公告)日：2014-08-26
申请号：US13193708
申请日：2011-07-29
申请人： Yuichi Yamamoto , Hajime Kaji
发明人： Yuichi Yamamoto , Hajime Kaji
IPC分类号： G03G15/00 , G03G15/01
CPC分类号： G03G15/0131 , G03G15/5008 , G03G2215/0129 , G03G2215/0158
摘要： An image forming apparatus capable of preventing degradation of image quality and reducing time required for rotational phase control. Toner images different in color are formed on a plurality of photosensitive drums, respectively. The toner images are transferred onto an intermediate transfer belt in superimposed relation. A motor controller performs phase control for bringing phases of the respective photosensitive drums into predetermined relation based on a rotational phase difference detected using phase detection sensors. When the rotational phase difference is out of a predetermined range, the motor controller performs the phase control with the photosensitive drums and the intermediate transfer belt separated from each other, whereas when the rotational phase difference is within the predetermined range, the motor controller performs the phase control with the photosensitive drums and the intermediate transfer belt in contact with each other.
摘要翻译：一种能够防止图像质量劣化并减少转动相位控制所需的时间的图像形成装置。分别在多个感光鼓上形成颜色不同的调色剂图像。调色剂图像以叠加的关系转印到中间转印带上。电动机控制器根据使用相位检测传感器检测到的旋转相位差，执行相位控制，以使各个感光鼓的相位达到预定的关系。当旋转相位差超出预定范围时，电动机控制器执行相互控制，其中感光鼓和中间转印带彼此分离，而当旋转相位差在预定范围内时，电动机控制器执行感光鼓和中间转印带彼此接触的相位控制。

7. 发明申请

US20130257567A1 ELECTROMAGNETIC CONTACTOR 有权
标题翻译：电磁接触器
公开(公告)号：US20130257567A1
公开(公告)日：2013-10-03
申请号：US13885094
申请日：2012-04-03
申请人： Kouetsu Takaya , Yasuhiro Naka , Kenji Suzuki , Yuichi Yamamoto , Yuji Shiba
发明人： Kouetsu Takaya , Yasuhiro Naka , Kenji Suzuki , Yuichi Yamamoto , Yuji Shiba
IPC分类号： H01H1/06
CPC分类号： H01H1/06 , H01H9/443 , H01H50/14 , H01H50/163 , H01H50/22 , H01H50/38 , H01H50/42 , H01H51/065 , H03K17/68
摘要： An electromagnetic contactor has a contact device having a pair of fixed contacts and a movable contact; and an electromagnet unit including an exciting coil driving a movable plunger connected through a connecting shaft. The contact device is configured such that L-shaped portions have a contact portion formed in the pair of fixed contacts fixed maintaining a predetermined interval, and two ends of the movable contact are disposed to be capable of contacting to and separating from the contact portions of the L-shaped portion on a side opposite to that of the electromagnet unit. The electromagnet unit includes a magnetic yoke enclosing a plunger drive portion, a movable plunger having a leading end protruding through an aperture formed in the magnetic yoke and urged by a return spring, and a ring-form permanent magnet magnetized in a movable direction of the movable plunger and fixed to enclose a peripheral flange portion.
摘要翻译：电磁接触器具有接触装置，该触点装置具有一对固定触头和可动触点; 以及包括驱动通过连接轴连接的活动柱塞的励磁线圈的电磁体单元。接触装置被构造成使得L形部分具有形成在一对固定触点中的接触部分，固定保持预定间隔，并且可动触头的两端设置成能够接触和分离接触部分的接触部分在与电磁体单元相反的一侧的L形部分。电磁体单元包括一个包围柱塞驱动部分的磁轭，一个可移动的柱塞，其前端通过形成在磁轭中的孔而突出，并由复位弹簧推动，以及沿着可移动方向被磁化的环形永磁体活动柱塞并固定以包围周边凸缘部分。

8. 发明授权

US08420486B2 Method for manufacturing semiconductor device 有权
标题翻译：制造半导体器件的方法
公开(公告)号：US08420486B2
公开(公告)日：2013-04-16
申请号：US12182322
申请日：2008-07-30
申请人： Yuichi Yamamoto
发明人： Yuichi Yamamoto
IPC分类号： H01L21/8234 , H01L21/338 , H01L21/336
CPC分类号： H01L21/823456 , H01L29/66545 , H01L29/7843
摘要： In the present invention, there is provided a method for manufacturing a semiconductor device that has on a semiconductor substrate first and second transistor groups having different operating voltages respectively, the first transistor group having a first gate electrode, the second transistor group having a second gate electrode, the method including the steps of: forming the silicide layer on the first gate electrode of the first transistor group after setting a height of the first gate electrode smaller than a height of a dummy gate electrode formed in a dummy gate part; and forming a gate forming trench by removing the dummy gate part after forming an interlayer insulating film that covers a silicide layer and planarizing a surface of the interlayer insulating film.
摘要翻译：在本发明中，提供了一种制造半导体器件的方法，该半导体器件在半导体衬底上具有分别具有不同工作电压的第一和第二晶体管组，第一晶体管组具有第一栅电极，第二晶体管组具有第二栅极电极，该方法包括以下步骤：在将第一栅电极的高度设置为比形成在虚拟栅极部分中的虚设栅电极的高度之后，在第一晶体管组的第一栅电极上形成硅化物层; 以及在形成覆盖硅化物层并平面化层间绝缘膜的表面的层间绝缘膜之后，通过去除伪栅极部分来形成栅极形成沟槽。

9. 发明授权

US08206076B2 Substrate processing system 有权
标题翻译：基板加工系统
公开(公告)号：US08206076B2
公开(公告)日：2012-06-26
申请号：US12137076
申请日：2008-06-11
申请人： Issei Ueda , Yasushi Hayashida , Akira Miyata , Kensei Yamamoto , Yuichi Yamamoto , Michiaki Matsushita
发明人： Issei Ueda , Yasushi Hayashida , Akira Miyata , Kensei Yamamoto , Yuichi Yamamoto , Michiaki Matsushita
IPC分类号： H01L21/677
CPC分类号： H01L21/67769 , Y10S414/139
摘要： A cassette waiting block is connected to a transfer in/out block of a coating and developing treatment system, and in the cassette waiting block, a cassette transfer in/out unit, a cassette waiting unit, a cassette delivery unit, and a substrate processing unit are provided. In the cassette waiting block, a cassette transfer unit for transferring the cassette between the cassette transfer in/out unit, the cassette waiting unit, and the cassette deliver unit, and a transfer unit for transferring the substrate between the cassette in the cassette waiting unit and the substrate processing unit are provided. Each cassette waiting unit has an opening mechanism for opening a port of the cassette.
摘要翻译：盒式等待块连接到涂覆和显影处理系统的转移输入/输出块，并且在盒式等待块中，盒式磁带传送入/出单元，盒式磁带等待单元，盒传送单元和基板处理提供单位。在盒式磁带等待块中，用于在磁带盒输入/输出单元，磁带盒等待单元和磁带盒传送单元之间传送磁带的盒式磁带传送单元，以及用于在盒式磁带等待单元中的盒之间传送基板的传送单元并提供基板处理单元。每个盒式待机单元具有用于打开盒的端口的打开机构。

10. 发明授权

US08155576B2 Sheet processing apparatus and image forming apparatus 失效
标题翻译：片材处理装置和图像形成装置
公开(公告)号：US08155576B2
公开(公告)日：2012-04-10
申请号：US12127367
申请日：2008-05-27
申请人： Daijiro Kato , Katsuaki Hirai , Takeshi Aoyama , Masahiro Funakoshi , Shoko Magata , Yuichi Yamamoto
发明人： Daijiro Kato , Katsuaki Hirai , Takeshi Aoyama , Masahiro Funakoshi , Shoko Magata , Yuichi Yamamoto
IPC分类号： G03G15/00 , B65H37/04
CPC分类号： B65H37/04 , B42C1/12 , B42C9/0006 , B65H2801/27 , Y10T156/10
摘要： The invention is to provide a miniaturized sheet processing apparatus in that a conveying length a conveying distance need not be increased even though the number of sheets per bundle increases. A glue applying bookbinder that partially glues sheets and performs a pressing process to form a sheet bundle. The glue applying bookbinder includes a processing tray that stacks sheets, a glue applying portion that applies a glue on the sheets on the processing tray, and pressing portions that press the sheets on the processing tray. The glue applying portion is arranged such that the glue applying portion can be moved from a first standby position outside the sheets stacked on the stacking portion to a second standby position, different from the first standby position, outside the sheets through an upper surface of the sheets, and the pressing portions are moved integrally with the glue applying portion.
摘要翻译：本发明是提供一种小型化的片材处理设备，其特征在于，即使每束的片材数量增加，输送距离也不需要增加。一种胶粘剂，用于部分地胶合片材并进行压制以形成片材束的粘合剂。胶水装订器包括堆叠纸张的处理托盘，在处理托盘上的纸张上施加胶水的胶水施加部分以及将片材压在处理托盘上的按压部分。胶水施加部分被布置成使得胶水施加部分可以从堆叠在堆叠部分上的片材之外的第一待机位置移动到与第一备用位置不同的第二备用位置，通过片材的上表面片材，并且按压部分与胶水部分一体地移动。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式