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1. 发明授权

US09786304B1 Method for providing heat assisted magnetic recording write apparatus having a near-field transducer with a sloped nose 有权
公开(公告)号：US09786304B1
公开(公告)日：2017-10-10
申请号：US15199540
申请日：2016-06-30
申请人： Western Digital (Fremont), LLC
发明人： Shawn M. Tanner , Mingjun Yu , Min Zheng , Kyung Lee , Tsung Yuan Chen
IPC分类号： B44C1/22 , G11B5/31 , G11B5/855 , C23C14/58 , G11B5/00
CPC分类号： C23C14/5873 , G11B5/3116 , G11B5/314 , G11B5/3163 , G11B5/6088 , G11B5/855 , G11B2005/0021
摘要： A method for fabricating a near-field transducer (NFT) for a heat assisted magnetic recording (HAMR) write apparatus is described. The HAMR write apparatus is coupled with a laser for providing energy and has a media-facing surface (MFS) configured to reside in proximity to a media during use. The method includes providing a stack on an underlayer. The stack includes an endpoint detection layer, an optical layer and an etchable layer. The optical layer is between the etchable and endpoint detection layers. The etchable layer is patterned to form a mask. A portion of the optical layer is removed. A remaining portion of the optical layer has a bevel at a bevel angle from the MFS location. The bevel angle is nonzero and acute. The NFT is provided such that the NFT has an NFT front surface adjoining the bevel and at the bevel angle from the MFS location.

2. 发明授权

US09508363B1 Method for fabricating a magnetic write pole having a leading edge bevel 有权
标题翻译：一种具有前缘斜面的磁性写入极的制造方法
公开(公告)号：US09508363B1
公开(公告)日：2016-11-29
申请号：US14307174
申请日：2014-06-17
申请人： Western Digital (Fremont), LLC
发明人： Mingjun Yu , Donghong Li , Lien-Chang Wang , Lieping Zhong , Tao Pan
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49043 , Y10T29/49052
摘要： A method provides a magnetic transducer having an air-bearing surface (ABS) location. An intermediate layer having a substantially flat bottom surface is provided. A trench is formed in the intermediate layer. The trench is wider in yoke region than in the pole tip region. The trench has a first depth in the yoke region and a second depth less than the first depth in the pole tip region. A portion of the intermediate layer is at the bottom of the trench at the ABS location. A nonmagnetic layer is provided. The nonmagnetic layer fills part of the trench in the pole tip region such that the trench has a third depth less than the second depth at the ABS location. A main pole is provided. The main pole has a leading bevel adjacent to nonmagnetic layer in the portion of the pole tip region of the trench.
摘要翻译：一种方法提供具有空气轴承表面（ABS）位置的磁换能器。提供具有基本平坦的底表面的中间层。在中间层中形成沟槽。磁轭区域的沟槽比磁极尖端区域宽。沟槽在磁轭区域中具有第一深度，而第二深度小于极尖区域中的第一深度。中间层的一部分在ABS位置处在沟槽的底部。提供非磁性层。非磁性层填充极尖区域中的沟槽的一部分，使得沟槽具有小于ABS位置处的第二深度的第三深度。提供主杆。主极在沟槽的极尖区域的部分中具有与非磁性层相邻的前导斜面。

3. 发明授权

US10106885B2 Heat assisted magnetic recording head having near-field transducer with a sloped nose 有权
公开(公告)号：US10106885B2
公开(公告)日：2018-10-23
申请号：US15703108
申请日：2017-09-13
申请人： WESTERN DIGITAL (FREMONT), LLC
发明人： Shawn M. Tanner , Mingjun Yu , Min Zheng , Kyung Lee , Tsung Yuan Chen
IPC分类号： G11B11/00 , C23C14/58 , G11B5/31 , G11B5/855 , G11B5/00 , G11B5/60
摘要： A magnetic write apparatus includes a pole and a near field transducer. The pole extends in a yoke direction from a media facing surface where the yoke direction extends perpendicular to the media facing surface. The near field transducer includes a near field transducer cap and a near field transducer nose. The near field transducer nose is separated from the pole by the near field transducer cap and a dielectric gap and the near field transducer nose comprises a bevel surface that forms a bevel angle with a plane extending in the yoke direction.

4. 发明申请

US20180005650A1 METHOD FOR PROVIDING HEAT ASSISTED MAGNETIC RECORDING WRITE APPARATUS HAVING A NEAR-FIELD TRANSDUCER WITH A SLOPED NOSE 审中-公开
公开(公告)号：US20180005650A1
公开(公告)日：2018-01-04
申请号：US15703108
申请日：2017-09-13
申请人： WESTERN DIGITAL (FREMONT), LLC
发明人： Shawn M. Tanner , Mingjun Yu , Min Zheng , Kyung Lee , Tsung Yuan Chen
IPC分类号： G11B5/31 , C23C14/58 , G11B5/855 , G11B5/00
CPC分类号： C23C14/5873 , G11B5/3116 , G11B5/314 , G11B5/3163 , G11B5/6088 , G11B5/855 , G11B2005/0021
摘要： A method for fabricating a near-field transducer (NFT) for a heat assisted magnetic recording (HAMR) write apparatus is described. The HAMR write apparatus is coupled with a laser for providing energy and has a media-facing surface (MFS) configured to reside in proximity to a media during use. The method includes providing a stack on an underlayer. The stack includes an endpoint detection layer, an optical layer and an etchable layer. The optical layer is between the etchable and endpoint detection layers. The etchable layer is patterned to form a mask. A portion of the optical layer is removed. A remaining portion of the optical layer has a bevel at a bevel angle from the MFS location. The bevel angle is nonzero and acute. The NFT is provided such that the NFT has an NFT front surface adjoining the bevel and at the bevel angle from the MFS location.

5. 发明授权

US09001467B1 Method for fabricating side shields in a magnetic writer 有权
标题翻译：在磁性写入器中制造侧面屏蔽的方法
公开(公告)号：US09001467B1
公开(公告)日：2015-04-07
申请号：US14300035
申请日：2014-06-09
申请人： Western Digital (Fremont), LLC
发明人： Xianzhong Zeng , Mingjun Yu , Hai Sun , Donghong Li
IPC分类号： G11B5/31 , G03F7/20 , G11B5/11
CPC分类号： G11B5/112 , G11B5/315 , G11B5/3163
摘要： A method and system provide a magnetic transducer having an air-bearing surface (ABS) location, a pole and a gap. The pole has a bottom and a top wider than the bottom. The gap is on the top of the pole and at least as wide as the top of the pole such that an overhang is formed between a top edge of the gap and a bottom edge of the bottom of the pole. The method includes providing a plurality of bottom antireflective coatings (BARCs). The plurality of BARCs form a BARC layer that fills the overhang. A shield photoresist mask is provided on at least a portion of the BARC layer. The shield, which includes at least one side shield, is provided.
摘要翻译：一种方法和系统提供具有空气轴承表面（ABS）位置，极和间隙的磁换能器。杆有底部，顶部宽于底部。间隙位于极的顶部，并且至少与极的顶部一样宽，使得在间隙的顶部边缘和极的底部底部边缘之间形成悬垂。该方法包括提供多个底部抗反射涂层（BARC）。多个BARC形成一个填充突出端的BARC层。在BARC层的至少一部分上提供屏蔽光刻胶掩模。提供包括至少一个侧屏蔽的屏蔽件。

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