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    • 5. 发明申请
    • METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法
    • US20120196429A1
    • 2012-08-02
    • US13349062
    • 2012-01-12
    • Tomoyuki TezukaMahito ShinoharaYasuhiro Kawabata
    • Tomoyuki TezukaMahito ShinoharaYasuhiro Kawabata
    • H01L21/266
    • H01L27/14643H01L21/2652H01L21/266H01L27/14689H01L29/78
    • A method of manufacturing a semiconductor device that includes a semiconductor substrate is provided. The method includes: exposing a photoresist coated on the semiconductor substrate using a photomask including a plurality of regions having different light transmittances; developing the photoresist to form a resist pattern including a plurality of regions having different thicknesses that depend on an exposure amount of the photoresist; and implanting impurity ions into the semiconductor substrate through the plurality of regions of the resist pattern having different thicknesses to form a plurality of impurity regions whose depths from a surface of the semiconductor substrate to peak positions are different from each other. The depths to the peak positions depend on the thickness of the resist pattern through which the implanted impurity ions pass.
    • 提供一种制造包括半导体衬底的半导体器件的方法。 该方法包括:使用包括具有不同光透射率的多个区域的光掩模曝光涂覆在半导体衬底上的光致抗蚀剂; 显影光致抗蚀剂以形成包括取决于光致抗蚀剂的曝光量的具有不同厚度的多个区域的抗蚀剂图案; 以及通过具有不同厚度的抗蚀剂图案的多个区域将杂质离子注入到半导体衬底中,以形成从半导体衬底的表面到峰值位置的深度彼此不同的多个杂质区域。 峰位置的深度取决于注入的杂质离子通过的抗蚀剂图案的厚度。
    • 8. 发明授权
    • Turbocharger control system
    • 涡轮增压器控制系统
    • US4512153A
    • 1985-04-23
    • US454170
    • 1982-12-28
    • Yasuhiro KawabataMotonobu Akagi
    • Yasuhiro KawabataMotonobu Akagi
    • F02B37/00F02B37/16F02B37/12
    • F02B37/16Y02T10/144
    • A turbocharger control system for a vehicle engine which includes a first air passage for supplying air to the vehicle engine, a throttle valve pivotally mounted in the first air passage, a turbocharger having a compressor and a turbine, the compressor being positioned within the first air passage upstream of the throttle valve, a second air passage for connecting a portion of the first passage downstream of the compressor and a portion of the first passage upstream of the compressor, a valve device positioned within the second air passage for relieving fluid pressure from the downstream portion of the first air passage to the upstream of the first air passage, a throttle sensor operatively associated with the throttle valve for detecting the operating position of the throttle valve and generating signals in response thereto and a computer connected to the valve for receiving the signals generated from the throttle sensor and for delivering the signals to the valve to operate the valve in response to the position of the throttle valve and acceleration of movement of the throttle valve.
    • 一种用于车辆发动机的涡轮增压器控制系统,其包括用于向车辆发动机供应空气的第一空气通道,枢转地安装在第一空气通道中的节气门,具有压缩机和涡轮机的涡轮增压器,所述压缩机定位在第一空气 在节流阀上游的通道,用于将压缩机下游的第一通道的一部分和压缩机上游的第一通道的一部分连接的第二空气通道,位于第二空气通道内的阀装置,用于将流体压力从 所述第一空气通道的下游部分到达所述第一空气通道的上游;节气门传感器,其与所述节流阀可操作地相关联,用于检测所述节流阀的操作位置并响应于所述节气门产生信号,以及连接到所述阀的计算机, 从节气门传感器产生的信号并将信号传送到阀门以操作阀门 响应于节流阀的位置和节流阀的运动加速。