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1. 发明授权

US08406918B2 Master teaching jig 有权
标题翻译：大师教具
公开(公告)号：US08406918B2
公开(公告)日：2013-03-26
申请号：US12643929
申请日：2009-12-21
申请人： Yi Chun Tan , Huat Seng Khor , Eang Keong Tan , Chun Beng Ang , Chay Hoon Tang
发明人： Yi Chun Tan , Huat Seng Khor , Eang Keong Tan , Chun Beng Ang , Chay Hoon Tang
IPC分类号： G06F7/00 , G06F17/00 , G05B21/00 , G01C17/38 , G01B5/28 , G01P11/00
CPC分类号： G11B5/851 , G11B7/266 , G11B17/22
摘要： A disk carrier for teaching disk positioning in a substrate changing system. The disk carrier composed of a panel having a disk opening configured to receive a disk and a plurality of beam sensors disposed around the disk opening to project beams parallel to a surface of the disk when secured within the disk opening. The plurality of beam sensors may be composed of at least one beam sensor on each of a front side and rear side of the panel.
摘要翻译：用于在基板更换系统中教导盘定位的盘载体。由具有构造成接收盘的盘开口的面板和围绕盘开口设置的多个光束传感器构成的盘载体，以在固定在盘开口内时平行于盘表面突出的光束。多个光束传感器可以由面板的前侧和后侧中的每一个上的至少一个光束传感器构成。

2. 发明授权

US08591709B1 Sputter deposition shield assembly to reduce cathode shorting 有权
标题翻译：溅射沉积屏蔽组件可减少阴极短路
公开(公告)号：US08591709B1
公开(公告)日：2013-11-26
申请号：US12782662
申请日：2010-05-18
申请人： Chichoy Lim , Eang Keong Tan , Weng Aun Teh , Yi Chun Tan , Sheik Chian Lee
发明人： Chichoy Lim , Eang Keong Tan , Weng Aun Teh , Yi Chun Tan , Sheik Chian Lee
IPC分类号： C23C14/04
CPC分类号： C23C14/0068 , C23C14/3407 , H01J37/3244 , H01J37/34 , H01J37/3411
摘要： A shield assembly for a sputter deposition chamber, the shield assembly including an outer sleeve with a gas inlet to conduct a gas through the outer sleeve and an inner sleeve disposed within the outer sleeve, the inner sleeve including gas channels on a surface mating with the outer sleeve to conduct the gas between the inner and outer sleeves. The shield assembly may further include an aperture ring adjacent to a first end of both the inner and outer sleeves, the aperture ring including a plurality of gas outlets to conduct the gas from the gas channels and an inner aperture flange extending from the plurality of gas outlets and adjacent to gas shield flange to form a gas runway for conducting the gas toward a sputter target located within the deposition chamber.
摘要翻译：一种用于溅射沉积室的屏蔽组件，所述屏蔽组件包括外部套筒，所述外部套筒具有气体入口以将气体导引通过所述外部套筒和设置在所述外部套筒内的内部套筒，所述内部套筒包括与所述外部套管配合的表面上的气体通道外套筒以在内套筒和外套筒之间传导气体。屏蔽组件还可以包括邻近内套筒和外套筒的第一端的孔环，孔环包括多个气体出口，用于从气体通道传导气体，以及从多个气体延伸的内孔凸缘出口并邻近气体屏蔽法兰形成用于将气体导向位于沉积室内的溅射靶的气体走道。

3. 发明授权

US08517364B1 Disk holder with replaceable inserts to retain springs 有权
标题翻译：带可更换插入物的磁盘支架，用于保持弹簧
公开(公告)号：US08517364B1
公开(公告)日：2013-08-27
申请号：US12899737
申请日：2010-10-07
申请人： Gary Crumley , Hung Hee Yeoh , Yi Chun Tan
发明人： Gary Crumley , Hung Hee Yeoh , Yi Chun Tan
IPC分类号： B25B5/16
CPC分类号： G11B5/00
摘要： Embodiments of the present invention include a substrate holder apparatus comprising a plate configured with an opening designed to receive a substrate; and a plurality of gripper assemblies disposed around the opening and configured to hold the substrate at a predetermined position within the opening such that the substrate is substantially coplanar with respect to a surface of the plate, at least one of the gripper assemblies comprising: a support element configured to grip an outside edge of the substrate, the support element mounted to a mount assembly configured to be attached to the substrate holder apparatus such that the support element holds the substrate at the predetermined position with respect to the plate.
摘要翻译：本发明的实施例包括：衬底保持器装置，其包括被设计成接收衬底的开口的板; 以及多个夹持器组件，其设置在所述开口周围并且被构造成将所述衬底保持在所述开口内的预定位置处，使得所述衬底相对于所述板的表面基本共面，所述夹持器组件中的至少一个包括：所述支撑元件被配置为夹持所述基板的外边缘，所述支撑元件安装到安装组件，所述安装组件被构造成附接到所述基板保持器装置，使得所述支撑元件将所述基板保持在相对于所述板的预定位置。

4. 发明授权

US08524052B1 Cooling shower plate for disk manufacture 有权
标题翻译：冷却淋浴盘制盘
公开(公告)号：US08524052B1
公开(公告)日：2013-09-03
申请号：US12753818
申请日：2010-04-02
申请人： Yi Chun Tan , Choo Fooi Chew , Siewboon Tan , Lee Chu Liew
发明人： Yi Chun Tan , Choo Fooi Chew , Siewboon Tan , Lee Chu Liew
IPC分类号： C23C14/34 , C23C16/00
CPC分类号： C23C14/34 , C23C14/14 , C23C14/541 , C23C14/568 , C23C14/5806 , C23C14/5846 , C23C16/02 , C23C16/26 , C23C16/463
摘要： Apparatus and method for cooling a recording media disk in a deposition system. A manifold spacer including an input port to receive a coolant gas and a first output port to output the coolant gas couples a pair of cooling plates together, the pair of cooling plates having opposing surfaces spaced apart by the manifold spacer to accommodate a passage of disks to be cooled. A first shower manifold is coupled to a first of the pair of cooling plates, the first shower manifold receives the coolant gas from the first output port in the manifold spacer and outputs the coolant gas flow in a first direction perpendicular to the opposing cooling plate surfaces and toward the media disk to be cooled.
摘要翻译：用于在沉积系统中冷却记录介质盘的装置和方法。包括用于接收冷却剂气体的输入端口和用于输出冷却剂气体的第一输出端口的歧管间隔件将一对冷却板连接在一起，所述一对冷却板具有由歧管间隔件间隔开的相对表面，以容纳盘的通道要冷却第一淋浴组件联接到一对冷却板中的第一个，第一淋浴组件从歧管间隔件中的第一输出端口接收冷却剂气体，并沿垂直于相对冷却板表面的第一方向输出冷却剂气流并朝向要冷却的介质盘。

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