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    • 1. 发明授权
    • Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof
    • 纳米精度六自由度磁悬浮微动平台及其应用
    • US08599361B2
    • 2013-12-03
    • US13635168
    • 2011-03-15
    • Yu ZhuMing ZhangGuang LiJinsong WangJinchun HuWensheng YinKaiming YangLi ZhangJing MaYan XuYujie LiLi TianGuanghong Duan
    • Yu ZhuMing ZhangGuang LiJinsong WangJinchun HuWensheng YinKaiming YangLi ZhangJing MaYan XuYujie LiLi TianGuanghong Duan
    • G03B27/42G03B27/58G03B27/62H02K41/02
    • G03F7/70758G03F7/70716
    • A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.
    • 提供了主要用于半导体光刻设备的纳米精密六自由度磁悬浮微步及其应用。 微型平台包括十字支架和四个双自由度执行器。 每个2-DOF致动器包括垂直极化永磁体,水平力线圈和垂直力线圈; 所述永磁体安装在所述十字支架的一端上,所述水平力线圈和所述垂直力线圈分别设置在所述永久磁铁的一侧和下方并与所述永磁体隔开; 交叉支撑和四个垂直极化永磁体构成微型载物; 水平力线圈和垂直力线圈分别由线圈框架固定并构成微型定子; 并且定子安装在微型台的基座上。 光刻机的双晶片台定位系统可以由两个微步与二自由度大行程直线电机组合构成。 本发明结构简单,驱动力大,质量小,无电缆扰动,可实现高精度,高加速度六自由度微动作。
    • 2. 发明申请
    • NANOMETER-PRECISION SIX-DEGREE-OF-FREEDOM MAGNETIC SUSPENSION MICRO-MOTION TABLE AND APPLICATION THEREOF
    • NANOMETER-PRECISION六自由度磁悬浮微运动表及其应用
    • US20130038853A1
    • 2013-02-14
    • US13635168
    • 2011-03-15
    • Yu ZhuMing ZhangGuang LiJinsong WangJinchun HuWensheng YinKaiming YangLi ZhangJing MaYan XuYujie LiLi TianGuanghong Duan
    • Yu ZhuMing ZhangGuang LiJinsong WangJinchun HuWensheng YinKaiming YangLi ZhangJing MaYan XuYujie LiLi TianGuanghong Duan
    • H02K41/02G03B27/58
    • G03F7/70758G03F7/70716
    • A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.
    • 提供了主要用于半导体光刻设备的纳米精密六自由度磁悬浮微步及其应用。 微型平台包括十字支架和四个双自由度执行器。 每个2-DOF致动器包括垂直极化永磁体,水平力线圈和垂直力线圈; 所述永磁体安装在所述十字支架的一端上,所述水平力线圈和所述垂直力线圈分别设置在所述永久磁铁的一侧和下方并与所述永磁体隔开; 交叉支撑和四个垂直极化永磁体构成微型载物; 水平力线圈和垂直力线圈分别由线圈框架固定并构成微型定子; 并且定子安装在微型台的基座上。 光刻机的双晶片台定位系统可以由两个微步与二自由度大行程直线电机组合构成。 本发明结构简单,驱动力大,质量小,无电缆扰动,可实现高精度,高加速度六自由度微动作。
    • 3. 发明授权
    • White LED device having LED chips directly driven by alternating current
    • 白色LED器件,具有直接由交流电驱动的LED芯片
    • US09185761B2
    • 2015-11-10
    • US13883832
    • 2011-03-01
    • Hongjie ZhangMing ZhangChengyu LiKun ZhaoDongming LiLi Zhang
    • Hongjie ZhangMing ZhangChengyu LiKun ZhaoDongming LiLi Zhang
    • H01J1/62H01L33/00H05B33/08H01L33/50
    • H05B33/0845H01L27/15H01L33/502H05B33/0809H05B33/0821
    • An Alternate Current (AC) white Light-Emitting Diode (LED) device is provided, which belongs to the technical field of white LED manufacturing. The problem to be solved by the present invention is to low-costly overcome a series of deficiencies such as the stroboflash of an AC driven LED, and the heat dissipation difficulty caused by an integrated packaging of multiple LEDs. A white LED unit includes an LED chip and a light emitting material that can emit light when being excited by the LED chip. The luminous lifetime of the light emitting material is 1-100 ms. The LED chip only comprises one PN junction. The light emitted by the LED chip is mixed with the light emitted by the light emitting material to form white light. The white LED unit is driven by AC with a frequency not more than 100 Hz. The white LED device of prevent invention uses the single PN junction chip, rather than the prior integrated packaged AC multi-LED chip.
    • 提供交流(AC)白光发光二极管(LED)装置,属于白光LED制造技术领域。 本发明要解决的问题是低成本地克服了诸如AC驱动LED的闪光灯等一系列缺陷以及由多个LED的集成封装引起的散热困难。 白色LED单元包括LED芯片和当被LED芯片激发时可以发光的发光材料。 发光材料的发光寿命为1-100ms。 LED芯片仅包括一个PN结。 由LED芯片发出的光与由发光材料发射的光混合,形成白光。 白色LED单元由AC不超过100 Hz的频率驱动。 防止发明的白色LED装置使用单个PN结芯片,而不是现有的集成封装的交流多LED芯片。
    • 5. 发明申请
    • AC WHITE LED DEVICE
    • 交流白光LED装置
    • US20130221870A1
    • 2013-08-29
    • US13883832
    • 2011-03-01
    • Hongjie ZhangMing ZhangChengyu LiKun ZhaoDongming LiLi Zhang
    • Hongjie ZhangMing ZhangChengyu LiKun ZhaoDongming LiLi Zhang
    • H05B33/08
    • H05B33/0845H01L27/15H01L33/502H05B33/0809H05B33/0821
    • An Alternate Current (AC) white Light-Emitting Diode (LED) device is provided, which belongs to the technical field of white LED manufacturing. The problem to be solved by the present invention is to low-costly overcome a series of deficiencies such as the stroboflash of an AC driven LED, and the heat dissipation difficulty caused by an integrated packaging of multiple LEDs. A white LED unit includes an LED chip and a light emitting material that can emit light when being excited by the LED chip. The luminous lifetime of the light emitting material is 1-100 ms. The LED chip only comprises one PN junction. The light emitted by the LED chip is mixed with the light emitted by the light emitting material to form white light. The white LED unit is driven by AC with a frequency not more than 100 Hz. The white LED device of prevent invention uses the single PN junction chip, rather than the prior integrated packaged AC multi-LED chip.
    • 提供交流(AC)白光发光二极管(LED)装置,属于白光LED制造技术领域。 本发明要解决的问题是低成本地克服了诸如AC驱动LED的闪光灯等一系列缺陷以及由多个LED的集成封装引起的散热困难。 白色LED单元包括LED芯片和当被LED芯片激发时可以发光的发光材料。 发光材料的发光寿命为1-100ms。 LED芯片仅包括一个PN结。 由LED芯片发出的光与由发光材料发射的光混合,形成白光。 白色LED单元由AC不超过100 Hz的频率驱动。 防止发明的白色LED装置使用单个PN结芯片,而不是现有的集成封装的交流多LED芯片。
    • 10. 发明授权
    • ACK/NAK bit bundling in carrier aggregation scenarios
    • 在载波聚合情况下,ACK / NAK位绑定
    • US09577803B2
    • 2017-02-21
    • US14400339
    • 2012-05-11
    • Yu Yu YanChun Hai YaoPeter SkovLi Zhang
    • Yu Yu YanChun Hai YaoPeter SkovLi Zhang
    • H04L1/00H04L5/00H04L1/16
    • H04L5/0046H04L1/1635H04L5/001H04L5/0055
    • Techniques are disclosed for ACK/NAK bit bundling in carrier aggregation scenarios. Such measures exemplarily comprise generating a set of acknowledgement bits confirming receipt of payload data of a radio frame in a carrier aggregation mode aggregating a primary and at least one secondary carrier, said radio frame being divided into a plurality of downlink subframes and uplink subframes, each of said downlink subframes comprising at least one codeword per carrier, each of said acknowledgement bits is allocated to one of said codewords of one of said downlink subframes, and applying spatial domain bundling and/or time domain bundling on said set of acknowledgement bits distinctive for each of said primary and said at least one secondary carrier, wherein said spatial domain bundling is an AND operation of all acknowledgement bits allocated to each codeword of one carrier of said primary and said at least one secondary carrier and one downlink subframe.
    • 公开了在载波聚合情况下的ACK / NAK比特绑定技术。 这样的措施示例性地包括生成一组确认位,确认在聚合主载波和至少一个辅载波的载波聚合模式中接收无线帧的有效载荷数据,所述无线帧被划分为多个下行子帧和上行子帧,每个 的所述下行链路子帧包括每个载波的至少一个码字,每个所述确认位被分配给所述下行链路子帧之一的所述码字之一,并且在所述确认位集合上应用空间域绑定和/或时域绑定, 所述主载波和所述至少一个辅载波中的每一个,其中所述空域绑定是分配给所述主载波和所述至少一个辅载波的一个载波和一个下行链路子帧的每个码字的所有确认比特的“与”运算。