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1. 发明授权

US08502988B2 Pattern inspection apparatus and pattern inspection method 失效
标题翻译：图案检验装置和图案检验方法
公开(公告)号：US08502988B2
公开(公告)日：2013-08-06
申请号：US12835271
申请日：2010-07-13
申请人： Yusaku Konno
发明人： Yusaku Konno
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01B11/2441 , G01B2210/56 , G01N21/21 , G01N21/45 , G01N21/95607 , G03F1/84 , G03F7/7065
摘要： According to one embodiment, a pattern inspection apparatus includes a light source, a beam splitter, a first optical system, a second optical system, a controller, a phase controller and a detector. The beam splitter splits an emitted light into first and second optical paths. The first optical system delivers the light to a first pattern and delivers a first reflected light from the first pattern. The second optical system delivers the light to a second pattern and delivers a second reflected light from the second pattern. The controller is provided on the optical path, and intensities of the first and second reflected lights are substantially equal. The phase controller is provided on the optical path, and phases of the first and second reflected lights are inverted. In addition, the detector detects a light that the first and second reflected lights are made to interfere with each other.
摘要翻译：根据一个实施例，图案检查装置包括光源，分束器，第一光学系统，第二光学系统，控制器，相位控制器和检测器。分束器将发射的光分成第一和第二光路。第一光学系统将光传送到第一图案并且从第一图案传送第一反射光。第二光学系统将光传送到第二图案并且从第二图案传送第二反射光。控制器设置在光路上，第一和第二反射光的强度基本相等。相位控制器设置在光路上，第一和第二反射光的相位反转。此外，检测器检测使第一和第二反射光彼此干涉的光。

2. 发明授权

US08823123B2 Solid-state image sensor 有权
标题翻译：固态图像传感器
公开(公告)号：US08823123B2
公开(公告)日：2014-09-02
申请号：US13601439
申请日：2012-08-31
申请人： Koichi Kokubun , Yusaku Konno
发明人： Koichi Kokubun , Yusaku Konno
IPC分类号： H01L31/0232 , H01L21/00 , H01L27/146 , H01L31/0216
CPC分类号： H01L27/146 , H01L27/14621 , H01L27/14685 , H01L31/02165 , H01L31/0232
摘要： According to one embodiment, there is provided a solid-state image sensor including a photoelectric conversion layer, and a multilayer interference filter. The multilayer interference filter is arranged to conduct light of a particular color, of incident light, selectively to the photoelectric conversion layer. The multilayer interference filter has a laminate structure in which a first layer having a first refraction index and a second layer having a second refraction index are repeatedly laminated, and a third layer which is in contact with a lower surface of the laminate structure and has a third refraction index. A lowermost layer of the laminate structure is the second layer. The third refraction index is not equal to the first refraction index and is higher than the second refraction index.
摘要翻译：根据一个实施例，提供了一种包括光电转换层和多层干涉滤光器的固态图像传感器。多层干涉滤光器被布置成将特定颜色的入射光的光选择性地导入光电转换层。多层干涉滤光器具有层叠结构，其中具有第一折射率的第一层和具有第二折射率的第二层被重复层压，以及与层压结构的下表面接触的第三层，第三折射指数。层压结构的最下层是第二层。第三折射率不等于第一折射率并且高于第二折射率。

3. 发明授权

US08649591B2 Pattern inspection apparatus and pattern inspection method 有权
标题翻译：图案检验装置和图案检验方法
公开(公告)号：US08649591B2
公开(公告)日：2014-02-11
申请号：US13308719
申请日：2011-12-01
申请人： Makoto Kaneko , Takayoshi Fujii , Yusaku Konno , Mitsutoshi Watabiki , Yusuke Ilda , Shinichi Imai , Yuichiro Yamazaki
发明人： Makoto Kaneko , Takayoshi Fujii , Yusaku Konno , Mitsutoshi Watabiki , Yusuke Ilda , Shinichi Imai , Yuichiro Yamazaki
IPC分类号： G06K9/36
CPC分类号： G01N21/95607 , G01N21/9501
摘要： In accordance with an embodiment, a pattern inspection method includes: applying a light generated from a light source to the same region of a substrate in which an inspection target pattern is formed; guiding, imaging and then detecting a reflected light from the substrate, and acquiring a detection signal for each of a plurality of different wavelengths; and adding the detection signals of the different wavelengths in association with an incident position of an imaging surface to generate added image data including information on a wavelength and signal intensity, judging, by the added image data, whether the inspection target pattern has any defect, and when judging that the inspection target pattern has a defect, detecting the position of the defect in a direction perpendicular to the substrate.
摘要翻译：根据实施例，图案检查方法包括：将从光源产生的光施加到形成有检查对象图案的基板的相同区域; 引导，成像，然后检测来自基板的反射光，并获取多个不同波长中的每一个的检测信号; 并且与成像面的入射位置相关联地添加不同波长的检测信号，以生成包括关于波长和信号强度的信息的附加图像数据，通过添加的图像数据判断检查对象图案是否具有任何缺陷，并且当判断为检查对象图案有缺陷时，检测出与基板垂直的方向上的缺陷的位置。

4. 发明申请

US20130057738A1 SOLID-STATE IMAGING ELEMENT 有权
标题翻译：固态成像元件
公开(公告)号：US20130057738A1
公开(公告)日：2013-03-07
申请号：US13585113
申请日：2012-08-14
申请人： Yusaku Konno , Naotada Okada , Koichi Kokubun
发明人： Yusaku Konno , Naotada Okada , Koichi Kokubun
IPC分类号： H04N3/14
CPC分类号： H01L27/14621 , G02B5/201 , G02B5/203 , H04N9/045
摘要： According to one embodiment, a solid-state imaging element includes a substrate, and a plurality of color filters. A plurality of photoelectric conversion units is provided in the substrate. The plurality of color filters is provided respectively for the plurality of photoelectric conversion units. The plurality of color filters is configured to selectively transmit light of a designated wavelength band. Each of the plurality of color filters includes a stacked structure unit and a periodic structure unit. A plurality of layers having different refractive indexes is stacked in the stacked structure unit. A plurality of components is provided in the periodic structure unit at different periods according to the designated wavelength band and an incident angle of the light.
摘要翻译：根据一个实施例，固态成像元件包括基板和多个滤色器。在基板上设置多个光电转换单元。分别为多个光电转换单元提供多个滤色器。多个滤色器被配置为选择性地透射指定波长带的光。多个滤色器中的每一个包括堆叠结构单元和周期性结构单元。在层叠结构单元中堆叠具有不同折射率的多个层。根据指定的波长带和光的入射角，在周期性结构单元中以不同的周期提供多个部件。

5. 发明授权

US08890984B2 Solid-state imaging element 有权
标题翻译：固态成像元件
公开(公告)号：US08890984B2
公开(公告)日：2014-11-18
申请号：US13585113
申请日：2012-08-14
申请人： Yusaku Konno , Naotada Okada , Koichi Kokubun
发明人： Yusaku Konno , Naotada Okada , Koichi Kokubun
IPC分类号： H04N3/14 , G02B5/20 , H01L27/146 , H04N9/04
CPC分类号： H01L27/14621 , G02B5/201 , G02B5/203 , H04N9/045
摘要： According to one embodiment, a solid-state imaging element includes a substrate, and a plurality of color filters. A plurality of photoelectric conversion units is provided in the substrate. The plurality of color filters is provided respectively for the plurality of photoelectric conversion units. The plurality of color filters is configured to selectively transmit light of a designated wavelength band. Each of the plurality of color filters includes a stacked structure unit and a periodic structure unit. A plurality of layers having different refractive indexes is stacked in the stacked structure unit. A plurality of components is provided in the periodic structure unit at different periods according to the designated wavelength band and an incident angle of the light.
摘要翻译：根据一个实施例，固态成像元件包括基板和多个滤色器。在基板上设置多个光电转换单元。分别为多个光电转换单元提供多个滤色器。多个滤色器被配置为选择性地透射指定波长带的光。多个滤色器中的每一个包括堆叠结构单元和周期性结构单元。在层叠结构单元中堆叠具有不同折射率的多个层。根据指定的波长带和光的入射角，在周期性结构单元中以不同的周期提供多个部件。

6. 发明申请

US20130093034A1 SOLID-STATE IMAGING DEVICE AND MANUFACTURING METHOD OF SOLID-STATE IMAGING DEVICE 有权
标题翻译：固态成像装置及固态成像装置的制造方法
公开(公告)号：US20130093034A1
公开(公告)日：2013-04-18
申请号：US13601165
申请日：2012-08-31
申请人： Koichi KOKUBUN , Yusaku Konno
发明人： Koichi KOKUBUN , Yusaku Konno
IPC分类号： H01L31/0232 , H01L31/18
CPC分类号： H01L31/02165 , H01L27/14621 , H01L27/14629 , H01L27/14685
摘要： According to one embodiment, there is provided a solid-state imaging device including a first photoelectric conversion layer and a color filter. The color filter includes a multi-layer interference filter and a guided mode resonant grating. The guided mode resonant grating includes a plurality of diffraction gratings and a plurality of inter-grating regions. The plurality of diffraction gratings are formed of a material having a first index of refraction and periodically arrayed at least one-dimensionally. The plurality of inter-grating regions are arranged between at least the plurality of diffraction gratings. Each of the plurality of inter-grating regions includes an insulating film region and an air gap region. The insulating film region is formed of a material having a second index of refraction lower than the first index of refraction.
摘要翻译：根据一个实施例，提供了一种包括第一光电转换层和滤色器的固态成像装置。滤色器包括多层干涉滤光器和导模谐振光栅。导模谐振光栅包括多个衍射光栅和多个光栅间区域。多个衍射光栅由具有第一折射率并且至少一维地周期性排列的材料形成。多个光栅间区域布置在至少多个衍射光栅之间。多个光栅间区域中的每一个包括绝缘膜区域和气隙区域。绝缘膜区域由具有低于第一折射率的第二折射率的材料形成。

7. 发明授权

US07868285B2 Array-type light receiving device and light collection method 有权
标题翻译：阵列式光接收装置及采光方式
公开(公告)号：US07868285B2
公开(公告)日：2011-01-11
申请号：US12139714
申请日：2008-06-16
申请人： Yusaku Konno , Naotada Okada
发明人： Yusaku Konno , Naotada Okada
IPC分类号： H01L27/00
CPC分类号： H01L27/14685 , G02B3/0006 , H01L27/14621 , H01L27/14627
摘要： An array-type light receiving device includes a first light collector, a second light collector configured to receive light collected by the first light collector, and a light receiver configured to receive light collected by the second light collector. The first light collector has a spherical shape, the second light collector has a high refractive index portion and a low refractive index portion, and the high refractive index portion has one of a cylindrical shape and a polygonal prismatic shape.
摘要翻译：阵列型光接收装置包括第一集光器，被配置为接收由第一集光器收集的光的第二集光器和被配置为接收由第二集光器收集的光的光接收器。第一集光体具有球面形状，第二集光体具有高折射率部分和低折射率部分，高折射率部分具有圆柱形状和多边形棱柱形状。

8. 发明授权

US08963267B2 Solid-state imaging device and manufacturing method of solid-state imaging device 有权
标题翻译：固态成像装置及固态成像装置的制造方法
公开(公告)号：US08963267B2
公开(公告)日：2015-02-24
申请号：US13601165
申请日：2012-08-31
申请人： Koichi Kokubun , Yusaku Konno
发明人： Koichi Kokubun , Yusaku Konno
IPC分类号： H01L31/0232 , H01L31/18 , H01L31/0216 , H01L27/146
CPC分类号： H01L31/02165 , H01L27/14621 , H01L27/14629 , H01L27/14685
摘要： According to one embodiment, there is provided a solid-state imaging device including a first photoelectric conversion layer and a color filter. The color filter includes a multi-layer interference filter and a guided mode resonant grating. The guided mode resonant grating includes a plurality of diffraction gratings and a plurality of inter-grating regions. The plurality of diffraction gratings are formed of a material having a first index of refraction and periodically arrayed at least one-dimensionally. The plurality of inter-grating regions are arranged between at least the plurality of diffraction gratings. Each of the plurality of inter-grating regions includes an insulating film region and an air gap region. The insulating film region is formed of a material having a second index of refraction lower than the first index of refraction.
摘要翻译：根据一个实施例，提供了一种包括第一光电转换层和滤色器的固态成像装置。滤色器包括多层干涉滤光器和导模谐振光栅。导模谐振光栅包括多个衍射光栅和多个光栅间区域。多个衍射光栅由具有第一折射率并且至少一维地周期性排列的材料形成。多个光栅间区域布置在至少多个衍射光栅之间。多个光栅间区域中的每一个包括绝缘膜区域和气隙区域。绝缘膜区域由具有低于第一折射率的第二折射率的材料形成。

9. 发明授权

US08759929B2 Solid-state imaging device 失效
标题翻译：固态成像装置
公开(公告)号：US08759929B2
公开(公告)日：2014-06-24
申请号：US12726938
申请日：2010-03-18
申请人： Kazufumi Shiozawa , Yusaku Konno , Naotada Okada
发明人： Kazufumi Shiozawa , Yusaku Konno , Naotada Okada
IPC分类号： H01L31/0232
CPC分类号： H01L27/14632 , H01L27/14621 , H01L27/14625 , H01L27/14627
摘要： A solid-state imaging device includes: a substrate including a plurality of light receiving sections; and a color filter including a guided-mode resonant grating provided immediately above each of the plurality of light receiving sections, at least one of an upper surface and a lower surface of the guided-mode resonant grating being covered with a layer having a lower refractive index than the guided-mode resonant grating.
摘要翻译：固态成像装置包括：基板，包括多个光接收部分; 以及包括紧邻在多个光接收部分之上的导模谐振光栅的滤色器，所述导模谐振光栅的上表面和下表面中的至少一个被具有较低折射率的层覆盖指数比导模谐振光栅。

10. 发明授权

US08648435B2 Solid-state imaging device and method for manufacturing same 失效
标题翻译：固态成像装置及其制造方法
公开(公告)号：US08648435B2
公开(公告)日：2014-02-11
申请号：US12726718
申请日：2010-03-18
申请人： Yusaku Konno
发明人： Yusaku Konno
IPC分类号： H01L31/0232 , H01L31/062
CPC分类号： H01L27/14645 , G02B3/0056 , G02B5/201 , H01L27/14621 , H01L27/14625 , H01L27/14629 , H01L27/14632 , H01L27/14685 , H01L31/02327
摘要： A solid-state imaging device includes: a substrate including a plurality of light receiving sections; an optical waveguide provided above each of the plurality of light receiving sections and surrounded by a cladding layer; a color filter provided above each of the optical waveguides; and a lens provided above the color filter, the optical waveguide including a first layer having a first refractive index and a second layer being in contact with the first layer and having a second refractive index higher than the first refractive index.
摘要翻译：固态成像装置包括：基板，包括多个光接收部分; 光波导，设置在所述多个光接收部的上方，被包层所包围; 设置在每个光波导上的滤色器; 以及设置在所述滤色器上方的透镜，所述光波导包括具有第一折射率的第一层和与所述第一层接触并具有高于所述第一折射率的第二折射率的第二层。

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