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    • 7. 发明授权
    • Erasable programmable single-ploy nonvolatile memory
    • 可擦除可编程单态非易失性存储器
    • US08779520B2
    • 2014-07-15
    • US13893794
    • 2013-05-14
    • eMemory Technology Inc.
    • Wei-Ren ChenTe-Hsun HsuWen-Hao Lee
    • H01L27/115H01L29/78
    • H01L27/11517G11C16/10G11C2216/10H01L27/11558H01L29/66825H01L29/7881
    • An erasable programmable single-poly nonvolatile memory includes a substrate structure; a floating gate transistor having a floating gate, a gate oxide layer under the floating gate, and a channel region, wherein the channel region is formed in a N-well region; and an erase gate region, wherein the floating gate is extended to and is adjacent to the erase gate region and the erase gate region comprises a n-type source/drain region connected to an erase line voltage and a P-well region. The N-well and P-well region are formed in the substrate structure. The gate oxide layer comprises a first portion above the channel region of the floating gate transistor and a second portion above the erase gate region, and a thickness of the first portion of the gate oxide layer is different from a thickness of the second portion of the gate oxide layer.
    • 一种可擦除可编程单一多晶硅非易失性存储器,包括:基板结构; 具有浮置栅极的浮栅晶体管,浮置栅极下方的栅氧化层和沟道区,其中沟道区形成在N阱区中; 以及擦除栅极区,其中浮置栅极延伸到擦除栅极区域并且与擦除栅极区域相邻,并且擦除栅极区域包括连接到擦除线电压和P阱区域的n型源极/漏极区域。 在衬底结构中形成N阱和P阱区。 栅极氧化物层包括位于浮动栅极晶体管的沟道区上方的第一部分和擦除栅极区上方的第二部分,并且栅极氧化物层的第一部分的厚度与第二部分的厚度不同 栅氧化层。