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1. 发明授权

US11131700B2 Position correction method and a system for position correction in relation to four probe resistance measurements 有权
公开(公告)号：US11131700B2
公开(公告)日：2021-09-28
申请号：US16475362
申请日：2018-01-08
申请人： CAPRES A/S
发明人： Frederik Westergaard Osterberg , Alberto Cagliani , Dirch Hjorth Petersen , Ole Hansen
IPC分类号： G01R27/08 , G01R1/067 , G01R1/073 , G01R27/14
摘要： The present invention relates to a method of establishing specific electrode positions by providing a multi-point probe and a test sample. The method comprises the measuring or determining of a distance between two of the electrodes of the multi-point probe and establishing a resistance model representative of the test sample. The method further comprises the performing of at least three different sheet resistance measurements and establishing for each of the different sheet resistance measurement a corresponding predicted sheet resistance based on the resistance model. Thereafter the method comprises the establishment of a set of differences constituting the difference between each of the predicted sheet resistance and its corresponding measured sheet resistance, and deriving the specific electrode positions of the multi-point probe on the surface of the test sample by using the distance and performing a data fit by minimizing an error function constituting the sum of the set of differences.

2. 外观设计

USD717189S1 Cover, connector, and handle assembly attachable to a rack for a rack-supported multi-point electrical probe holder 有权
标题翻译：盖子，连接器和手柄组件，可连接到机架支撑的多点电探头支架
公开(公告)号：USD717189S1
公开(公告)日：2014-11-11
申请号：US29456061
申请日：2013-05-28
申请人： Capres A/S
设计人： Hans Henrik Jochumsen , Anders Jensen , Jannik Sadolin , Niels Torp Madsen , Lars Norregaard , Chaker Khalfaoui , Henrik Baekbo , Lauge Gammelgaard , Peter Folmer Nielsen , Hans Henrik Jankjaer

3. 外观设计

USD717190S1 Rack, cover, connector, and handle assembly for a rack-supported multi-point electrical probe holder 有权
标题翻译：机架，盖，连接器和手柄组件，用于机架支持的多点电探头支架
公开(公告)号：USD717190S1
公开(公告)日：2014-11-11
申请号：US29456062
申请日：2013-05-28
申请人： Capres A/S
设计人： Hans Henrik Jochumsen , Anders Jensen , Jannik Sadolin , Niels Torp Madsen , Lars Norregaard , Chaker Khalfaoui , Henrik Baekbo , Lauge Gammelgaard , Peter Folmer Nielsen , Hans Henrik Jankjaer

4. 发明申请

US20090219047A1 PROBE FOR TESTING ELECTRICAL PROPERTIES OF A TEST SAMPLE 有权
标题翻译：测试样品的电学性质的探针
公开(公告)号：US20090219047A1
公开(公告)日：2009-09-03
申请号：US12091927
申请日：2006-10-31
申请人： Dirch Petersen , Torben Mikael Hansen , Peter R.E. Petersen
发明人： Dirch Petersen , Torben Mikael Hansen , Peter R.E. Petersen
IPC分类号： G01R31/02 , G01R1/067
CPC分类号： G01R1/06716
摘要： A probe for testing electrical properties of test samples includes a body having a probe arm defining proximal and distal ends, the probe arm extending from the body at the proximal end of the probe arm, whereby a first axis is defined by the proximal and the distal ends. The probe arm defines a geometry allowing flexible movement of the probe arm along the first axis and along a second axis perpendicular to the first axis, and along a third axis orthogonal to a plane defined by the first axis and the second axis.
摘要翻译：用于测试试样的电性能的探针包括具有限定近端和远端的探针臂的主体，探针臂在探针臂的近端处从身体延伸，由此第一轴线由近端和远端限定结束。探针臂限定允许探针臂沿着第一轴线和垂直于第一轴线的第二轴线以及垂直于由第一轴线和第二轴线限定的平面的第三轴线的柔性移动的几何形状。

5. 发明申请

US20090009200A1 Method for Providing Alignment of a Probe 有权
标题翻译：提供探针对准的方法
公开(公告)号：US20090009200A1
公开(公告)日：2009-01-08
申请号：US11570965
申请日：2005-06-21
申请人： Peter Folmer Nielsen , Peter R.E. Petersen , Jesper Erdman Hansen
发明人： Peter Folmer Nielsen , Peter R.E. Petersen , Jesper Erdman Hansen
IPC分类号： G01R31/02 , C23F1/00 , H01L21/306
CPC分类号： G01R1/07392 , G01R1/06727 , G01R3/00 , G01R31/2887 , Y10T29/49204 , Y10T29/49222
摘要： A method for aligning a probe relative to a Supporting substrate defining a first planar surface, an edge, and a first crystal plane includes the steps of masking the surface of the substrate to define an exposed area on the first surface at the edge; and etching, using an etch reagent, a recess in the exposed area, the recess defining first and second opposed sidewalls, an end wall remote from the edge, and a bottom wall. The method further includes the step of providing a probe substrate defining a second planar surface and a second crystal plane identical to the first crystal plane, and positioning the probe substrate so that the first and the second crystal planes are positioned identically when forming a probe from the probe substrate using the etch reagent, wherein the probe defines congruent surfaces to the first and second sidewalls.
摘要翻译：用于使探针相对于限定第一平坦表面，边缘和第一晶面的支撑衬底对准的方法包括以下步骤：掩蔽衬底的表面以限定边缘处的第一表面上的暴露区域; 并且使用蚀刻剂蚀刻暴露区域中的凹部，限定第一和第二相对侧壁的凹部，远离边缘的端壁和底壁。该方法还包括以下步骤：提供限定与第一晶面相同的第二平面和第二晶面的探针基板，以及定位探针基板，使得当形成探针时第一和第二晶面相同地定位所述探针衬底使用所述蚀刻试剂，其中所述探针限定与所述第一侧壁和所述第二侧壁同等的表面。

6. 发明授权

US07307436B2 Electrical feedback detection system for multi-point probes 有权
公开(公告)号：US07307436B2
公开(公告)日：2007-12-11
申请号：US11509208
申请日：2006-08-24
申请人： Christian Leth Petersen , Peter Folmer Nielsen
发明人： Christian Leth Petersen , Peter Folmer Nielsen
IPC分类号： G01R31/02
CPC分类号： G01Q70/06 , G01N27/041 , G01Q10/065 , G01Q60/30 , G01R1/06794
摘要： An electrical feedback detection system for detecting electrical contact between a multi-point probe and an electrically conducting material test sample surface. The electrical feedback detection system comprises an electrical detector unit connected to a multitude of electrodes in the multi-point probe, and optionally directly to the test sample surface. The detector unit provides an electrical signal to a multi-point testing apparatus, which can be used to determine if the multi-point probe is in electrical contact with the test sample surface. The detector unit comprises an electrical generator means for generating an electrical signal that is driven through a first multitude of electrodes of the multi-point probe, and a second multitude of switched impedance detection elements. The electrical potential across the impedance detection elements determines the electrical contact to the test sample surface.

7. 发明授权

US07135876B2 Electrical feedback detection system for multi-point probes 有权
标题翻译：多点探针电反馈检测系统
公开(公告)号：US07135876B2
公开(公告)日：2006-11-14
申请号：US10500768
申请日：2003-01-07
申请人： Christian Leth Petersen , Peter Folmer Nielsen
发明人： Christian Leth Petersen , Peter Folmer Nielsen
IPC分类号： G01R31/02
CPC分类号： G01Q70/06 , G01N27/041 , G01Q10/065 , G01Q60/30 , G01R1/06794
摘要： An electrical feedback detection system for detecting electrical contact between a multi-point probe and an electrically conducting material test sample surface. The electrical feedback detection system comprises an electrical detector unit connected to a multitude of electrodes in the multi-point probe, and optionally directly to the test sample surface. The detector unit provides an electrical signal to a multi-point testing apparatus, which can be used to determine if the multi-point probe is in electrical contact with the test sample surface. The detector unit comprises an electrical generator means for generating an electrical signal that is driven through a first multitude of electrodes of the multi-point probe, and a second multitude of switched impedance detection elements. The electrical potential across the impedance detection elements determines the electrical contact to the test sample surface.
摘要翻译：一种用于检测多点探针与导电材料测试样品表面之间的电接触的电反馈检测系统。电反馈检测系统包括连接到多点探针中的多个电极的电检测器单元，并且可选地直接连接到测试样品表面。检测器单元向多点测试装置提供电信号，其可用于确定多点探针是否与测试样品表面电接触。检测器单元包括用于产生通过多点探针的第一多个电极驱动的电信号的发电机装置和第二多个开关阻抗检测元件。阻抗检测元件两端的电位决定了与测试样品表面的电接触。

8. 发明申请

US20190310295A1 A POSITION CORRECTION METHOD AND A SYSTEM FOR POSITION CORRECTION IN RELATION TO FOUR PROBE RESISTANCE MEASUREMENTS 审中-公开
公开(公告)号：US20190310295A1
公开(公告)日：2019-10-10
申请号：US16475362
申请日：2018-01-08
申请人： CAPRES A/S
发明人： Frederik Westergaard Osterberg , Alberto Cagliani , Dirch Hjorth Petersen , Ole Hansen
IPC分类号： G01R27/08 , G01R1/067 , G01R1/073
摘要： The present invention relates to a method of establishing specific electrode positions by providing a multi-point probe and a test sample. The method comprises the measuring or determining of a distance between two of the electrodes of the multi-point probe and establishing a resistance model representative of the test sample. The method further comprises the performing of at least three different sheet resistance measurements and establishing for each of the different sheet resistance measurement a corresponding predicted sheet resistance based on the resistance model. Thereafter the method comprises the establishment of a set of differences constituting the difference between each of the predicted sheet resistance and its corresponding measured sheet resistance, and deriving the specific electrode positions of the multi-point probe on the surface of the test sample by using the distance and performing a data fit by minimizing an error function constituting the sum of the set of differences.

9. 外观设计

USD717188S1 Rack for supporting a multi-point electrical probe holder 有权
标题翻译：机架用于支持多点电探头支架
公开(公告)号：USD717188S1
公开(公告)日：2014-11-11
申请号：US29456059
申请日：2013-05-28
申请人： Capres A/S
设计人： Hans Henrik Jochumsen , Anders Jensen , Jannik Sadolin , Niels Torp Madsen , Lars Norregaard , Chaker Khalfaoui , Henrik Baekbo , Lauge Gammelgaard , Peter Folmer Nielsen , Hans Henrik Jankjaer

10. 发明申请

US20110320144A1 METHOD FOR SHEET RESISTANCE AND LEAKAGE CURRENT DENSITY MEASUREMENTS ON SHALLOW SEMICONDUCTOR IMPLANTS 审中-公开
标题翻译：薄膜半导体材料的表面电阻和漏电流密度测量方法
公开(公告)号：US20110320144A1
公开(公告)日：2011-12-29
申请号：US12298387
申请日：2007-04-24
申请人： Christian L. Petersen
发明人： Christian L. Petersen
IPC分类号： G06F19/00 , G01R1/067
CPC分类号： G01R31/312 , G01R31/2648
摘要： A method for accurately determining the sheet resistance and leakage current density of a shallow implant in a semiconductor surface (520) includes making one or more four-point resistance measurements with an induced current below 100 μA on the semiconductor surface (520) with a plurality of electrode spacing sets, at least one set having an average spacing below 100 μm. The sheet resistance and implant leakage is determined through fitting the measured data to theoretical data to within a predetermined error.
摘要翻译：一种用于准确地确定半导体表面（520）中的浅植入物的薄层电阻和漏电流密度的方法包括：在半导体表面（520）上形成多个具有低于100μA的感应电流的四点电阻测量，其中多个的电极间隔组，至少一个平均间隔小于100μm的组。通过将测量数据与理论数据拟合到预定误差内来确定薄片电阻和植入物泄漏。

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