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1. 发明申请

US20180272523A1 Linked micromechanical positioning apparatus for real-time testing and measurement 审中-公开
公开(公告)号：US20180272523A1
公开(公告)日：2018-09-27
申请号：US15765576
申请日：2015-10-13
申请人： Sensapex Oy
发明人： Mikko VÄHÄSÖYRINKI , Markku VIMPARI
IPC分类号： B25J7/00 , B81B3/00 , G01N33/487 , G02B21/32
CPC分类号： B25J7/00 , B25J13/02 , B81B3/00 , G01N33/48707 , G01N33/48728 , G01Q10/065 , G01Q30/02 , G01Q60/44 , G01Q70/06 , G02B21/32
摘要： The invention relates to a positioning device (120, 154), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a probe (150, 151) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the positioning controller (145) having a steering input (156) for receiving a steering signal to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the steering signal. The measurement device may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said steering signal and said positioning control instructions (300).

2. 发明申请

US20180149673A1 APPARATUS AND METHODS FOR INVESTIGATING A SAMPLE SURFACE 审中-公开
公开(公告)号：US20180149673A1
公开(公告)日：2018-05-31
申请号：US15575348
申请日：2016-05-12
申请人： NANYANG TECHNOLOGICAL UNIVERSITY
发明人： Fengwei HUO , Jin WU
IPC分类号： G01Q10/06 , G01Q20/02 , G01Q60/22 , G01Q70/06
CPC分类号： G01Q10/065 , G01Q20/02 , G01Q60/22 , G01Q70/06 , G01Q70/14 , G02B21/002
摘要： An apparatus for investigating a sample surface is disclosed. The apparatus comprises: a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.

3. 发明申请

US20180106830A1 Method and Device of Using a Scanning Probe Microscope 审中-公开
公开(公告)号：US20180106830A1
公开(公告)日：2018-04-19
申请号：US15573137
申请日：2016-05-11
申请人： ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
发明人： Georg Ernest Fantner , Jonathan David Adams , Adrian Pascal Nievergelt
IPC分类号： G01Q20/02 , G01Q10/06 , G01Q60/32 , G01Q10/04
CPC分类号： G01Q20/02 , G01Q10/045 , G01Q10/065 , G01Q60/32
摘要： a scanning probe microscope for high-speed imaging and/or nanomechanical mapping. The microscope comprises a scanning probe comprising a cantilever with a tip at the distal end; and means for modulating a tip-sample distance separating the tip from an intended sample to be viewed with the microscope, the means for modulating being adapted to provide a direct cantilever actuation.

4. 发明授权

US09891246B2 Harmonic feedback atomic force microscopy 有权
公开(公告)号：US09891246B2
公开(公告)日：2018-02-13
申请号：US15229515
申请日：2016-08-05
申请人： Fardad Michael Serry
发明人： Fardad Michael Serry
IPC分类号： G01Q10/00 , G01Q60/32 , G01Q10/06 , G01Q60/24
CPC分类号： G01Q60/32 , G01Q10/065 , G01Q60/24
摘要： Harmonic feedback atomic force microscopy (HF-AFM) includes regulating feedback in oscillating probe atomic force microscopy (AFM) based upon an extracted frequency component of a probe response signal. Feedback in conventional oscillating probe AFM uses the probe response signal as a whole (or at least a driven frequency component of the probe response signal). The extracted frequency of the extracted frequency component of HF-AFM generally is different from any substantially driven frequency that generates the probe oscillation and may be a harmonic of a driven frequency. The regulating may include responding to the strength or weakness of the extracted frequency component such that weakening (or strengthening) of the extracted frequency component contributes positively to a decrease (or an increase) in the average tip-sample distance and contributes negatively to an increase (or a decrease) in the average tip-sample distance.

5. 发明授权

US09885736B2 Electrode control methodology for a scanning tunneling microscope 有权
公开(公告)号：US09885736B2
公开(公告)日：2018-02-06
申请号：US15174939
申请日：2016-06-06
申请人： Mark J. Hagmann
发明人： Mark J. Hagmann
IPC分类号： G01Q60/10 , G01Q10/00 , G01Q10/06
CPC分类号： G01Q60/10 , G01Q10/00 , G01Q10/065
摘要： A control methodology for scanning tunneling microscopy is disclosed. Instead of utilizing Integral-based control systems, the methodology utilizes a dual-control algorithm to direct relative advancement of a STM tip towards a sample. A piezo actuator and stepper motor advances an STM tip towards a sample at a given distance until measuring a current greater than or equal to a desired setpoint current. Readings of the contemporaneous step are analyzed to direct the system to change continue or change direction and also determine the size of each step. In simulations where Proportion and/or Integral control methodology was added to the algorithm the stability of the feedback control is decreased. The present methodology accounts for temperature variances in the environment and also appears to clean and protect the tip electrode, prolonging its useful life.

6. 发明授权

US09874582B2 Probe system with multiple actuation locations 有权
公开(公告)号：US09874582B2
公开(公告)日：2018-01-23
申请号：US15122047
申请日：2015-02-27
申请人： INFINITESIMA LIMITED
发明人： Andrew Humphris
IPC分类号： G01Q10/04 , G01Q70/08 , G01Q10/06 , G01Q70/10
CPC分类号： G01Q10/045 , G01Q10/065 , G01Q70/10
摘要： A probe system including a probe with first and second arms and a probe tip carried by the first and second arms, the probe tip having a height and a tilt angle; an illumination system arranged to deform the probe by illuminating the first arm at a first actuation location and the second arm at a second actuation location each with a respective illumination power; and an actuation controller arranged to independently control the illumination power at each actuation location in order to control the height and tilt angle of the probe tip.

7. 发明授权

US09709598B2 Scanning ion conductance microscopy using surface roughness for probe movement 有权
公开(公告)号：US09709598B2
公开(公告)日：2017-07-18
申请号：US15167666
申请日：2016-05-27
申请人： IMPERIAL INNOVATIONS LIMITED
发明人： Pavel Novak , Chao Li , Andrew Shevchuk , Victor Petrovich Ostanin , David Klenerman , Yuri Evgenievich Korchev , Gregory Frolenkov , Richard Clarke
IPC分类号： G01Q10/00 , G01Q60/44 , G01Q10/02 , B82Y35/00 , G01Q10/06
CPC分类号： G01Q60/44 , B82Y35/00 , G01Q10/00 , G01Q10/02 , G01Q10/065
摘要： A method for interrogating a surface using scanning ion conductance microscopy (SICM), comprising the steps of: a) repeatedly bringing a SICM probe into proximity with the surface at discrete, spaced locations in a region of the surface and measuring surface height at each location; b) estimating surface roughness or other characteristic for the region based upon the surface height measurements; and c) repeatedly bringing the probe into proximity with the surface at discrete, spaced locations in the region, the number and location of which is based upon the estimated surface roughness or other characteristic in the region, and obtaining an image of the region with a resolution adapted to the surface roughness or other characteristic.

8. 发明授权

US09689891B2 Automatic gain tuning in atomic force microscopy 有权
公开(公告)号：US09689891B2
公开(公告)日：2017-06-27
申请号：US13117238
申请日：2011-05-27
申请人： Christopher Ryan Moon
发明人： Christopher Ryan Moon
IPC分类号： G01Q60/24 , G01Q10/06 , B82Y35/00 , G01Q60/36
CPC分类号： G01Q10/065 , B82Y35/00 , G01Q60/363
摘要： A method for optimizing loop gain of an atomic force microscope (AFM) apparatus includes determining a change in gain of the physical system and adjusting a controller frequency response of the controller in an AFM loop to compensate for the determined change in gain. The AFM loop has a corresponding loop response that includes the product of the controller frequency response and a physical system response of the physical system.

9. 发明授权

US09678103B2 Automatic tuning of atomic force microscope 有权
公开(公告)号：US09678103B2
公开(公告)日：2017-06-13
申请号：US13283756
申请日：2011-10-28
申请人： Daniel Y Abramovitch , Christopher Ryan Moon
发明人： Daniel Y Abramovitch , Christopher Ryan Moon
IPC分类号： G05B13/02 , G01Q10/06 , B82Y35/00 , G01Q20/02 , G01Q60/24
CPC分类号： G01Q10/065 , B82Y35/00 , G01Q20/02 , G01Q60/24
摘要： An atomic force microscope (AFM) comprises a physical system and a controller comprising a plurality of digital filters and configured to control the physical system. The AFM is tuned by performing automatic loop shaping on a loop response defined by a frequency response of the physical system and a frequency response of the controller, and adjusting a gain of the controller according to a peak in a magnitude of the loop response.

10. 发明申请

US20170052210A1 MEASURING METHOD FOR ATOMIC FORCE MICROSCOPE 审中-公开
标题翻译：原子力显微镜的测量方法
公开(公告)号：US20170052210A1
公开(公告)日：2017-02-23
申请号：US15238326
申请日：2016-08-16
申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
发明人： Byong Chon PARK , DalHyun KIM , ChaeHo SHIN
IPC分类号： G01Q20/00
CPC分类号： G01Q60/32 , G01Q10/065
摘要： Provided is a measuring method for an atomic force microscope that scans a surface of a sample with a probe to measure a surface property of the sample, the measuring method including detecting a motion of the probe while vibrating the probe on the surface of the sample, acquiring surface information on the sample by using a variation in the motion of the probe, and controlling the probe by using the surface information on the sample. The surface information on the sample may include a position and a slope of the surface. The vibrating of the probe on the surface of the sample may include performing a circular motion by the probe around axes perpendicular to a scan direction of the probe and to a height direction of the sample.
摘要翻译：本发明提供一种原子力显微镜的测定方法，该原子力显微镜使用探针对样品的表面进行扫描，以测量样品的表面性质，所述测量方法包括在使样品表面上的探针振动的同时检测探针的运动，通过使用探针的运动的变化来获取样品上的表面信息，并且通过使用样品上的表面信息来控制探针。样品上的表面信息可以包括表面的位置和斜率。探针在样品表面上的振动可以包括通过探针围绕垂直于探针的扫描方向的轴线和样品的高度方向执行圆周运动。

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