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    • 4. 发明授权
    • Bonding tool for mounting semiconductor chips
    • 用于安装半导体芯片的接合工具
    • US07650688B2
    • 2010-01-26
    • US10977047
    • 2004-10-29
    • Hee-Bong LeeHyun-Joon Oh
    • Hee-Bong LeeHyun-Joon Oh
    • B23P19/00
    • H01L21/6838B23K37/047B23K2101/40Y10T29/4913Y10T29/49131Y10T29/49181Y10T29/53178Y10T29/53183Y10T29/53191
    • A vacuum bonding tool for pick-and-place and bonding semiconductor chips onto a substrate or onto a previously mounted die to form a die stack includes a shank and a suction part. The shank has a vacuum conduit extending from a first end to a second end of the shank. The shank is adapted for cooperative engagement with the suction part at the second end, and the shank has a plate at the second end to support the suction part. The suction part has a surface for contacting a semiconductor chip during pick-and place operation. According to the invention, the suction part is made of an elastically deformable conductive or non-conductive material. In various embodiments, the chip contacting surface of the elastically deformable suction part flat overall, or is concave, of has a flat central region and concave regions.
    • 一种真空接合工具,用于将半导体芯片拾取和接合到基板上或预先安装的模具上以形成模具堆叠,包括柄和抽吸部分。 柄具有从柄的第一端延伸到第二端的真空管。 柄部适于在第二端处与吸入部分协作地接合,并且柄部在第二端具有支撑抽吸部分的板。 抽吸部分具有用于在拾取和放置操作期间接触半导体芯片的表面。 根据本发明,抽吸部分由可弹性变形的导电或非导电材料制成。 在各种实施例中,可弹性变形的吸入部分的平坦的中心区域和凹入区域的整体平坦或凹入的平坦的芯片接触表面。
    • 9. 发明授权
    • DBG system and method with adhesive layer severing
    • DBG系统和粘合层切断方法
    • US07420263B2
    • 2008-09-02
    • US11374377
    • 2006-03-13
    • Seung Wook ParkHyun Jin Park
    • Seung Wook ParkHyun Jin Park
    • H01L23/544
    • H01L21/78Y10T156/1052
    • An array of grooves (23) is formed in a first side (12) of a wafer (10) during a wafer processing method. A back grinding tape (16) is adhered to the first side. An amount of material is removed from the second side (20) of the wafer. An adhesive layer (30) is applied to the second side. Dicing tape (24) is applied to the adhesive layer to create a first wafer assembly (32). The first wafer assembly is supported on a support surface (34) with the dicing tape facing the support surface and the back grinding tape exposed. The back grinding tape is removed and the adhesive layer is severed through the array of grooves to create individually removable die (28).
    • 在晶片处理方法中,在晶片(10)的第一侧(12)中形成有凹槽(23)的阵列。 后研磨带(16)粘附到第一侧。 从晶片的第二侧(20)去除一定量的材料。 粘合剂层(30)施加到第二侧。 将切割带(24)施加到粘合剂层以形成第一晶片组件(32)。 第一晶片组件被支撑在支撑表面(34)上,其中切割带面向支撑表面并且后研磨带暴露。 去除后研磨带,并且通过凹槽阵列切断粘合剂层以形成单独可移除的模具(28)。