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    • 2. 发明授权
    • Titanium alloy vacuum and vacuum part
    • 钛合金真空和真空部分
    • US06841265B2
    • 2005-01-11
    • US10312701
    • 2002-03-18
    • Hiroki KurisuMitsuru MatsuuraSetsuo YamamotoMasaki HesakaAtsushi Takemura
    • Hiroki KurisuMitsuru MatsuuraSetsuo YamamotoMasaki HesakaAtsushi Takemura
    • B01J3/00B01J3/03C22C14/00C23C8/12C23C8/16C23C16/44B23P15/00
    • C23C8/16C22C14/00Y10S428/923Y10T428/12993
    • The objective of the present invention is to provide a titanium alloy vacuum container and vacuum parts that can easily achieve an ultra-high vacuum in a short time through vacuum evacuation.The titanium alloy of the titanium alloy vacuum container and vacuum parts has a compact structure composed of fine grains, each having a size of approximately not more than 10 μm, with a surface that is exposed to at least vacuum being set to have a surface roughness of not more than 50 nm; and in this structure, preferably, the surface roughness thereof may be set to not more than 10 nm, the titanium alloy may have a hardness in a range of not less than 230 Hv to not more than 310 Hv, and the titanium alloy may have a passivity surface film made by a thin titanium oxide layer or nitride layer that is formed on the surface thereof. The titanium alloy, which is desirably used in such titanium alloy vacuum container and vacuum parts, contains 0.3 wt. % to 0.5 wt. % of iron and 0.3 wt. % to 0.5 wt. % of oxygen, and the remainder thereof is made from Ti obligatory impurities.
    • 本发明的目的是提供一种钛合金真空容器和真空部件,其可以通过真空排气在短时间内容易地实现超高真空。钛合金真空容器和真空部件的钛合金具有紧凑的结构 由细颗粒组成,每个细颗粒具有大约不超过10μm的尺寸,其中至少暴露于真空的表面被设定为具有不大于50nm的表面粗糙度; 在该结构中,优选其表面粗糙度可以设定为不大于10nm,钛合金的硬度可以在230Hv以上且不高于310Hv的范围内,并且钛合金可以具有 由形成在其表面上的薄氧化钛层或氮化物层制成的无源表面膜。 希望用于这种钛合金真空容器和真空部件中的钛合金含有0.3wt。 %至0.5wt。 铁含量为0.3% %至0.5wt。 的氧气,其余部分由Ti强制性杂质制成。