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1. 发明授权

US10468220B1 Indirectly heated cathode ion source assembly 有权
公开(公告)号：US10468220B1
公开(公告)日：2019-11-05
申请号：US16185358
申请日：2018-11-09
申请人： iON Technology Solutions
发明人： Manuel A. Jerez , Carlos F. M. Borges , Amnon Parizat
IPC分类号： H01J37/08 , H01J27/18 , H01J27/08 , H01J37/32 , H05H1/46
摘要： The indirectly heated cathode ion source assembly employs a cathode having a cup shaped body with a base and a cylindrical periphery, a thermal barrier having a plurality of cylindrical foils concentric to the cathode to reduce thermal loss; and a holder receiving the cathode and the thermal barrier in concentric relation.

2. 发明授权

US08253334B2 Ion source 有权
公开(公告)号：US08253334B2
公开(公告)日：2012-08-28
申请号：US12804277
申请日：2010-07-19
申请人： Manuel A. Jerez
发明人： Manuel A. Jerez
IPC分类号： H01J27/08 , H01J61/04 , H01J1/88
CPC分类号： H01J27/08 , H01J37/08 , H01J2237/061 , H01J2237/082 , H01J2237/31701
摘要： A cathode sub-assembly is comprised of a retainer, a cathode and a collar, each of which has smooth unthreaded surfaces that slidably engage each other. A shield serves to hold the sub-assembly in a support plate. The cathode projects from the sub-assembly into an arc chamber with a tortuous path created therebetween for passage of a plasma flow.

3. 发明授权

US10217600B1 Indirectly heated cathode ion source assembly 有权
公开(公告)号：US10217600B1
公开(公告)日：2019-02-26
申请号：US15788428
申请日：2017-10-19
申请人： Carlos F. M. Borges , Manuel A. Jerez , Amnon Parizat
发明人： Carlos F. M. Borges , Manuel A. Jerez , Amnon Parizat
IPC分类号： H01J37/08 , H01J37/317
摘要： The indirectly heated cathode ion source assembly employs a cathode cup unit and filament arrangement wherein the filament has a flat face spaced from a tungsten disc-shaped body and is disposed in a space that is surrounded by a thermal barrier to reduce thermal losses. The thermal barrier is formed by a plurality of concentric foils that are closely spaced.

4. 发明授权

US09159526B1 Plasma arc chamber 有权
标题翻译：等离子弧室
公开(公告)号：US09159526B1
公开(公告)日：2015-10-13
申请号：US14222147
申请日：2014-03-21
申请人： Manuel A. Jerez , Carlos F. M. Borges
发明人： Manuel A. Jerez , Carlos F. M. Borges
IPC分类号： H01J17/26 , H01J37/04 , H05H1/34
CPC分类号： H05H1/34 , H01J37/08 , H01J37/3171 , H01J37/32467 , H01J2237/061 , H01J2237/16 , Y10T29/49002
摘要： The plasma arc chamber is made in part of a one piece base fabricated from 95.95% pure tungsten having four rigid walls defining a rectangular central opening. A bottom plate closes the bottom of the base and a cover with a slit for the passage of an ion beam closes the top of the base. Liners are fitted into the bottom plate, the top of base and against the four walls of the base.
摘要翻译：等离子体电弧室是由95.95％纯钨制成的一体式基座的一部分，其具有限定矩形中心开口的四个刚性壁。底板封闭基座的底部，并且具有用于离子束通过的狭缝的盖封闭基座的顶部。衬里装配到底板，底座的顶部和底座的四个墙壁上。

5. 发明授权

US08319410B2 Cathode ion source 有权
标题翻译：阴极离子源
公开(公告)号：US08319410B2
公开(公告)日：2012-11-27
申请号：US12655347
申请日：2009-12-29
申请人： Manuel A. Jerez
发明人： Manuel A. Jerez
IPC分类号： H01J27/00 , H01J19/42 , H01J19/44
CPC分类号： H01J37/08 , H01J27/08 , H01J2237/061 , H01J2237/082
摘要： The filament clamp assembly has a pair of bifurcated clamps to hold the connecting leads of a filament within a cavity of a cathode of a separate cathode assembly. The filament clamp assembly is mounted on the insulator block in self-aligning relation. The cathode assembly has a tungsten cathode with an internal cavity to receive the filament that is secured within a retainer shield made of one of tungsten, molybdenum and graphite by a threaded graphite cylindrical collar.
摘要翻译：灯丝夹具组件具有一对分叉夹具，以将灯丝的连接引线保持在单独的阴极组件的阴极的空腔内。灯丝夹具组件以自对准关系安装在绝缘块上。阴极组件具有带有内部空腔的钨阴极，用于接收通过螺纹石墨圆柱形套环固定在由钨，钼和石墨之一制成的保持器屏蔽内的灯丝。

6. 发明授权

US09793094B2 Extraction electrode 有权
公开(公告)号：US09793094B2
公开(公告)日：2017-10-17
申请号：US14222953
申请日：2014-03-24
申请人： Manuel A. Jerez , Carlos F. M. Borges
发明人： Manuel A. Jerez , Carlos F. M. Borges
IPC分类号： H01J3/14 , H01J37/317 , H01J37/08
CPC分类号： H01J37/3171 , H01J37/08 , H01J2237/032
摘要： The extraction electrode has a pair of sub-assemblies that define a gap. Each sub-assembly has a suppression plate and ground plate secured together in spaced relation by pairs of insulating assemblies. A plate assembly extends perpendicularly from the ground plate. The gap between the subassemblies is set by tabs on a centering fixture extension.

7. 发明授权

US09006689B2 Source bushing shielding 有权
标题翻译：源套管屏蔽
公开(公告)号：US09006689B2
公开(公告)日：2015-04-14
申请号：US13850557
申请日：2013-03-26
申请人： Manuel A. Jerez , Carlos F. M. Borges , Charles W. Lisa , Alejandro M. Centeno
发明人： Manuel A. Jerez , Carlos F. M. Borges , Charles W. Lisa , Alejandro M. Centeno
IPC分类号： G21K1/00 , H01J37/317 , H01J37/248 , H05G1/04
CPC分类号： G21K1/00 , H01J37/248 , H01J37/3171 , H01J2237/0206 , H01J2237/022 , H01J2237/0266 , H01J2237/032 , H01J2237/038 , H01J2237/08 , H05G1/04
摘要： The source bushing assembly has a source bushing having an internal vacuum side and an external atmosphere side, a first shield of annular shape disposed at one end of the source bushing in spaced concentric relation to reduce formation of an electrically conductive coating on the source bushing, a second shield of annular shape disposed at an opposite end of the source bushing in spaced concentric relation to prevent arcing on the source bushing and an internally disposed concentric X-ray shield.
摘要翻译：源套管组件具有源筒套管，其具有内部真空侧和外部气氛侧，环形形状的第一屏蔽件以间隔开的同心关系设置在源衬套的一端处，以减少源套管上的导电涂层的形成，环形的第二屏蔽件以间隔开的同心关系设置在源衬套的相对端处，以防止源极衬套上的电弧和内部设置的同心X射线屏蔽。

8. 发明授权

US08796649B2 Ion implanter 有权
标题翻译：离子注入机
公开(公告)号：US08796649B2
公开(公告)日：2014-08-05
申请号：US13689148
申请日：2012-11-29
申请人： Manuel A. Jerez , Carlos F. Borges
发明人： Manuel A. Jerez , Carlos F. Borges
IPC分类号： H01J37/317 , H01L21/265 , H01J27/08 , H01J1/88 , H01J7/26
CPC分类号： H01J27/08 , H01J37/08 , H01J37/3171 , H01J2237/002 , H01J2237/045 , H01J2237/083
摘要： The support and electrode assemblies of the ion implanter are cooled by circulating a coolant through these parts during operation. The support for the arc chamber includes a one piece block of aluminum through which coolant passes and a hollow rectangular post on which the arc chamber sits with a space therebetween.
摘要翻译：离子注入机的支撑和电极组件在运行期间通过这些部件循环冷却。电弧室的支撑件包括一块铝制的冷却剂通过的块和一个中空的矩形柱，电弧室在其上放置一个空间。

9. 发明授权

US08653475B1 Ion source 有权
标题翻译：离子源
公开(公告)号：US08653475B1
公开(公告)日：2014-02-18
申请号：US13649564
申请日：2012-10-11
申请人： Manuel A. Jerez , Carlos F. Borges
发明人： Manuel A. Jerez , Carlos F. Borges
IPC分类号： H01J27/00
CPC分类号： H01J27/00 , H01J27/022 , H01J27/08 , H01J37/04 , H01J37/08 , H01J2237/006 , H01J2237/082
摘要： An arc chamber assembly for an ion source comprising a housing having a base and at least one pair of side walls extending upwardly from opposite sides of the base to define an arc chamber, the base having a plurality of channels extending to each sidewall; an inlet port connected to the base for delivering a flow of gas into the channels; a bottom liner having at least one pair of notches in each of two opposite side edges thereof and disposed in the housing in spaced parallel relation to the base and opposite the channels for conducting a flow of gas from the inlet port towards the sidewalls, each notch being in communication with a respective channel of the plurality of channels to pass gas upwardly into the arc chamber; and a pair of side liners, each side liner being disposed in the housing in spaced parallel relation to a respective one of the side walls for conducting a flow of gas between the base and the bottom liner, each side liner having at least one pair of slots to horizontally pass gas into the arc chamber.
摘要翻译： 1.一种用于离子源的电弧室组件，包括壳体，所述壳体具有基部和从所述基部的相对侧向上延伸的至少一对侧壁，以限定电弧室，所述基部具有延伸到每个侧壁的多个通道; 连接到基座的入口端口，用于将气流输送到通道中; 底部衬套在其两个相对的侧边缘中的每一个中具有至少一对凹口，并且以与腔体平行的方式设置在壳体中并与通道相对，用于将气体从入口端口朝向侧壁传导，与多个通道的相应通道连通以将气体向上流入电弧室; 以及一对侧衬，每个侧衬与所述侧壁中的相应的一个侧壁间隔开设置在所述壳体中，用于在所述底座和所述底衬套之间进行气体流动，每个侧衬里具有至少一对水槽将气体水平地通入电弧室。

10. 发明授权

US08658986B1 Ion source assembly 有权
标题翻译：离子源组件
公开(公告)号：US08658986B1
公开(公告)日：2014-02-25
申请号：US13649652
申请日：2012-10-11
申请人： Manuel A. Jerez , Carlos F. M. Borges
发明人： Manuel A. Jerez , Carlos F. M. Borges
IPC分类号： H01J27/00
CPC分类号： H01J27/00 , H01J27/08 , H01J37/08 , H01J2237/31701
摘要： The second repeller assembly includes a flat plate and two sleeves through which the legs of a filament pass in electrically insulated manner. The clamp assembly for the filament includes a pair of strap assemblies with three straps each for electrically connecting the clamps and filament to an electrical feed. The straps are in contact with opposite flat sides of a terminal pin.
摘要翻译：第二推斥器组件包括平板和两个套筒，细丝的腿通过该套筒以电绝缘的方式穿过。用于灯丝的夹具组件包括一对带组件，其具有三个带子，用于将夹具和灯丝电连接到电源。带子与端子销的相对的平坦侧面接触。

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