会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Apparatus for processing exhaust fluid
    • 废气处理装置
    • US09494065B2
    • 2016-11-15
    • US13976328
    • 2011-12-27
    • Sang-Yun LeeMyung Keun NohHeaungshig Oh
    • Sang-Yun LeeMyung Keun NohHeaungshig Oh
    • F01N3/08B01D53/32H01L21/67H05H1/24
    • F01N3/0892B01D53/32B01D2257/2025B01D2257/2027B01D2257/2047B01D2258/0216B01D2259/818H01L21/67017H05H1/2406H05H2001/2456H05H2245/1215
    • Provided is an apparatus for processing exhaust fluid in which a fluid generated in a process chamber of an apparatus for manufacturing a semiconductor, a display panel, or a solar cell is ejected to the outside. The apparatus for processing exhaust fluid includes: a vacuum pump that is connected to the process chamber, vacuumizes the inside of the process chamber, and ejects the fluid generated in the process chamber to the outside; and a plasma reactor in which plasma is formed and the fluid generated in the process chamber decomposes, wherein the plasma reactor includes: an insulating conduit that is provided between the process chamber and the vacuum pump and provides a space in which the fluid decomposes; at least one electrode unit that is provided on the outer circumferential surface of the conduit and receives a voltage to form the plasma; a buffer unit that is formed of an electrically conductive elastic substance and is disposed between the conduit and the electrode unit to attach the conduit and the electrode unit closely together; and an external pipe into which the conduit, electrode unit and buffer unit are inserted with sealing flanges provided on both end portions of the conduit and external pipe to seal a space between the conduit and the external pipe to prevent fluid process by-products from leaking out should the conduit crack or is damaged.
    • 本发明提供一种处理废液的装置,其中在半导体制造装置,显示面板或太阳能电池的处理室中产生的流体喷射到外部。 用于处理废气流体的装置包括:真空泵,其连接到处理室,对处理室的内部进行真空化,并将处理室中产生的流体喷射到外部; 以及其中形成等离子体并且在处理室中产生的流体分解的等离子体反应器,其中等离子体反应器包括:设置在处理室和真空泵之间并提供流体分解的空间的绝缘导管; 至少一个电极单元,其设置在所述导管的外周面上并接收电压以形成所述等离子体; 缓冲单元,其由导电弹性物质形成并且设置在所述导管和所述电极单元之间,以将所述导管和所述电极单元紧密地附接在一起; 以及管道,电极单元和缓冲单元插入其中的外管,其中设置在导管和外管的两端部上的密封凸缘以密封导管和外管之间的空间,以防止流体加工副产物泄漏 如果管道破裂或损坏。
    • 9. 发明申请
    • METHOD AND SYSTEM FOR COOLING HOT GASES BY WATER INJECTION
    • 通过注水冷却热气的方法和系统
    • US20110155349A1
    • 2011-06-30
    • US13061043
    • 2009-09-07
    • Jens Dall Bentzen
    • Jens Dall Bentzen
    • F28D15/00
    • F23J15/04B01D47/06B01D53/10B01D2251/404B01D2253/102B01D2257/2025B01D2257/2064B01D2257/30B01D2259/40F23J15/06F23J2219/40F23J2219/80Y02E20/363Y02P70/34
    • Hot gas, produced in a thermal reactor (1), can be cooled in a cylindrical cooling reactor (4) by leading the gas tangentially into the evaporative cooler through and inlet duct (2) whereby the gas perform a rotary movement in the evaporative cooler, and by injection water droplets into the gas at one or more injection zones (3) in such an amount and in such a way that the gas temperature due to water evaporation is reduced to below 400° C. The dry cooled gas can now leave the reactor through the outlet duct (5) and be cleaned for particles in a dry filter (7) and energy can be recovered in a condensing unit (8). Hereby, a compact cooling, cleaning and energy recovery system is obtained, which is cheap and simple and has low maintenance costs, and which moreover has a high efficiency degree and good environmental qualities. The method can be used for a broad spectrum of fuels and conversion technologies.
    • 在热反应器(1)中生产的热气体可以通过将气体切向进入蒸发冷却器和入口管道(2)而在圆柱形冷却反应器(4)中冷却,由此气体在蒸发冷却器中进行旋转运动 并且通过以一定量的量将注入水滴注入到一个或多个注入区(3)中的气体中,并且使得由于水蒸发引起的气体温度降低至低于400℃。干燥的冷却气体现在可以离开 通过出口管道(5)的反应器被清洁以用于干燥过滤器(7)中的颗粒,并且能量可以在冷凝单元(8)中回收。 因此,获得了一种紧凑的冷却,清洁和能量回收系统,其便宜且简单,维护成本低,而且具有高效率和良好的环境质量。 该方法可用于广泛的燃料和转化技术。