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    • 10. 发明申请
    • LASER BEAM SPOT SHAPE DETECTION METHOD
    • 激光光束形状检测方法
    • US20160045980A1
    • 2016-02-18
    • US14823589
    • 2015-08-11
    • DISCO CORPORATION
    • Kenji AsanoKeiji NomaruJoel KoerwerNaotoshi KiriharaYudai HataYusaku Ito
    • B23K26/073B23K26/08B23K26/03B23K26/06B23K26/067
    • B23K26/705
    • Disclosed herein is a laser beam spot shape detection method for detecting a spot shape of a laser beam oscillated by laser beam oscillator and collected by a condenser in a laser machining apparatus, the laser beam spot shape detection method including: a concave mirror holding step of holding a concave mirror having a spherical face forming a reflecting face with a chuck table; a focal point positioning step of positioning the focal point of the condenser in a proximity including the center of the spherical face forming the reflecting face of the concave mirror held by the chuck table; a laser beam irradiation step of irradiating a laser beam onto the held concave mirror, and an imaging step of capturing images of reflected light with a camera.
    • 本发明公开了一种激光束点形状检测方法,用于检测由激光束振荡器振荡并由激光加工装置中的冷凝器收集的激光束的光斑形状,该激光束点形状检测方法包括:凹面镜保持步骤 保持具有形成具有卡盘台的反射面的球面的凹面镜; 焦点定位步骤,将聚光器的焦点定位在包括形成由卡盘台保持的凹面镜的反射面的球面的中心附近; 将激光束照射到保持的凹面镜上的激光束照射步骤,以及用相机拍摄反射光的图像的成像步骤。