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1. 发明申请

US20180134612A1 CERAMIC COMPONENT FORMED FROM CERAMIC PORTIONS BONDED TOGETHER WITH A HALOGEN PLASMA RESISTANT BONDING AGENT 审中-公开
公开(公告)号：US20180134612A1
公开(公告)日：2018-05-17
申请号：US15865720
申请日：2018-01-09
申请人： Applied Materials, Inc.
发明人： Jennifer Y. Sun , Ren-Guan Duan , Kenneth S. Collins
IPC分类号： C03C10/16 , C03C3/247
CPC分类号： C03C10/16 , C03C3/247 , C03C3/325 , C03C8/24 , C03C2204/00 , C04B35/119 , C04B37/005 , C04B2235/3201 , C04B2235/3206 , C04B2235/3225 , C04B2235/445 , C04B2235/5445 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/80 , C04B2237/06 , C04B2237/064 , C04B2237/08 , C04B2237/10 , C04B2237/34 , C04B2237/343 , C04B2237/60 , C04B2237/708 , C04B2237/72 , H01L21/6719
摘要： A bonded ceramic component which is resistant to reactive halogen-containing plasmas, said component comprising ceramic portions which are bonded together by a bonding material which includes an oxyfluoride glass-ceramic-comprising transition area between interfaces of the ceramic portions, where the transition area includes form at least 0.1 volume % amorphous phase up to about 50 volume % amorphous phase.

2. 发明申请

US20100119844A1 Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas 有权
标题翻译：用于粘接暴露于等离子体的陶瓷部件的耐腐蚀粘合剂
公开(公告)号：US20100119844A1
公开(公告)日：2010-05-13
申请号：US12291747
申请日：2008-11-12
申请人： Jennifer Y. Sun , Ren-Guan Duan , Kenneth S. Collins
发明人： Jennifer Y. Sun , Ren-Guan Duan , Kenneth S. Collins
IPC分类号： B32B18/00 , C09D1/00 , B32B37/00
CPC分类号： C03C10/16 , C03C3/247 , C03C3/325 , C03C8/24 , C03C2204/00 , C04B35/119 , C04B37/005 , C04B2235/3201 , C04B2235/3206 , C04B2235/3225 , C04B2235/445 , C04B2235/5445 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/80 , C04B2237/06 , C04B2237/064 , C04B2237/08 , C04B2237/10 , C04B2237/34 , C04B2237/343 , C04B2237/60 , C04B2237/708 , C04B2237/72 , H01L21/6719
摘要： Embodiments of the invention relate to component structures which are useful as apparatus in plasma processing chambers. Portions of the component structures are bonded together using oxyfluoride-comprising glazes, glass ceramics, and combinations thereof. The bonding material is resistant to halogen-containing plasmas and exhibits desirable mechanical properties.
摘要翻译：本发明的实施例涉及可用作等离子体处理室中的装置的部件结构。使用含氟氟化物的釉料，玻璃陶瓷及其组合将部件结构的部分粘结在一起。粘合材料对含卤素等离子体具有耐受性，并且具有所需的机械性能。

3. 发明授权

US5977556A Radiation imaging device with photostimulable phosphor 失效
标题翻译：具有可光激发荧光粉的辐射成像装置
公开(公告)号：US5977556A
公开(公告)日：1999-11-02
申请号：US156013
申请日：1998-09-17
申请人： Jianorong Qiu , Kazuyuki Hirao
发明人： Jianorong Qiu , Kazuyuki Hirao
IPC分类号： G01T1/10 , C03C3/095 , C03C3/15 , C03C3/17 , C03C3/23 , C03C3/247 , C03C3/32 , C03C4/00 , C03C4/12 , G01N23/04 , C09K11/08 , G21K4/00
CPC分类号： C03C4/12 , C03C3/095 , C03C3/15 , C03C3/17 , C03C3/247 , C03C3/325 , C03C4/0078
摘要： A radiation imaging device including a photostimulable phosphor which is a glass including active cations that release light having a wavelength in the blue colour or ultra-violet region when those parts of the glass which have been stimulated by radiation, and a radiation source to irradiate the phosphor and an excitation light source to photostimulate the phosphor. The radiation source may be X-rays, .gamma.-rays, .alpha.-rays, .beta.-rays, electron beams, neutron beams, ion beams, ultra-violet rays having an energy equal to or greater than the band gap of the glass are excited by visible or infra-red light. Ce.sup.3+, Eu.sup.2+ can be used as the active cation, and are preferably included in an amount of 10 mole % or less of all the cations, and particularly preferably in an amount in the range of 0.001 to 2 mole %. A silicate glass, a borate glass, a phosphate glass, a mixed oxide glass consisting of at least two of a silicate, a borate and a phosphate, a halide glass, a halogen phosphate glass are used as the basic glass. The device has practical durability and mechanical strength and is suited to the recording and playback of radiation images.
摘要翻译：一种辐射成像装置，包括可光刺激性荧光体，其是包含活性阳离子的玻璃，所述活性阳离子在已经被辐射刺激的玻璃的那些部分上释放具有蓝色或紫外区域的波长的光，以及辐射源磷光体和激发光源来对磷光体进行光刺激。辐射源可以是X射线，γ射线，α-射线，β-射线，电子束，中子束，离子束，具有等于或大于玻璃带隙的能量的紫外线被激发通过可见或红外线。可以使用Ce 3+，Eu 2+作为活性阳离子，优选所有阳离子的含量为10摩尔％以下，特别优选为0.001〜2摩尔％。硅酸盐玻璃，硼酸盐玻璃，磷酸盐玻璃，由硅酸盐，硼酸盐和磷酸盐中的至少两种组成的混合氧化物玻璃，卤化物玻璃，卤素磷酸盐玻璃用作碱性玻璃。该装置具有实用的耐久性和机械强度，适用于放射图像的记录和回放。

4. 发明授权

US5867515A Halide glass compositions 失效
标题翻译：卤化物玻璃组合物
公开(公告)号：US5867515A
公开(公告)日：1999-02-02
申请号：US507374
申请日：1995-10-05
申请人： Wayne George Jordan , Animesh Jha , Steven Terrence Davey
发明人： Wayne George Jordan , Animesh Jha , Steven Terrence Davey
IPC分类号： G02B6/00 , C03C3/32 , C03C4/00 , C03C4/12 , H01S3/17
CPC分类号： C03C4/0071 , C03C3/325 , Y10S501/904
摘要： This invention relates to halide glasses which have particular utility as hosts for rare earth elements in order to provide optical amplification by laser activity. The glasses are characterized in that the metal content is similar to conventional ZBLAN glasses except that it has been discovered that the replacement of Al by Y and In and the use of more than one alkali metal fluoride, e.g., NaF, CsF and LiF, has synergistic benefits. The synergistic benefits are good lasing performance (due to the low content of aluminum) and good stability in spite of the low content of aluminum. Pr.sup.3+ constitutes a good lasing species for amplifying telecommunications signals at 1300 nm using pump radiation at 1020 nm.
摘要翻译： PCT No.PCT / GB94 / 00346 Sec。 371日期1995年10月5日第 102（e）日期1995年10月5日PCT 1994年2月22日PCT PCT。公开号WO94 / 19242 日期1994年9月1日本发明涉及具有特殊用途的卤化物玻璃，用作稀土元素的主体，以通过激光活性提供光学放大。该玻璃的特征在于金属含量与常规的ZBLAN眼镜类似，只是已经发现用Y和In替代Al以及使用多于一种的碱金属氟化物，例如NaF，CsF和LiF，具有协同效益。协同效应是良好的激光性能（由于铝的含量低）和良好的稳定性，尽管铝含量低。 Pr3 +构成了一种良好的激光物种，用于在1020 nm处使用泵浦辐射，在1300 nm处放大电信信号。

5. 发明授权

US5278107A Optical parts and equipment using infrared athermal glasses 失效
标题翻译：使用红外线无热玻璃的光学部件和设备
公开(公告)号：US5278107A
公开(公告)日：1994-01-11
申请号：US800917
申请日：1991-11-27
申请人： Paul A. Tick , Seiko Mitachi
发明人： Paul A. Tick , Seiko Mitachi
IPC分类号： C03C3/32 , C03C4/00 , C03C13/04 , H01S3/08 , H01S3/17
CPC分类号： H01S3/17 , C03C13/042 , C03C3/325 , C03C4/0071 , H01S3/08072
摘要： Optical parts and optical equipment, including lenses, mirrors and laser media made of athermal glasses having compositions comprising 0-13 mol % CdO, 9-24 mol % CdF.sub.2, 5-10 mol % LiF, 30-34.5 mol % AlF.sub.3 28-33.5 mol % PbF.sub.2, 0-4 mol % KF, 0-6.5 mol % YF.sub.3, and 0-2 mol % LaF.sub.3 and having little or no optical path length change as a function of temperature in the infrared region of 1.mu.m to 5.mu.m.
摘要翻译：光学部件和光学设备，包括透镜，反射镜和由具有0-13mol％CdO，9-24mol％CdF2，5-10mol％LiF，30-34.5mol％AlF328-33.5mol ％PbF 2，0-4mol％KF，0-6.5mol％YF 3和0-2mol％LaF 3，并且在1（my）m至5的红外区域中作为温度的函数具有很小或不具有光路长度变化（我）m。

6. 发明授权

US5145508A Method of making fluoride glass using barium .beta.-diketones 失效
标题翻译：使用钡β-二酮制造氟化玻璃的方法
公开(公告)号：US5145508A
公开(公告)日：1992-09-08
申请号：US684070
申请日：1991-03-11
申请人： Kazuo Fujiura , Yasutake Ohishi , Michiya Fujiki , Terutoshi Kanamori , Shiro Takahashi
发明人： Kazuo Fujiura , Yasutake Ohishi , Michiya Fujiki , Terutoshi Kanamori , Shiro Takahashi
IPC分类号： C03B19/14 , C03B37/018 , C03C1/00 , C03C3/32 , C03C13/04
CPC分类号： C03B37/01861 , C03B19/1415 , C03B19/1476 , C03B37/01807 , C03B37/01815 , C03C1/00 , C03C13/042 , C03C3/325 , C03B2201/82 , C03B2207/30 , C03B2207/81 , C03B2207/90 , Y10S65/16
摘要： A method for preparing a homogenous fluoride glass containing high purity BaF.sub.2 through the CVD process using a gaseous mixture containing a barium .beta.-diketonate complex service as a first starting material and represented by the following general formula (1) of: ##STR1## where (i) R and R' are each --C(CH.sub.3).sub.3 ; or (ii) R is CH.sub.2 CH.sub.2 CH.sub.3 and R' is --C(CH.sub.3).sub.3 ; or (iii) R and R' are each CF.sub.3 ;a gaseous or vaporizable compound of the metallic element constituting said fluoride glass, the gaseous or vaporizable compound serving as a second starting material; and a fluorine-containing gas serving as fluorinating agent. Further provided is a process for preparing a perform for a fluoride optical fiber which is low in transmission loss, by depositing the fluoride glass over the interior wall of a cylindrical tube or the wall of rod-like glass substrate through the CVD process following by collapsing.
摘要翻译：一种通过CVD法制备含有高纯度BaF2的均匀氟化物玻璃的方法，该方法使用含有β-二酮化合物复合物的气体混合物作为第一起始原料并由以下通式（1）表示：）其中（i）R和R'各自为-C（CH 3）3; 或（ii）R是CH 2 CH 2 CH 3，R'是-C（CH 3）3; 或（iii）R和R'各自为CF 3; 构成所述氟化物玻璃的金属元素的气态或可汽化化合物，作为第二原料的气态或可汽化化合物; 和作为氟化剂的含氟气体。另外提供了一种通过CVD法将氟化物玻璃沉积在圆柱形管的内壁或棒状玻璃基板的壁上，通过沉积氟化物玻璃来制备传输损耗低的氟化物光纤的方法。

7. 发明授权

US5071460A Process for the preparation of fluoride glass and process for the preparation of optical fiber preform using the fluoride glass 失效
标题翻译：氟化玻璃的制备方法和使用氟玻璃制备光纤预制件的方法
公开(公告)号：US5071460A
公开(公告)日：1991-12-10
申请号：US317679
申请日：1989-03-01
申请人： Kazuo Fujiura , Yasutake Ohishi , Michiya Fujiki , Terutoshi Kanamori , Shiro Takahashi
发明人： Kazuo Fujiura , Yasutake Ohishi , Michiya Fujiki , Terutoshi Kanamori , Shiro Takahashi
IPC分类号： C03B19/14 , C03B37/018 , C03C1/00 , C03C3/32 , C03C13/04
CPC分类号： C03B37/01807 , C03B19/1415 , C03B19/1476 , C03B37/01815 , C03B37/01861 , C03C1/00 , C03C13/042 , C03C3/325 , C03B2201/82 , C03B2207/30 , C03B2207/81 , C03B2207/90 , Y10S65/16
摘要： Provided is a process for preparing a homogeneous fluoride glass containing high purity BaF.sub.2 through the CVD process characterized in that the used gaseous mixture comprising: a barium .beta.-diketonate complex serving as a first starting material and represented by the following general formula (1) of: ##STR1## wherein R is an alkyl group having 1 to 7 carbon atoms, R' is a substituted alkyl group having fluorine atoms substituting hydrogen atoms and represented by C.sub.n F.sub.2n+1 where n is an integer of from 1 to 3;a gaseous or vaporizable compound of the metallic element constituting said fluoride glass, the gaseous or vaporizable compound serving as a second starting material; and a fluorine-containing gas serving as fluorinating agent. Further provided is a process for preparing a preform for a fluoride optical fiber which is low in transmission loss, by depositing the fluoride glass over the interior wall of a cylindrical tube or the wall of rod-like glass substrate through the CVD process followed by collapsing.

8. 发明授权

US4761387A Fluoride glass 失效
标题翻译：氟化玻璃
公开(公告)号：US4761387A
公开(公告)日：1988-08-02
申请号：US19618
申请日：1987-02-27
申请人： Minoru Tokida , Tetsuro Izumitani , Toshiharu Yamashita , Kiyotaka Miura
发明人： Minoru Tokida , Tetsuro Izumitani , Toshiharu Yamashita , Kiyotaka Miura
IPC分类号： C03C3/32 , C03C4/10 , C03C13/04 , G02B6/10
CPC分类号： G02B6/102 , C03C13/042 , C03C3/325 , Y10S501/904
摘要： A fluoride glass comprising AlF.sub.3, ZrF.sub.4 and/or HfF.sub.4, and at least one compound selected from CaF.sub.2, SrF.sub.2 and BaF.sub.2, and a fluoride glass comprising these components and at least one additional component selected from MgF.sub.2, YF.sub.3, NaF and other like compounds have the advantages that there hardly occurs crystallization in the production thereof, and that they are excellent in chemical durability, high in surface hardness, so that they can ideally serve as glass to be used for low loss optical fiber, infrared optical fiber for thermometer, infrared laser window, etc.
摘要翻译：包含AlF 3，ZrF 4和/或HfF 4的氟化物玻璃以及至少一种选自CaF 2，SrF 2和BaF 2的化合物以及包含这些组分的氟化物玻璃和至少一种选自MgF 2，YF 3，NaF和其它类似化合物的另外的组分，在其生产中几乎不发生结晶的优点，并且它们具有优异的化学耐久性，高表面硬度，因此它们可以理想地用作用于低损耗光纤的玻璃，用于温度计的红外光纤，红外线激光窗等

9. 发明授权

US4647545A Halogenated glasses 失效
标题翻译：卤化眼镜
公开(公告)号：US4647545A
公开(公告)日：1987-03-03
申请号：US467375
申请日：1983-02-17
申请人： Jacques Lucas , Marc Matecki , Michel Poulain , Marcel Poulain
发明人： Jacques Lucas , Marc Matecki , Michel Poulain , Marcel Poulain
IPC分类号： C03C3/32 , C03C4/10 , C03C13/04 , G02B6/00 , C03C3/12
CPC分类号： C03C3/325 , C03C13/041 , C03C13/042 , C03C3/32 , Y10S501/904
摘要： Halogenated glass comprising 20 to 90 mole percent of at least one of cadmium, manganese and zinc halide and a process for the preparation thereof.
摘要翻译：包含20〜90摩尔％的镉，锰和锌卤化物中的至少一种的卤化玻璃及其制备方法。

10. 发明授权

US4445755A Infrared transmitting optical wave guide 失效
标题翻译：红外发射光波导
公开(公告)号：US4445755A
公开(公告)日：1984-05-01
申请号：US358687
申请日：1982-03-16
申请人： Kazuya Ohsawa , Toshiaki Shibata , Kenichi Takahashi
发明人： Kazuya Ohsawa , Toshiaki Shibata , Kenichi Takahashi
IPC分类号： C03C3/32 , C03C13/04 , G02B6/00 , G02B6/10 , G02B5/172
CPC分类号： C03C3/325 , G02B6/102
摘要： Fluorozirconate glasses containing sodium fluoride and aluminum fluoride are used to improve an infrared transmitting fluoride glass optical wave guides thereby to obtain optical wave guides having high numerical aperture.
摘要翻译：使用含有氟化钠和氟化铝的氟锆酸盐玻璃来改善红外透射氟化物玻璃光波导，从而获得具有高数值孔径的光波导。

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