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    • 9. 发明申请
    • Metal Nitrides and Process for Production Thereof
    • 金属氮化物及其制造方法
    • US20080193363A1
    • 2008-08-14
    • US11573412
    • 2005-08-16
    • Hideto Tsuji
    • Hideto Tsuji
    • C01B21/00
    • C30B28/06C01B21/0632C01P2002/74C01P2002/76C01P2004/61C01P2004/62C01P2006/12C01P2006/60C01P2006/62C01P2006/63C01P2006/64C01P2006/80C09K11/621C30B7/00C30B29/403C30B29/406
    • To provide a method for efficiently producing a high quality metal nitride containing a small amount of impurities, particularly gallium nitride.A method for producing a metal nitride characterized by employing a container made of a nonoxide material. By using a nonoxide for a material of a container to be in contact with a raw metal or a metal nitride to be formed, reaction or adhesion of the raw metal or the metal nitride to be formed to the container can be avoided, and inclusion of oxygen derived from the material of the container can be prevented, whereby a high quality metal nitride having high crystallinity will be obtained. By securing a certain or larger supply amount and a certain or higher flow rate of the nitrogen source gas, the raw metal can be converted into a nitride with an extremely high conversion, and a metal nitride having a small amount of an unreacted raw metal remaining and containing a metal and nitrogen in a stoichiometric constant can be obtained with a high yield. The obtained metal nitride having a small amount of oxygen included and containing a metal and nitrogen in a stoichiometric constant, is very useful as a raw material for bulk crystal growth.
    • 提供一种有效地制造含有少量杂质,特别是氮化镓的高质量金属氮化物的方法。 一种金属氮化物的制造方法,其特征在于,使用由非氧化物构成的容器。 通过将非氧化物用于与要形成的原料金属或金属氮化物接触的容器材料,可以避免将待形成的原料金属或金属氮化物与容器的反应或粘合,并且包含 可以防止从容器的材料得到的氧,从而获得具有高结晶度的高品质的金属氮化物。 通过确保氮源气体的一定或更大的供给量和一定的或更高的流量,可以将原料金属转化为具有极高转化率的氮化物,并且剩余少量未反应的原料金属的氮化物 并且可以以高产率获得含有化学计量常数的金属和氮。 得到的含有少量氧的含有化学计量常数的金属和氮的金属氮化物作为本体晶体生长的原料是非常有用的。