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1. 发明授权

US09982997B2 Laser measurement system and method for measuring 21 GMEs 有权
公开(公告)号：US09982997B2
公开(公告)日：2018-05-29
申请号：US14895991
申请日：2015-01-22
申请人： Beijing Jiaotong University
发明人： Qibo Feng , Bin Zhang , Cunxing Cui
IPC分类号： G01B11/26 , G01B11/27 , G01B11/00
CPC分类号： G01B11/272 , G01B9/02003 , G01B9/02007 , G01B9/02021 , G01B11/002 , G01B21/042 , G01B2290/70
摘要： A laser measurement system for measuring up to 21 geometric errors, in which a six-degree-of-freedom geometric error simultaneous measurement unit and a beam-turning unit are mounted on either the clamping workpiece or the clamping tool, while an error-sensitive unit is mounted on the remaining one, the beam-turning unit has several switchable working postures and multi-component combinations in its installation state, it can split or turn the laser beam from the six-degree-of-freedom geometric error simultaneous measurement unit to the X, Y, and Z directions in a proper order, or the beam-turning unit can split or turn a beam from the error-sensitive unit to the six-degree-of-freedom geometric error simultaneous measurement unit. The present invention is of simple configuration and convenient operation. Up to 21 geometric errors of three mutual perpendicular linear motion guides are obtained by a single installation and step-by-step measurement.

2. 发明授权

US09837785B2 Polarization laser sensor 有权
公开(公告)号：US09837785B2
公开(公告)日：2017-12-05
申请号：US15140067
申请日：2016-04-27
申请人： SHENZHEN UNIVERSITY
发明人： Qiao Wen , Guowen Liang , Ji Li , Hanben Niu
IPC分类号： G01C19/66 , H01S3/08 , H01S3/10 , H01S3/083 , G01B9/02
CPC分类号： H01S3/08059 , G01B9/02003 , G01B9/02023 , G01B2290/70 , H01S3/06712 , H01S3/06791 , H01S3/08013 , H01S3/082 , H01S3/083 , H01S3/10061
摘要： Systems and apparatuses for a polarization laser sensor are disclosed. The polarization laser sensor can include a pump source, a common section, a reference section and a detection section. The common section is provided with a gain medium, and the detection section is provided with a sensing element configured to cause an optical path difference. The reference section and the detection section are connected to the common section though a first polarization splitting unit and a second polarization splitting unit. The common section is provided with an output unit or each of the reference section and the detection is provided with the output unit, the output unit is connected to a photoelectric detector through a light uniting unit, and a polarization rotation unit is disposed between the light uniting unit and the output unit.

3. 发明申请

US20150103356A1 Interferometer, System, and Method of Use 有权
标题翻译：干涉仪，系统和使用方法
公开(公告)号：US20150103356A1
公开(公告)日：2015-04-16
申请号：US14361106
申请日：2012-11-29
申请人： Jonathan D. Ellis , Josephus Wilhelmus Spronck
发明人： Jonathan D. Ellis , Josephus Wilhelmus Spronck
IPC分类号： G01B9/02 , G01B11/14
CPC分类号： G01B9/0207 , G01B9/02003 , G01B9/02015 , G01B9/02059 , G01B11/14 , G01B2290/45 , G01B2290/60
摘要： A compact, balanced, up to three degrees of freedom measuring interferometer which enables fiber delivery of an optical source without periodic nonlinearity, an interferometer system, and method for using an interferometer to measure up to three degrees of freedom is disclosed.
摘要翻译：公开了一种紧凑的，平衡的，高达三个自由度的测量干涉仪，其使光源不具有周期性非线性的光纤传送，干涉仪系统以及使用干涉仪测量高达三个自由度的方法。

4. 发明申请

US20150070685A1 MULTISCALE DISTANCE MEASUREMENT WITH FREQUENCY COMBS 有权
标题翻译：多频距离测量与频率COMBS
公开(公告)号：US20150070685A1
公开(公告)日：2015-03-12
申请号：US14371873
申请日：2013-01-23
申请人： KARLSRUHER INSTITUT FÜR TECHNOLOGIE
发明人： Christian Koos , Claudius Weimann , Juerg Leuthold
IPC分类号： G01B9/02 , G01P3/36 , G01B11/00 , G01B11/14
CPC分类号： G01B9/02008 , G01B9/02003 , G01B11/005 , G01B11/026 , G01B11/14 , G01P3/36 , G01P3/366 , G01S17/87
摘要： The invention relates to a method and a corresponding apparatus for measuring distance and optionally speed, in particular for multiscale distance measurement. The method comprises generating a first and a second frequency comb signal (201, 202), wherein the first and second frequency comb signals (201, 202) have different line spacings; a reference measurement comprising superimposing the at least one part of the first frequency comb signal (201) and at least one part of the second frequency comb signal (202) in a reference beam path (103) and detecting the superimposition signal propagated by the reference beam path; a first measurement comprising superimposing at least one part of the second frequency comb signal (202) on the at least one part of the first frequency comb signal (201), injecting the superimposition signal into a measurement beam path (104) and detecting the superimposition signal propagated by the measurement beam path; and determining the path difference between the reference beam path (103) and the measurement beam path (104) from the detected superimposition signals.
摘要翻译：本发明涉及一种用于测量距离和可选速度的方法和相应的装置，特别是用于多尺度距离测量。该方法包括产生第一和第二频率梳状信号（201,202），其中第一和第二频率梳状信号（201,202）具有不同的线间距; 参考测量包括将第一频率梳信号（201）的至少一部分和第二频梳组信号（202）的至少一部分叠加在参考光束路径（103）中并检测由参考信号传播的叠加信号光束路径第一测量包括将第二频率梳信号（202）的至少一部分叠加在第一频率梳信号（201）的至少一部分上，将叠加信号注入测量光路（104）并检测叠加信号由测量光路传播; 以及根据检测到的叠加信号确定参考光束路径（103）和测量光束路径（104）之间的路径差。

5. 发明申请

US20140160490A1 INTERFERENCE MEASURING APPARATUS AND INTERFERENCE MEASURING METHOD 审中-公开
标题翻译：干扰测量装置和干扰测量方法
公开(公告)号：US20140160490A1
公开(公告)日：2014-06-12
申请号：US14102734
申请日：2013-12-11
申请人： CANON KABUSHIKI KAISHA
发明人： Yuya Nishikawa
IPC分类号： G01B11/06
CPC分类号： G01B11/0675 , G01B9/02002 , G01B9/02003 , G01B9/02007 , G01B9/0207 , G01B9/02075 , G01B9/02082 , G01B9/02083 , G01B11/2441 , G01B11/303 , G01B2290/45 , G01B2290/50 , G01B2290/60
摘要： An interference measuring apparatus measuring a distance to a surface for inspection is provided. The interference measuring apparatus includes a light dividing unit that divides each of the plurality of light fluxes into light to be inspected and reference light; an objective lens that transmits light to be inspected; a photoelectric conversion element that receives interference light between the light to be inspected and the reference light for each of the plurality of light fluxes and output an interference signal obtained by converting the interference light into an electrical signal; and a calculation unit that calculates the distance to the surface to be inspected based on a phase obtained by subtracting a defocused wavefront from a phase component of a complex amplitude at the pupil position of the objective lens which transmitted light to be inspected for each of the plurality of light fluxes by using the interference signal.
摘要翻译：提供一种测量与表面距离进行检查的干涉测量装置。干涉测量装置包括：将多个光束中的每一个分成待检查的光和参考光的光分割单元; 用于透过要检查的光的物镜; 光电转换元件，其接收被检测光与所述多个光束中的每一个的所述基准光之间的干涉光，并输出通过将所述干涉光转换为电信号而获得的干涉信号; 以及计算单元，其基于通过从对于每个所述检测的透镜的被检测物体的瞳孔位置处的复数振幅的相位分量减去散焦波前而获得的相位来计算到被检查表面的距离通过使用干扰信号的多个光束。

6. 发明授权

US08670128B2 Profile measuring apparatus 有权
标题翻译：型材测量仪器
公开(公告)号：US08670128B2
公开(公告)日：2014-03-11
申请号：US13138247
申请日：2010-01-26
申请人： Masato Kannaka , Eiji Takahashi , Masakazu Kajita
发明人： Masato Kannaka , Eiji Takahashi , Masakazu Kajita
IPC分类号： G01B9/02
CPC分类号： G01B9/02021 , G01B9/02003 , G01B9/02027 , G01B11/06 , G01B11/2441 , G01B2290/65 , G01B2290/70
摘要： A shape determining device (X) splits the original light beam from a light source (Y) into two light beams, directs the light beams to the front and back surfaces of the object (1) to be determined, and performs optical heterodyne interference using the split light beams at the front and back surfaces of the object (1) to be determined. In the shape determining device (X), each of the split light beams is further split into a main light beam and a subordinate light beam, the subordinate light beam interferes with the main light beam at each of the front and back surfaces before and after the illumination of the object (1) to be determined, the signals after the interference are phase-detected, and the difference between the phases acquired by the phase detection is detected at each of the front and back surfaces of the object (1) to be determined. In the shape determining device (X), optical modulation for performing the optical heterodyne interference is performed before the optical heterodyne interference of the split light beams after the split light beams are directed to the front and back surfaces of the object (1) to be determined. Furthermore, in the shape determining device (X), a measurement optical system before the phase detection and after the split light beams are directed to the front and back surfaces of the object (1) to be determined is maintained integrally.
摘要翻译：形状确定装置（X）将来自光源（Y）的原始光束分成两束，将光束引导到物体（1）的正面和背面以确定，并且使用在待确定物体（1）的前表面和后表面处的分束光束。在形状确定装置（X）中，每个分束光束进一步被分割成主光束和从属光束，从属光束在前后表面的每一个前后干涉主光束要确定的物体（1）的照明，干涉后的信号被相位检测，并且通过相位检测获得的相位之间的差异在物体（1）的前表面和后表面被检测到确定。在形状确定装置（X）中，在将分束光束分散在物体（1）的前后表面之前的分束光束的光学外差干涉之前进行用于执行光学外差干涉的光调制决心。此外，在形状确定装置（X）中，在相位检测之前和分割光束之后的测量光学系统被引导到待确定的物体（1）的前表面和后表面一体地保持。

7. 发明申请

US20130222785A1 MEASUREMENT APPARATUS AND METHOD OF MANUFACTURING ARTICLE 审中-公开
标题翻译：测量装置和制造方法
公开(公告)号：US20130222785A1
公开(公告)日：2013-08-29
申请号：US13773833
申请日：2013-02-22
申请人： CANON KABUSHIKI KAISHA
发明人： Takamasa SASAKI
IPC分类号： G01C3/08
CPC分类号： G01C3/08 , G01B9/02003 , G01B9/02004 , G01B9/02007 , G01B9/02008 , G01B9/0207 , G01B2290/60
摘要： The present invention provides a measurement apparatus including a phase detection unit configured to detect, from interfering light of light reflected by a reference surface and light reflected by a test surface, a phase corresponding to an optical path length between the reference surface and the test surface, a refractive index detection unit configured to detect a refractive index of a space between the reference surface and the test surface, and a processing unit configured to obtain the distance from a first phase and a first refractive index detected when the wavelength of light from the light source is a first wavelength, a second phase and a second refractive index detected when the wavelength of light from the light source is a second wavelength, and a third phase at a synthetic wavelength of the first wavelength and the second wavelength.
摘要翻译：本发明提供一种测量装置，包括：相位检测单元，被配置为从参考表面反射的光和由测试表面反射的光的干涉光检测相应于参考表面和测试表面之间的光程长度的相位; ，被配置为检测所述参考表面和所述测试表面之间的空间的折射率的折射率检测单元，以及处理单元，被配置为获得当来自所述测试表面的光的波长时从第一相位和第一折射率获得的距离当来自光源的光的波长是第二波长时，光源是第一波长，第二相位和第二折射率，以及在第一波长和第二波长的合成波长处的第三相位。

8. 发明授权

US08363226B2 Optical interference measuring apparatus 有权
标题翻译：光干涉测量装置
公开(公告)号：US08363226B2
公开(公告)日：2013-01-29
申请号：US12716387
申请日：2010-03-03
申请人： Yoshiyuki Kuramoto
发明人： Yoshiyuki Kuramoto
IPC分类号： G01B9/02
CPC分类号： G01B9/02008 , G01B9/02003 , G01B9/02027 , G01B9/02067 , G01B9/0207 , G01B2290/45 , G01B2290/60 , G01B2290/70
摘要： An optical interference measuring apparatus comprises a first multiple-wavelength light source 200a emitting a light beam having a plurality of spectra, a second multiple-wavelength light source 200b emitting a light beam having a wavelength different from that of the light beam from the first multiple-wavelength light source, a polarizing beam splitter 6 separating the light beams, a reference surface 7 reflecting the light beam from the second multiple-wavelength light source 200b, a test surface 8 reflecting the light beam from the first multiple-wavelength light source 200a, spectral optical elements 9a, 9b dividing interference signals of the light beams, detecting devices 10a, 10b which detect interference signals having single wavelengths of the light beams for a plurality of frequencies, and an analyzer 11 processing the signals from the detecting devices 10a, 10b to calculate an optical path difference between the reference surface 7 and the test surface 8.
摘要翻译：光学干涉测量装置包括发射具有多个光谱的光束的第一多波长光源200a，发射具有与来自第一多个光束的光束波长不同的波长的光束的第二多波长光源200b 波长光源，分离光束的偏振分束器6，反射来自第二多波长光源200b的光束的参考表面7，反射来自第一多波长光源200a的光束的测试表面8 划分光束的光谱元件9a，9b，检测多个频率的光束单波长的干涉信号的检测装置10a，10b以及来自检测装置10a， 10b来计算参考表面7和测试表面8之间的光程差。

9. 发明授权

US08325348B2 Laser interferometer system for measuring roll angle 有权
标题翻译：激光干涉仪系统用于测量滚动角度
公开(公告)号：US08325348B2
公开(公告)日：2012-12-04
申请号：US12541564
申请日：2009-08-14
申请人： Wenmei Hou , Xianbin Zhao , Yunbo Zhang
发明人： Wenmei Hou , Xianbin Zhao , Yunbo Zhang
IPC分类号： G01B11/02
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02018 , G01B9/02019 , G01B11/26 , G01B2290/15 , G01B2290/70
摘要： A laser interferometer system for measuring roll angle around the direction of linear displacement comprises a light source of a frequency stabilized input beam (15) with two linear orthogonally polarized components which may or may not be of the same frequency, a polarizing beam splitting prism, two quarter-wave retardation plates, a corner cube retroreflector, a prism assembly, attached to the mechanical apparatus whose roll angle of travel is to be measured, a wedge mirror assembly, a polarizer, a photoelectric detector, and a phase meter; the light source emits a frequency-stable incident beam and generates a stable electric reference signal; under the actions of the polarizing beam splitting prism, quarter-wave plate and corner cube retroreflector, the incident beam travels twice through and then reflected twice by the wedge mirror assembly, and finally exits from the polarizing beam splitting prism. The polarizer mixes the orthogonal components of the output beam and the photoelectric detector generates an electric signal and then the phase meter compares the phase difference of said electric measurement signal with said electric reference signal, then the roll angle of travel can be measured. The advantage of present invention is: the system has simple structure but with high measurement precision, it can be applied to the precision geometrical measurement and the establishment of precision benchmark metrology in wide high-tech fields such as military industry, aerospace engineering and digital controlled machine tools.
摘要翻译：用于测量围绕线性位移方向的侧倾角的激光干涉仪系统包括具有两个线性正交极化分量的频率稳定输入光束（15）的光源，所述两个线性正交极化分量可以是或可以不是相同的频率，偏振分束棱镜，两个四分之一波长的相位差板，一个角部棱镜后向反射器，一个棱镜组件，附着在要测量其行进角度的机械装置上，一个楔形反射镜组件，一个偏振片，光电探测器和一个相位计; 光源发射频率稳定的入射光束并产生稳定的电参考信号; 在偏振分束棱镜，四分之一波片和角棱镜后向反射镜的作用下，入射光束通过楔形镜组件行进两次，然后反射两次，最后离开偏振分束棱镜。偏振器混合输出光束的正交分量，光电检测器产生电信号，然后相位计将所述电测信号的相位差与所述电参考信号进行比较，可以测量滚动行驶角。本发明的优点是：该系统结构简单，测量精度高，可应用于军事工业，航空航天工程和数字控制等广泛高科技领域的精密几何测量和精密基准测量的建立机械工具。

10. 发明授权

US08040524B2 Optical tomography imaging system, contact area detecting method and image processing method using the same, and optical tomographic image obtaining method 失效
标题翻译：光学层析成像系统，接触面积检测方法和使用其的图像处理方法以及光学断层图像获取方法
公开(公告)号：US08040524B2
公开(公告)日：2011-10-18
申请号：US12233983
申请日：2008-09-19
申请人： Satoshi Ozawa
发明人： Satoshi Ozawa
IPC分类号： G01B9/02
CPC分类号： G01N21/4795 , A61B5/0066 , A61B5/0073 , A61B5/7257 , G01B9/02003 , G01B9/02004 , G01B9/02044 , G01B9/02083 , G01B9/02091 , G01N2021/1787
摘要： The optical tomography imaging system includes a light source, a branching section which branches a light beam into a measuring light beam and a reference beam, an optical probe having an optical fiber, a measurement section which irradiates a measurement target with the measuring beam and picks up a reflected beam, and a sheath which encloses the optical fiber and the measurement section, a multiplexing section which combines the reflected beam with the reference beam to create an interference beam, an interference beam detecting section which detects the interference beam as interference signals, and a contact detecting section which detects a contact area in which the optical probe and the measurement target are in contact with each other. The contact detecting section calculates from the detected interference signals a distance between the optical probe and the measurement target, and uses the calculated distance to detect the contact area.
摘要翻译：光学层析成像系统包括光源，将光束分支成测量光束的分支部分和参考光束，具有光纤的光学探针，用测量光束照射测量对象的测量部分反射光束，以及包围光纤和测量部分的鞘，将反射光束与参考光束组合以产生干涉光束的多路复用部分，将干扰光束检测为干扰信号的干涉光束检测部分，以及接触检测部，其检测光学探针和测量对象彼此接触的接触区域。接触检测部根据检测到的干涉信号计算光学探针与测量对象之间的距离，并使用计算出的距离来检测接触面积。

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