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1. 发明授权

US11668639B2 Method for processing a substrate by using fluid flowing through a particle detector 有权
公开(公告)号：US11668639B2
公开(公告)日：2023-06-06
申请号：US17228656
申请日：2021-04-12
申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
发明人： En-Tian Lin , Chwen Yu , Mei Lee , Shu-Yu Hsu
IPC分类号： G01R1/04 , G01R1/067 , G01R1/073 , G01N15/10 , G01N15/12 , G01N27/00 , G01N33/28 , G01N21/00 , H01L21/67 , G01N15/00
CPC分类号： G01N15/1227 , H01L21/67023 , G01N2015/0038 , G01N2015/1254
摘要： A method for processing a substrate by using fluid flowing through a particle detector is provided. The particle detector is utilized to detect nano-particles contained in fluid. The particle detector includes a substrate and a pair of sensing electrodes disposed on the substrate. The substrate includes nano-pores, wherein the pore size of the nano-pores is greater than the particle size of the nano-particles, allowing the nano-particles contained in the fluid passing through the nano-pores. The pair of sensing electrodes are positioned adjacent to at least one of the nano-pores.

2. 发明申请

US20160025610A1 MEASUREMENT APPARATUS AND MEASUREMENT METHOD 审中-公开
标题翻译：测量装置和测量方法
公开(公告)号：US20160025610A1
公开(公告)日：2016-01-28
申请号：US14775099
申请日：2014-02-07
申请人： SONY CORPORATION
发明人： Yoichi Katsumoto , Kazumasa Sato , Marcaurele Brun
IPC分类号： G01N15/12 , G01N15/02
CPC分类号： G01N15/1209 , G01N15/0266 , G01N15/1031 , G01N15/1056 , G01N15/1227 , G01N2015/0065 , G01N2015/1081
摘要： A measurement apparatus includes a generation section and a measurement section and performs a predetermined measurement using a flow channel device including a narrow channel through which particles pass by a flow of a fluid and a measurement electrode section provided in the vicinity of the narrow channel. The generation section generates, in the measurement electrode section, an AC voltage that is higher than a characteristic frequency defined by a conductance of the fluid including the particles in the narrow channel and an electrical double layer capacitance formed by the measurement electrode section and has a frequency range indicating a conductance corresponding to a size of the particles. The measurement section measures, while the AC voltage is applied to the measurement electrode section, an electrical amount including at least the conductance obtained when the particles pass through the narrow channel.
摘要翻译：测量装置包括生成部分和测量部分，并且使用包括通过流体的微粒通过的窄通道的流道装置和设置在窄通道附近的测量电极部分的流路装置进行预定的测量。该生成部在测量电极部中产生高于由窄通道中包含粒子的流体的导电性所决定的特性频率的AC电压和由测量电极部形成的双电层电容，频率范围表示对应于颗粒尺寸的电导。测量部分测量交流电压被施加到测量电极部分时，至少包括当粒子通过窄通道时获得的电导的电量。

3. 发明申请

US20110279130A1 FINGERED ELECTRODES FOR MICROFLUIDIC SINGLE PARTICLE ANALYSIS 有权
标题翻译：用于微流体单颗粒分析的手指电极
公开(公告)号：US20110279130A1
公开(公告)日：2011-11-17
申请号：US13146244
申请日：2010-01-27
申请人： Hermann Christian Reccius , Steven Charles Deane , Cees Van Berkel
发明人： Hermann Christian Reccius , Steven Charles Deane , Cees Van Berkel
IPC分类号： G01R27/28
CPC分类号： G01N15/1227 , G01N15/1056 , G01N2015/1254 , G01P15/125 , G01R27/2605
摘要： The electrical properties of particle solutions can be investigated on a single particle basis by using micro fluidic channels. The impedance can be measured across the channel using at least one pair of conductive electrodes, at least one electrode of a pair being a fingered electrode having a plurality of fingers. The pattern of fingered electrodes creates a longer and more complicated measurement signal shape which leads to a significant improvement of measurement sensitivity. An application for the proposed technology is to significantly improve the measurement sensitivity of impedance measurements on blood cells, leading to a better differentiation between different types of white blood cells. Better measurement sensitivity also enables the measurement of smaller particles and higher throughput.
摘要翻译：可以通过使用微流体通道在单个颗粒的基础上研究颗粒溶液的电学性质。可以使用至少一对导电电极跨越沟道测量阻抗，一对的至少一个电极是具有多个指状物的指形电极。指形电极的图案产生更长且更复杂的测量信号形状，这导致测量灵敏度的显着改善。所提出的技术的应用是显着提高血细胞阻抗测量的测量灵敏度，导致不同类型的白细胞之间的更好的分化。更好的测量灵敏度还可以测量更小的颗粒和更高的产量。

4. 发明授权

US07928718B2 Method for calibrating a particle counting apparatus 有权
标题翻译：校准粒子计数装置的方法
公开(公告)号：US07928718B2
公开(公告)日：2011-04-19
申请号：US11664170
申请日：2005-09-30
申请人： Ulrik Darling Larsen
发明人： Ulrik Darling Larsen
IPC分类号： G01N27/00 , G06M11/02
CPC分类号： G01N15/1227
摘要： A method of calibration of a particle characterization apparatus, and a particle characterization apparatus, in which particles suspended in a liquid are passed through an orifice one by one for characterization of the particles, for instance by Coulter counting. The calibration does not require utilization of special calibration particles or liquids. A priori knowledge of the shape of a typical size distribution of a blood sample is utilized to adjust the apparatus based on an initial relatively short counting period of the sample in question. The initially determined size distribution is compared to the corresponding known typical size distribution and the apparatus is subsequently adjusted to counteract possible differences. Upon adjustment of the apparatus, the remaining part of the sample is passed through the orifice for determination of the actual particle size distribution of the remaining sample.
摘要翻译：颗粒表征装置的校准方法和颗粒表征装置，其中悬浮在液体中的颗粒逐个通过孔口，用于表征颗粒，例如通过库尔特计数。校准不需要使用特殊的校准颗粒或液体。利用血液样本的典型尺寸分布的形状的先验知识来基于所讨论的样品的初始相对较短的计数周期来调节装置。将初始确定的尺寸分布与相应的已知典型尺寸分布进行比较，随后调整该装置以抵消可能的差异。在调节设备时，将剩余部分样品通过孔口，以确定剩余样品的实际粒度分布。

5. 发明申请

US20070047674A1 Method and apparatus for finding center amplitude of particle size-representative pulses produced by aperture based sizing system 有权
标题翻译：用于找到由孔径尺寸系统产生的粒度代表性脉冲的中心幅度的方法和装置
公开(公告)号：US20070047674A1
公开(公告)日：2007-03-01
申请号：US11210352
申请日：2005-08-24
申请人： Jeffrey Rose
发明人： Jeffrey Rose
IPC分类号： H04L27/06
CPC分类号： H04L25/062 , G01N15/1227 , G01R29/023 , H03K5/1532
摘要： Pipelined digital processing circuitry for use with a particle size measurement system, such as that employed in automated hematology systems, measures the ‘center’ amplitude of a pulse produced by a particle or cell passing through a flow cell measurement aperture, such as the detection aperture of a Coulter Principle-based electronic particle analysis system. The circuitry of the invention processes successive pulse samples by means of a half-peak/half-width methodology that analyzes each pulse as its continuously sampled and temporarily stored in memory. Concurrent analysis of the data in memory during storage locates the pulse width at a prescribed percentage (e.g., 50%) of the peak amplitude of the pulse. This pulse width data is then processed to determine the pulse amplitude at the midpoint of the width of the pulse between its mid-peak values on rising edge and fall edge portions of the pulse.
摘要翻译：与用于自动血液系统中的粒度测量系统一起使用的流水线数字处理电路测量由通过流动池测量孔径的颗粒或细胞产生的脉冲的“中心”幅度，例如检测孔径基于Coulter原理的电子粒子分析系统。本发明的电路通过分析每个脉冲作为其连续采样并临时存储在存储器中的半峰/半角方法来处理连续脉冲样本。在存储器期间对存储器中的数据的并行分析以脉冲的峰值幅度的规定百分比（例如，50％）来定位脉冲宽度。然后处理该脉冲宽度数据，以确定脉冲宽度的中点处的脉冲幅度，其脉冲的上升沿和下降沿部分之间的中间峰值之间。

6. 发明申请

US20060263925A1 Ethernet-powered particle counting system 审中-公开
标题翻译：以太网供电的粒子计数系统
公开(公告)号：US20060263925A1
公开(公告)日：2006-11-23
申请号：US11125453
申请日：2005-05-10
申请人： David Chandler
发明人： David Chandler
IPC分类号： H01L21/00
CPC分类号： G01N35/00871 , G01N15/1227 , G01N2035/00881
摘要： A system includes a particle counter having a data output, an Ethernet cable adapted for connecting the data output of the particle counter to a monitoring station, and a power over Ethernet (POE) type power supply structured for providing power to the particle counter via the Ethernet cable. Apparatus includes a particle counter having an air movement device powered solely by a POE supply. Apparatus may include a particle counter having an air mover, power management subsystem, and Ethernet data output, the power management subsystem for monitoring power consumption of the air mover and maintaining the power consumption below a predetermined amount, and an electrical supply for powering the particle counter via an Ethernet medium. A method includes powering a particle counter over Ethernet medium via a POE power supply, detecting microscopic particles, and producing digital data based on the detecting, and transmitting the data over the Ethernet medium.
摘要翻译：系统包括具有数据输出的粒子计数器，适用于将粒子计数器的数据输出连接到监测站的以太网电缆，以及经由以太网供电（POE）型电源，其经由以太网电缆。装置包括具有仅由POE电源供电的空气移动装置的颗粒计数器。装置可以包括具有空气推动器，电力管理子系统和以太网数据输出的粒子计数器，用于监视鼓风机的功率消耗并将功率消耗保持在预定量以下的电力管理子系统，以及为颗粒供电的电源计数器通过以太网介质。一种方法包括通过POE电源为以太网介质提供粒子计数器，检测微观粒子，并根据检测产生数字数据，并通过以太网介质发送数据。

7. 发明申请

US20060147346A1 Method for measuring a permeation rate, a test and an apparatus for measuring and testing 失效
标题翻译：测量渗透速率的方法，测试和测量和测试的设备
公开(公告)号：US20060147346A1
公开(公告)日：2006-07-06
申请号：US11298651
申请日：2005-12-12
申请人： Petrus Bouten , Giovanni Nisato , Peter Slikkerveer , Henricus Franciscus Van Tongeren , Eliav Haskal , Paul Van Der Sluis
发明人： Petrus Bouten , Giovanni Nisato , Peter Slikkerveer , Henricus Franciscus Van Tongeren , Eliav Haskal , Paul Van Der Sluis
IPC分类号： G01N15/08
CPC分类号： G01N15/082 , G01N15/1227 , G01N2015/086
摘要： A method is proposed for measuring water permeability of substrates (1). A reactive compound (Ca, Ba) which reacts with a diffusing material, e.g. water, is applied on the substrate and the change in time of transmissivity, reflectivity of the layer is monitored in time.
摘要翻译：提出了一种测量基材（1）的透水性的方法。与扩散材料反应的反应性化合物（Ca，Ba），例如水被施加在基板上并且透射时间的变化，时间上监测该层的反射率。

8. 发明申请

US20010050562A1 Particle measurement apparatus and method 失效
标题翻译：粒子测量装置及方法
公开(公告)号：US20010050562A1
公开(公告)日：2001-12-13
申请号：US09805208
申请日：2001-03-14
发明人： Seiya Shinabe , Kunio Ueno
IPC分类号： G01R027/08
CPC分类号： G01N15/12 , G01N15/1227 , G01N15/1459 , G01N2015/1087 , G01N2015/1493
摘要： A particle measurement apparatus includes: a particle signal detector for detecting a particle signal; a false signal generator for generating a false signal corresponding to the particle signal; a selector for selecting the particle signal or the false signal, a non-linear amplifier; a first calculator for receiving the signal selected by the selector through the non-linear amplifier to calculate a characteristic parameter; a second calculator for receiving the signal selected by the selector not through the non-linear amplifier to calculate the characteristic parameter; a comparator for including the characteristic parameters calculated by the first and second calculators respectively when the selector selects the false signal; a memory for storing a comparison result of the comparator; and a compensator for compensating the characteristic parameter calculated by the first calculator on the basis of the comparison result when the selector selects the particle signal.
摘要翻译：粒子测量装置包括：粒子信号检测器，用于检测粒子信号; 用于产生对应于所述粒子信号的假信号的伪信号发生器; 用于选择粒子信号或假信号的选择器，非线性放大器; 第一计算器，用于通过非线性放大器接收由选择器选择的信号，以计算特征参数; 第二计算器，用于不通过非线性放大器接收由选择器选择的信号来计算特征参数; 比较器，当所述选择器选择所述假信号时，分别包括由所述第一和第二计算器计算的特征参数; 用于存储比较器的比较结果的存储器; 以及补偿器，用于当选择器选择粒子信号时，基于比较结果来补偿由第一计算器计算的特性参数。

9. 发明授权

US4418313A Process and circuit arrangement for the determination in a diluted blood sample of the number of red blood corpuscles, the mean cell volume, the value of haematocrit and other blood parameters 失效
标题翻译：用于稀释血液样品中红细胞数量，平均细胞体积，血细胞比容和其他血液参数值的测定的过程和电路布置
公开(公告)号：US4418313A
公开(公告)日：1983-11-29
申请号：US300383
申请日：1981-09-08
申请人： Laszlo Cserey , Pal Vimlati , Pal Zillich
发明人： Laszlo Cserey , Pal Vimlati , Pal Zillich
IPC分类号： G01N15/12 , G01N27/00
CPC分类号： G01N15/12 , G01N15/1227
摘要： A device and process for examining the size of particles suspended in a liquid, in particular for determining the MCV of red blood cells, having a measurement aperture traversed by the suspension and two electrodes arranged in the region of the measurement aperture and connected to evaluation circuitry, each of which electrodes producing one pulse per particle passing therethrough, the amplitude of which pulse is a measure of the volume of the particle. A differential discriminator for the pulse amplitudes and a further discriminator are connected in front of the evaluation circuitry wherein the further discriminator permits the passage of only pulses whose duration is less than the duration of a pulse coming from a single particle which has a maximum amplitude determined by the differential discriminator.
摘要翻译：用于检查悬浮在液体中的颗粒的尺寸的装置和方法，特别是用于确定红细胞的MCV，具有由悬浮液穿过的测量孔和布置在测量孔的区域中并连接到评估电路的两个电极每个电极每个粒子通过其中产生一个脉冲，其脉冲的幅度是粒子的体积的量度。用于脉冲幅度的差分鉴别器和另外的鉴别器连接在评估电路的前面，其中进一步的鉴别器仅允许其持续时间小于来自具有确定的最大幅度的单个粒子的脉冲的持续时间的脉冲通过差分鉴别器。

10. 发明授权

US4314346A Auxiliary apparatus for a particle analyser 失效
标题翻译：粒子分析仪辅助装置
公开(公告)号：US4314346A
公开(公告)日：1982-02-02
申请号：US128643
申请日：1980-03-10
申请人： Markus Feier , Raymond Frey , Ulrich Marti
发明人： Markus Feier , Raymond Frey , Ulrich Marti
IPC分类号： G01N15/10 , G01N15/12 , G01N33/48 , G01N33/49 , G01N15/02
CPC分类号： G01N15/1227
摘要： An auxiliary apparatus for a particle analyzer for measuring the particle count within particle size intervals bounded by shiftable or displaceable thresholds. Infeed lines conduct the signals generated in a feeler to comparators. Other infeed lines conduct the comparison voltages generated by comparison voltage generators to the same comparators, an operating element simultaneously alters the comparison voltages from two comparison voltage generators by the same magnitude and a selector switch connects one of two infeed lines with one of the infeed lines. The inputs of an antivalence or Exclusive-Or discriminator are connected by an infeed line or conductor with a time-delay element and by an infeed line or conductor with one comparator, the output of which discriminator is connected by a line or conductor with a pulse counter.
摘要翻译：用于粒子分析仪的辅助装置，用于测量由可移动或可移位阈值界定的粒度间隔内的粒子数。进给线将比较器中产生的信号传递给触发器。其他馈入线路将比较电压发生器产生的比较电压传送到相同的比较器，操作元件同时改变来自两个比较电压发生器的比较电压相同的量值，并且选择器开关将两条馈入线路中的一条与一条馈入线路。反价值或异或鉴别器的输入通过具有延时元件的馈入线或导体与具有一个比较器的馈入线或导体连接，其中的输出通过线或导体与脉冲相连计数器。

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