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    • 2. 发明授权
    • Method and apparatus for temperature control
    • 温度控制方法和装置
    • US06525550B2
    • 2003-02-25
    • US09727854
    • 2000-12-01
    • Qi Pan
    • Qi Pan
    • G01R2708
    • G05D23/306
    • A two-stage circuit configured to control the temperature of a device, having: a first stage connected to the device for controlling the temperature of the device; and a second stage having a temperature sensor and a heat source associated with the first stage for controlling the temperature of the first stage. An apparatus and method for controlling the temperature of an optical, electrical, or electronic device, or other analogous device provides a greater degree of control, i.e. control within a narrower band than is currently possible, by utilising a second stage of control associated with the first stage of control.
    • 一种被配置为控制装置的温度的两级电路,具有:与装置连接的第一级,用于控制装置的温度; 以及具有与第一级相关联的温度传感器和热源的第二级,用于控制第一级的温度。 用于控制光学,电子或电子设备或其他类似设备的温度的装置和方法通过利用与第二级控制相关联的第二级控制来提供更大程度的控制,即在比当前可能的更窄的带内进行控制 第一阶段的控制。
    • 10. 发明授权
    • Method and apparatus for temperature control of heater
    • 加热器温度控制方法和装置
    • US06627859B1
    • 2003-09-30
    • US09857849
    • 2001-06-11
    • Shigeru KasaiNaoto Ikeda
    • Shigeru KasaiNaoto Ikeda
    • H05B302
    • H05B1/0247G05D23/1902G05D23/306
    • A CVD device (100) includes a 142 process chamber (102), in the wall of which first to fourth cartridge heaters (146, 148, 150, 152) are buried. The heaters have resistance whose value increases with temperature. A heater controller (160) determines the heater resistance from the current and voltage values associated with each heater. The heater controller (160) corrects a reference resistance corresponding to a set temperature by using a correction value corresponding to the temperature detected by a temperature sensor (250), and multiplies the corrected reference resistance by the temperature distribution constant of each heater to determine the target resistance. The heater controller (160) properly controls the phase of the AC power supplied to each heater so that the heater resistance may follow the target resistance. The first to fourth cartridge heaters (146, 148, 150, 152) are thus controlled accurately.
    • CVD装置(100)包括在第一至第四盒式加热器(146,148,150,152)的壁中的142处理室(102)。 加热器的电阻值随温度升高。 加热器控制器(160)根据与每个加热器相关联的电流和电压值确定加热器电阻。 加热器控制器(160)通过使用与温度传感器(250)检测到的温度相对应的校正值来校正与设定温度相对应的参考电阻,并将校正的参考电阻乘以每个加热器的温度分布常数,以确定 目标电阻。 加热器控制器(160)适当地控制提供给每个加热器的AC电力的相位,使得加热器电阻可以跟随目标电阻。 因此,第一至第四盒式加热器(146,148,150,152)被精确地控制。