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    • 1. 发明申请
    • Printed fourier filtering in optical inspection tools
    • 光学检测工具中的印刷光栅过滤
    • US20070247668A1
    • 2007-10-25
    • US11410276
    • 2006-04-24
    • Dan FuchsShai Silberstein
    • Dan FuchsShai Silberstein
    • G06K9/76G06K15/00
    • G06K9/741G01N21/95623G06K2209/19
    • A spatial mask printer may be used in conjunction with an optical inspection tool. The tool can be used to obtain a Fourier image of an inspected object, and a filter mask image can be designed to block certain aspects of the object's image in the Fourier plane corresponding to repetitive aspects of the imaged object. The filter mask image can then be printed and used in the tool during the inspection process. The mask image may be designed by hand or by computer and may be stored for later use. Filters may be automatically placed into the optical path of the inspection tool by a filter wheel, or may be housed in other filter banks. The printer may be configured to operate in a clean room environment, and may be integrated into the optical inspection tool.
    • 空间掩模打印机可以与光学检查工具结合使用。 可以使用该工具来获得被检查对象的傅里叶图像,并且可以设计滤波器掩模图像以阻挡对应于成像对象的重复方面的傅立叶平面中的对象的图像的某些方面。 然后可以在检查过程中将过滤器掩模图像打印并在工具中使用。 掩模图像可以手动或通过计算机设计,并且可以存储以供以后使用。 过滤器可以通过过滤轮自动地放置在检查工具的光路中,或者可以容纳在其他过滤器组中。 打印机可以被配置为在洁净室环境中操作,并且可以集成到光学检查工具中。
    • 6. 发明申请
    • IMAGE REGISTRATION USING ROTATION TOLERANT CORRELATION METHOD
    • 使用旋转稳定相关方法的图像注册
    • US20100086220A1
    • 2010-04-08
    • US12247603
    • 2008-10-08
    • Kathleen Minear
    • Kathleen Minear
    • G06K9/68
    • G06K9/741G06T7/32
    • A method for correlating or finding similarity between two data sets. The method can be used for correlating two images with common scene content in order to find correspondence points between the data sets. These correspondence points then can be used to find the transformation parameters which when applied to image 2 brings it into alignment with image 1. The correlation metric has been found to be invariant under image rotation and when applied to corresponding areas of a reference and target image, creates a correlation surface superior to phase and norm cross correlation with respect to the correlation peak to correlation surface ratio. The correlation metric was also found to be superior when correlating data from different sensor types such as from SAR and EO sensors. This correlation method can also be applied to data sets other than image data including signal data.
    • 一种用于相关或发现两个数据集之间的相似性的方法。 该方法可以用于将两个图像与公共场景内容相关联,以便找到数据集之间的对应点。 然后,这些对应点可以用于找到当应用于图像2使其与图像1对准时的变换参数。已经发现相关度量在图像旋转下是不变的,并且当应用于参考和目标图像的相应区域时 ,产生相对于相关峰值与相关面积比优于相位和标准互相关的相关表面。 当将来自不同传感器类型的数据(如SAR和EO传感器)相关时,相关性度量也被认为是优越的。 该相关方法也可以应用于包括信号数据的图像数据以外的数据集。